CA2322518A1 - Micromechanical potentiometric sensors - Google Patents
Micromechanical potentiometric sensors Download PDFInfo
- Publication number
- CA2322518A1 CA2322518A1 CA002322518A CA2322518A CA2322518A1 CA 2322518 A1 CA2322518 A1 CA 2322518A1 CA 002322518 A CA002322518 A CA 002322518A CA 2322518 A CA2322518 A CA 2322518A CA 2322518 A1 CA2322518 A1 CA 2322518A1
- Authority
- CA
- Canada
- Prior art keywords
- spring element
- sample
- microcantilever
- chemical
- coated region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
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- MUMZUERVLWJKNR-UHFFFAOYSA-N oxoplatinum Chemical compound [Pt]=O MUMZUERVLWJKNR-UHFFFAOYSA-N 0.000 description 1
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- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/026—Specifications of the specimen
- G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/042,601 | 1998-03-16 | ||
| US09/042,601 US6016686A (en) | 1998-03-16 | 1998-03-16 | Micromechanical potentiometric sensors |
| PCT/US1999/005747 WO1999047908A1 (en) | 1998-03-16 | 1999-03-16 | Micromechanical potentiometric sensors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2322518A1 true CA2322518A1 (en) | 1999-09-23 |
Family
ID=21922792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002322518A Abandoned CA2322518A1 (en) | 1998-03-16 | 1999-03-16 | Micromechanical potentiometric sensors |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6016686A (enExample) |
| EP (1) | EP1084392A4 (enExample) |
| JP (1) | JP2002506990A (enExample) |
| AU (1) | AU3093399A (enExample) |
| CA (1) | CA2322518A1 (enExample) |
| WO (1) | WO1999047908A1 (enExample) |
Families Citing this family (97)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9801286D0 (en) * | 1998-01-21 | 1998-03-18 | Univ Cambridge Tech | Sensor |
| US6167748B1 (en) * | 1998-08-31 | 2001-01-02 | Lockheed Martin Energy Research Corporation | Capacitively readout multi-element sensor array with common-mode cancellation |
| GB9819319D0 (en) * | 1998-09-05 | 1998-10-28 | Aea Technology Plc | Assay of chemical binding |
| US6289717B1 (en) * | 1999-03-30 | 2001-09-18 | U. T. Battelle, Llc | Micromechanical antibody sensor |
| US6575020B1 (en) * | 1999-05-03 | 2003-06-10 | Cantion A/S | Transducer for microfluid handling system |
| US6308553B1 (en) * | 1999-06-04 | 2001-10-30 | Honeywell International Inc | Self-normalizing flow sensor and method for the same |
| US6245590B1 (en) * | 1999-08-05 | 2001-06-12 | Microvision Inc. | Frequency tunable resonant scanner and method of making |
| US6924476B2 (en) * | 2002-11-25 | 2005-08-02 | Microvision, Inc. | Resonant beam scanner with raster pinch compensation |
| US6653621B2 (en) * | 2001-03-23 | 2003-11-25 | Microvision, Inc. | Frequency tunable resonant scanner and method of making |
| JP3564366B2 (ja) * | 1999-08-13 | 2004-09-08 | 三菱重工業株式会社 | 除塵装置 |
| JP2003507723A (ja) * | 1999-08-19 | 2003-02-25 | ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア | カンチレバーアレイブロックのパレットにより微小力を可視的に識別する装置及び方法 |
| US6269685B1 (en) * | 1999-09-23 | 2001-08-07 | Ut Battelle, Llc | Viscosity measuring using microcantilevers |
| JP4992000B2 (ja) | 1999-11-03 | 2012-08-08 | インターナショナル・ビジネス・マシーンズ・コーポレーション | ターゲット・オリゴヌクレオチド・ストランドを検出するセンサ・システム及び方法 |
| US20060210440A1 (en) * | 1999-11-17 | 2006-09-21 | General Electric Company | Opto-acoustic sensor system and associated method |
| US6523392B2 (en) * | 2000-01-25 | 2003-02-25 | Arizona Board Of Regents | Microcantilever sensor |
| CN100431637C (zh) * | 2000-07-07 | 2008-11-12 | 汾沃有限公司 | 使用微机电传感器的医疗系统、方法和仪器 |
| US7148017B1 (en) * | 2000-07-12 | 2006-12-12 | Cornell Research Foundation, Inc. | High sensitivity mechanical resonant sensor |
| AUPR007500A0 (en) * | 2000-09-13 | 2000-10-05 | Mulvaney, Paul | Micro cantilever rheometer |
| FR2816407B1 (fr) * | 2000-11-06 | 2003-03-28 | Centre Nat Rech Scient | Appareil de detection en parallele du comportement de microoscillateurs mecaniques |
| KR100393188B1 (ko) * | 2000-12-29 | 2003-07-31 | 삼성전자주식회사 | 다초점 렌즈를 이용한 위상공액 홀로그래픽 정보 저장장치 및 정보 저장 방법 |
| US6545495B2 (en) | 2001-04-17 | 2003-04-08 | Ut-Battelle, Llc | Method and apparatus for self-calibration of capacitive sensors |
| US7044911B2 (en) | 2001-06-29 | 2006-05-16 | Philometron, Inc. | Gateway platform for biological monitoring and delivery of therapeutic compounds |
| US20060198760A1 (en) * | 2001-08-02 | 2006-09-07 | General Electric Company | Opto-acoustic sensor device and associated method |
| US20030068655A1 (en) * | 2001-09-12 | 2003-04-10 | Protiveris, Inc. | Microcantilever apparatus and methods for detection of enzymes |
| US20060121502A1 (en) * | 2001-11-09 | 2006-06-08 | Robert Cain | Microfluidics apparatus for cantilevers and methods of use therefor |
| US6926864B2 (en) * | 2001-11-09 | 2005-08-09 | Protiveris Inc | Microfluidics apparatus and methods for use thereof |
| US6866819B1 (en) | 2001-11-13 | 2005-03-15 | Raytheon Company | Sensor for detecting small concentrations of a target matter |
| US7354448B2 (en) * | 2001-11-29 | 2008-04-08 | Palomar Medical Technologies, Inc. | Dental phototherapy methods and compositions |
| US6671631B2 (en) | 2002-01-04 | 2003-12-30 | General Electric Company | Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials |
| US7064834B2 (en) * | 2002-01-22 | 2006-06-20 | Praxair Technology, Inc. | Method for analyzing impurities in carbon dioxide |
| WO2003062135A1 (en) * | 2002-01-24 | 2003-07-31 | Cantion A/S | A sensor |
| EP1472534A1 (en) * | 2002-02-08 | 2004-11-03 | Cantion A/S Scion.DTU | A sensor comprising mechanical amplification of surface stress sensitive cantilever |
| US20030154149A1 (en) * | 2002-02-13 | 2003-08-14 | Dilip Gajendragadkar | System and method of creating and executing a restricted stock sale plan |
| JP3828030B2 (ja) * | 2002-03-25 | 2006-09-27 | エスアイアイ・ナノテクノロジー株式会社 | 温度測定プローブおよび温度測定装置 |
| US7125451B2 (en) * | 2002-04-23 | 2006-10-24 | Sharp Laboratories Of America, Inc. | Crystal-structure-processed mechanical devices and methods and systems for making |
| US7128783B2 (en) * | 2002-04-23 | 2006-10-31 | Sharp Laboratories Of America, Inc. | Thin-film crystal-structure-processed mechanical devices, and methods and systems for making |
| US20030196591A1 (en) * | 2002-04-23 | 2003-10-23 | Hartzell John W. | Formation of crystal-structure-processed mechanical, and combined mechanical and electrical, devices on low-temperature substrates |
| US7156916B2 (en) * | 2002-04-23 | 2007-01-02 | Sharp Laboratories Of America, Inc. | Monolithic integrated crystal-structure-processed mechanical, and combined mechanical and electrical devices, and methods and systems for making |
| US6860939B2 (en) * | 2002-04-23 | 2005-03-01 | Sharp Laboratories Of America, Inc. | Semiconductor crystal-structure-processed mechanical devices, and methods and systems for making |
| US7135070B2 (en) * | 2002-04-23 | 2006-11-14 | Sharp Laboratories Of America, Inc. | Monolithic stacked/layered crystal-structure-processed mechanical, and combined mechanical and electrical, devices and methods and systems for making |
| US7395693B2 (en) * | 2004-12-02 | 2008-07-08 | The Arizona Board of Regents, a body corporate of the state of Arizona acting for Northern Arizona University | Embedded piezoelectric microcantilever sensors |
| JP2005528629A (ja) * | 2002-06-03 | 2005-09-22 | アリゾナ ボード オブ リージェンツ | ハイブリッド微小片持ち梁センサー |
| US7270952B2 (en) * | 2002-09-24 | 2007-09-18 | Intel Corporation | Detecting molecular binding by monitoring feedback controlled cantilever deflections |
| CN100342235C (zh) * | 2002-09-24 | 2007-10-10 | 英特尔公司 | 通过悬臂偏转检测和／或识别分析物的方法和装置 |
| JP4329322B2 (ja) * | 2002-10-04 | 2009-09-09 | ソニー株式会社 | 相互反応作用検出方法及びバイオアッセイ装置、並びにバイオアッセイ用基板 |
| US8288154B2 (en) * | 2002-10-21 | 2012-10-16 | Alegis Microsystems | Nanomotion sensing system and method |
| WO2004044569A2 (en) * | 2002-11-06 | 2004-05-27 | Carnegie Mellon University | Mems membrane based sensor |
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| AU3093399A (en) | 1999-10-11 |
| JP2002506990A (ja) | 2002-03-05 |
| WO1999047908A1 (en) | 1999-09-23 |
| EP1084392A1 (en) | 2001-03-21 |
| US6016686A (en) | 2000-01-25 |
| EP1084392A4 (en) | 2001-06-27 |
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