CA2320798C - Dispositifs actifs evolues et procedes d'analyse et de diagnostic en biologie moleculaire - Google Patents

Dispositifs actifs evolues et procedes d'analyse et de diagnostic en biologie moleculaire Download PDF

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Publication number
CA2320798C
CA2320798C CA002320798A CA2320798A CA2320798C CA 2320798 C CA2320798 C CA 2320798C CA 002320798 A CA002320798 A CA 002320798A CA 2320798 A CA2320798 A CA 2320798A CA 2320798 C CA2320798 C CA 2320798C
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CA
Canada
Prior art keywords
substrate
array
chip
sealant
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002320798A
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English (en)
Other versions
CA2320798A1 (fr
Inventor
Donald E. Ackley
Paul D. Swanson
Scott O. Graham
Elizabeth L. Mather
Timothy L. Leclair
William F. Butler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanogen Inc
Original Assignee
Nanogen Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/026,618 external-priority patent/US6099803A/en
Priority claimed from US09/239,598 external-priority patent/US6331274B1/en
Priority claimed from US09/240,931 external-priority patent/US6315953B1/en
Priority claimed from US09/239,569 external-priority patent/US6068818A/en
Priority claimed from US09/240,489 external-priority patent/US6225059B1/en
Priority claimed from US09/240,920 external-priority patent/US6254827B1/en
Application filed by Nanogen Inc filed Critical Nanogen Inc
Publication of CA2320798A1 publication Critical patent/CA2320798A1/fr
Application granted granted Critical
Publication of CA2320798C publication Critical patent/CA2320798C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009RRAM elements whose operation depends upon chemical change
    • G11C13/0014RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • G11C13/0019RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material comprising bio-molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C13/00Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009RRAM elements whose operation depends upon chemical change
    • G11C13/0014RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C19/00Digital stores in which the information is moved stepwise, e.g. shift registers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409Unipolar field-effect transistors
    • H01L29/66477Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/6656Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06Fluid handling related problems
    • B01L2200/0647Handling flowable solids, e.g. microscopic beads, cells, particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • B01L2300/0636Integrated biosensor, microarrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • B01L2300/0645Electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0877Flow chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Clinical Laboratory Science (AREA)
  • Hematology (AREA)
  • General Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)

Abstract

L'invention porte sur des procédés de fabrication et des dispositifs servant à effectuer à l'aide de différentes structures des opérations biologiques actives de recueil et de distribution de matériaux biologiques chargés sur un réseau de microsites. Dans l'une des réalisations, le dispositif comporte des électrodes focalisantes aidant à diriger et transférer des matériaux de l'électrode collectrice vers le réseau. On utilise de préférence une ou plusieurs électrodes intermédiaires de transfert, et mieux encore, des électrodes de taille décroissant monotonement, entre l'électrode collectrice et le réseau, pour réduire les disparités de densité de courant. Dans une autre réalisation, on utilise une cuve à circulation placée au-dessus des dispositifs pour retenir la solution contenant les matériaux à analyser. Dans une autre réalisation on utilise une structure à anneaux concentriques. L'invention porte également sur différentes exécutions à flip-chips.
CA002320798A 1998-02-20 1999-02-11 Dispositifs actifs evolues et procedes d'analyse et de diagnostic en biologie moleculaire Expired - Fee Related CA2320798C (fr)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
US09/026,618 1998-02-20
US09/026,618 US6099803A (en) 1994-07-07 1998-02-20 Advanced active electronic devices for molecular biological analysis and diagnostics
US09/239,598 US6331274B1 (en) 1993-11-01 1999-01-29 Advanced active circuits and devices for molecular biological analysis and diagnostics
US09/240,931 US6315953B1 (en) 1993-11-01 1999-01-29 Devices for molecular biological analysis and diagnostics including waveguides
US09/240,489 1999-01-29
US09/239,569 US6068818A (en) 1993-11-01 1999-01-29 Multicomponent devices for molecular biological analysis and diagnostics
US09/240,489 US6225059B1 (en) 1993-11-01 1999-01-29 Advanced active electronic devices including collection electrodes for molecular biological analysis and diagnostics
US09/239,569 1999-01-29
US09/240,920 1999-01-29
US09/240,920 US6254827B1 (en) 1993-11-01 1999-01-29 Methods for fabricating multi-component devices for molecular biological analysis and diagnostics
US09/240,931 1999-01-29
US09/239,598 1999-01-29
PCT/US1999/003080 WO1999042558A1 (fr) 1998-02-20 1999-02-11 Dispositifs actifs evolues et procedes d'analyse et de diagnostic en biologie moleculaire

Publications (2)

Publication Number Publication Date
CA2320798A1 CA2320798A1 (fr) 1999-08-26
CA2320798C true CA2320798C (fr) 2008-01-15

Family

ID=27556084

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002320798A Expired - Fee Related CA2320798C (fr) 1998-02-20 1999-02-11 Dispositifs actifs evolues et procedes d'analyse et de diagnostic en biologie moleculaire

Country Status (9)

Country Link
EP (1) EP1054949A4 (fr)
JP (1) JP2003524750A (fr)
KR (1) KR20010041147A (fr)
CN (1) CN1237165C (fr)
AU (1) AU742960B2 (fr)
BR (1) BR9909207A (fr)
CA (1) CA2320798C (fr)
NZ (1) NZ506204A (fr)
WO (1) WO1999042558A1 (fr)

Families Citing this family (25)

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US6379897B1 (en) 2000-11-09 2002-04-30 Nanogen, Inc. Methods for gene expression monitoring on electronic microarrays
AU6751800A (en) * 1999-08-13 2001-03-13 Aventis Research And Technologies Gmbh Microelectronic molecular descriptor array devices, methods, procedures, and formats for combinatorial selection of intermolecular ligand binding structures and for drug screening
WO2001016859A2 (fr) * 1999-08-27 2001-03-08 Pljvita Corporation Systeme et methode d'evaluation genomique et proteomique de maladies animales par comparaison de profils d'expression
US6569674B1 (en) 1999-12-15 2003-05-27 Amersham Biosciences Ab Method and apparatus for performing biological reactions on a substrate surface
US6589778B1 (en) 1999-12-15 2003-07-08 Amersham Biosciences Ab Method and apparatus for performing biological reactions on a substrate surface
EP1242819A2 (fr) * 1999-12-15 2002-09-25 Motorola, Inc. Compositions et procede permettant de realiser des reactions biologiques
DE10015818A1 (de) 2000-03-30 2001-10-18 Infineon Technologies Ag Biosensor und Verfahren zum Ermitteln makromolekularer Biopolymere mit einem Biosensor
DE10049901C2 (de) * 2000-10-10 2003-01-02 Aventis Res & Tech Gmbh & Co Vorrichtung und Verfahren zur elektrisch beschleunigten Immobilisierung und zur Detektion von Molekülen
JP2004524909A (ja) 2001-03-09 2004-08-19 ジョージア テック リサーチ コーポレイション 血管の軸方向への伸張のための脈管内デバイスおよび方法
DE10122659A1 (de) * 2001-05-10 2002-12-05 Infineon Technologies Ag Biochip-Anordnung
US6893822B2 (en) 2001-07-19 2005-05-17 Nanogen Recognomics Gmbh Enzymatic modification of a nucleic acid-synthetic binding unit conjugate
US7198754B2 (en) 2001-08-31 2007-04-03 Kabushiki Kaisha Toshiba Biological material detection element, biological material detection method and apparatus, charged material moving apparatus
JP3848226B2 (ja) * 2001-08-31 2006-11-22 株式会社東芝 生体物質検出装置及び生体物質検出素子
WO2003029830A1 (fr) * 2001-10-03 2003-04-10 Genomic Solutions Acquisitions Limited Procede de nettoyage
GB0200705D0 (en) * 2002-01-14 2002-02-27 Univ Cambridge Tech Fluid movement
GB0205455D0 (en) 2002-03-07 2002-04-24 Molecular Sensing Plc Nucleic acid probes, their synthesis and use
CN1429917A (zh) * 2002-10-11 2003-07-16 薛永新 艾滋病毒原位核酸芯片及其制备方法
DE102004010635B4 (de) * 2004-03-02 2006-10-05 Micronas Gmbh Vorrichtung zur Durchführung von Messungen an Biokomponenten
NL1031465C2 (nl) * 2006-03-30 2007-10-03 C2V B V Werkwijze voor het opbouwen van een inrichting met fluïdische en elektrische functies.
WO2008020364A2 (fr) * 2006-08-14 2008-02-21 Koninklijke Philips Electronics N. V. Capteur biochimique
EP2092322B1 (fr) * 2006-12-14 2016-02-17 Life Technologies Corporation Procédés et appareil permettant de mesurer des analytes en utilisant des matrices de tec à grande échelle
CH701701A2 (de) * 2009-08-28 2011-02-28 Kgmed Gmbh Verfahren zur eichung einer diagnostischen messvorrichtung.
AU2019205383B8 (en) 2018-01-08 2023-09-07 Quantum-Si Incorporated System and methods for electrokinetic loading of sub-micron-scale reaction chambers
CN111229342B (zh) * 2020-01-17 2022-02-11 上海新微技术研发中心有限公司 基于cmos图像传感的光栅波导多微流道芯片的制造方法
CN112517093A (zh) * 2020-11-17 2021-03-19 四川大学 一种Fish唾液自动分样检测盘及其检测方法

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
EP0213825A3 (fr) * 1985-08-22 1989-04-26 Molecular Devices Corporation Capacitance multiple chimiquement modulée
US4787963A (en) * 1987-05-04 1988-11-29 Syntro Corporation Method and means for annealing complementary nucleic acid molecules at an accelerated rate
EP0376611A3 (fr) * 1988-12-30 1992-07-22 The Board Of Trustees Of The Leland Stanford Junior University Système électrophorétique
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Also Published As

Publication number Publication date
JP2003524750A (ja) 2003-08-19
KR20010041147A (ko) 2001-05-15
EP1054949A1 (fr) 2000-11-29
BR9909207A (pt) 2001-11-06
AU2763899A (en) 1999-09-06
CN1296525A (zh) 2001-05-23
CA2320798A1 (fr) 1999-08-26
WO1999042558A1 (fr) 1999-08-26
AU742960B2 (en) 2002-01-17
CN1237165C (zh) 2006-01-18
EP1054949A4 (fr) 2006-09-27
NZ506204A (en) 2003-06-30

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