CA2310625A1 - Apparatus for measuring characteristics of optical angle - Google Patents
Apparatus for measuring characteristics of optical angle Download PDFInfo
- Publication number
- CA2310625A1 CA2310625A1 CA002310625A CA2310625A CA2310625A1 CA 2310625 A1 CA2310625 A1 CA 2310625A1 CA 002310625 A CA002310625 A CA 002310625A CA 2310625 A CA2310625 A CA 2310625A CA 2310625 A1 CA2310625 A1 CA 2310625A1
- Authority
- CA
- Canada
- Prior art keywords
- sample
- light
- mirror
- ellipsoidal mirror
- measuring apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000003287 optical effect Effects 0.000 title claims description 43
- 238000005286 illumination Methods 0.000 claims description 29
- 230000010287 polarization Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000000149 argon plasma sintering Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 230000000007 visual effect Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 101100043261 Caenorhabditis elegans spop-1 gene Proteins 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N21/474—Details of optical heads therefor, e.g. using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9-318759 | 1997-11-19 | ||
| JP31875897A JP3231268B2 (ja) | 1997-11-19 | 1997-11-19 | 光学的視野角測定装置 |
| JP31875997A JP3234183B2 (ja) | 1997-11-19 | 1997-11-19 | 光散乱強度測定装置 |
| JP9-318758 | 1997-11-19 | ||
| PCT/JP1998/005232 WO1999026054A1 (fr) | 1997-11-19 | 1998-11-19 | Appareil de mesure des caracteristiques d'un angle optique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2310625A1 true CA2310625A1 (en) | 1999-05-27 |
Family
ID=26569499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002310625A Abandoned CA2310625A1 (en) | 1997-11-19 | 1998-11-19 | Apparatus for measuring characteristics of optical angle |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6636308B1 (zh) |
| EP (1) | EP1035408A1 (zh) |
| KR (1) | KR20010032235A (zh) |
| CN (1) | CN1170139C (zh) |
| AU (1) | AU753282B2 (zh) |
| CA (1) | CA2310625A1 (zh) |
| TW (1) | TW388788B (zh) |
| WO (1) | WO1999026054A1 (zh) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19914696C2 (de) | 1999-03-31 | 2002-11-28 | Fraunhofer Ges Forschung | Gerät zur schnellen Messung winkelabhängiger Beugungseffekte an feinstrukturierten Oberflächen |
| KR101256391B1 (ko) * | 2004-10-08 | 2013-04-25 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 테스트 표면의 광학 검사 |
| JP2007005347A (ja) * | 2005-06-21 | 2007-01-11 | Tokyo Electron Ltd | 熱処理装置 |
| JP5721070B2 (ja) * | 2011-03-08 | 2015-05-20 | 国立研究開発法人産業技術総合研究所 | 光学特性測定装置 |
| CN102243175A (zh) * | 2011-06-21 | 2011-11-16 | 北京航空航天大学 | 一种基于椭球反射镜光收集结构的表面等离子体共振光检测装置 |
| TW201326778A (zh) * | 2011-12-30 | 2013-07-01 | Metal Ind Res & Dev Ct | 具有橢圓曲面構造之光學量測輔助器及光學量測系統 |
| CN103091847B (zh) * | 2013-01-15 | 2015-03-04 | 北京工业大学 | 利用非球面反射镜聚焦大功率直接半导体激光的方法 |
| US9619878B2 (en) | 2013-04-16 | 2017-04-11 | Kla-Tencor Corporation | Inspecting high-resolution photolithography masks |
| WO2015019327A1 (en) * | 2013-08-09 | 2015-02-12 | University Of Calcutta | Systems and methods for liquid quality assessment |
| US9921144B2 (en) * | 2016-06-29 | 2018-03-20 | Honeywell International Inc. | Particulate matter detector |
| JP6961406B2 (ja) * | 2017-07-05 | 2021-11-05 | 大塚電子株式会社 | 光学測定装置および光学測定方法 |
| KR20200068541A (ko) * | 2018-03-12 | 2020-06-15 | 오르보테크 엘티디. | 자동화된 광학 검사를 위한 광학 시스템 |
| CN108956093B (zh) * | 2018-06-22 | 2020-06-30 | 维沃移动通信有限公司 | 红外散射装置的检测方法和移动终端 |
| CN109073549A (zh) * | 2018-06-28 | 2018-12-21 | 深圳市汇顶科技股份有限公司 | 散射角测量装置和散射角测量方法 |
| CN109612690A (zh) * | 2018-11-02 | 2019-04-12 | 中国科学院上海光学精密机械研究所 | 感光芯片不同入射角响应度测量装置及测量方法 |
| TWI683087B (zh) * | 2018-11-09 | 2020-01-21 | 志聖工業股份有限公司 | 曝光光角量測設備 |
| CN111198093B (zh) * | 2018-11-16 | 2021-11-26 | 志圣工业股份有限公司 | 曝光光角量测设备 |
| CN109540035B (zh) * | 2019-01-14 | 2020-03-06 | 吉林大学 | 基于椭圆反光环的光照可调式汽车全景视觉检测系统 |
| CN110553955B (zh) * | 2019-08-30 | 2020-11-24 | 华中科技大学 | 一种基于光散射场的颗粒物粒径分布测量方法及系统 |
| CN110715930A (zh) * | 2019-10-21 | 2020-01-21 | 中国科学院光电技术研究所 | 一种精密光学表面微弱缺陷显微照明方法及装置 |
| CN114609058B (zh) * | 2022-05-11 | 2022-08-30 | 中国海洋大学 | 一种海水体散射多光谱船载走航测量装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2535053B1 (fr) | 1982-10-22 | 1985-06-21 | Saint Etienne Universite | Appareil d'identification optique des proprietes multiparametriques individuelles de particules ou objets en flux continu |
| US4606636A (en) * | 1983-10-25 | 1986-08-19 | Universite De Saint-Etienne | Optical apparatus for identifying the individual multiparametric properties of particles or bodies in a continuous flow |
| JPS62172242A (ja) | 1986-01-27 | 1987-07-29 | Rion Co Ltd | 光散乱式粒子計数器 |
| JPH0810191B2 (ja) | 1987-03-31 | 1996-01-31 | 株式会社島津製作所 | 散乱光検出装置 |
| JPH0737936B2 (ja) | 1987-07-24 | 1995-04-26 | 日本科学工業株式会社 | 光散乱方式による微粒子検出装置 |
| GB8726305D0 (en) | 1987-11-10 | 1987-12-16 | Secr Defence | Portable particle analysers |
| JPH0643949B2 (ja) | 1988-10-03 | 1994-06-08 | 大塚電子株式会社 | 粒径測定装置 |
| JP2747921B2 (ja) | 1989-02-23 | 1998-05-06 | 株式会社ユ−ハ味覚糖精密工学研究所 | 光散乱法による超微粒子の粒径測定装置 |
| JPH0754292B2 (ja) | 1989-02-27 | 1995-06-07 | 株式会社島津製作所 | 粒度分布測定装置 |
| EP0627073A1 (en) * | 1992-02-21 | 1994-12-07 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern | Analysis of particle characteristics |
-
1998
- 1998-11-19 CN CNB988112604A patent/CN1170139C/zh not_active Expired - Fee Related
- 1998-11-19 EP EP98954767A patent/EP1035408A1/en not_active Withdrawn
- 1998-11-19 TW TW087119164A patent/TW388788B/zh active
- 1998-11-19 WO PCT/JP1998/005232 patent/WO1999026054A1/ja not_active Application Discontinuation
- 1998-11-19 US US09/554,687 patent/US6636308B1/en not_active Expired - Fee Related
- 1998-11-19 KR KR1020007005436A patent/KR20010032235A/ko not_active Application Discontinuation
- 1998-11-19 CA CA002310625A patent/CA2310625A1/en not_active Abandoned
- 1998-11-19 AU AU11749/99A patent/AU753282B2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010032235A (ko) | 2001-04-16 |
| US6636308B1 (en) | 2003-10-21 |
| CN1279763A (zh) | 2001-01-10 |
| WO1999026054A1 (fr) | 1999-05-27 |
| CN1170139C (zh) | 2004-10-06 |
| AU753282B2 (en) | 2002-10-17 |
| TW388788B (en) | 2000-05-01 |
| AU1174999A (en) | 1999-06-07 |
| EP1035408A1 (en) | 2000-09-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |