CA2306948C - Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same - Google Patents

Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same Download PDF

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Publication number
CA2306948C
CA2306948C CA002306948A CA2306948A CA2306948C CA 2306948 C CA2306948 C CA 2306948C CA 002306948 A CA002306948 A CA 002306948A CA 2306948 A CA2306948 A CA 2306948A CA 2306948 C CA2306948 C CA 2306948C
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Canada
Prior art keywords
electrode
conjugated organic
buffer layer
conjugated
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002306948A
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English (en)
French (fr)
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CA2306948A1 (en
Inventor
Yang Yang
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University of California
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University of California
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Publication date
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Publication of CA2306948A1 publication Critical patent/CA2306948A1/en
Application granted granted Critical
Publication of CA2306948C publication Critical patent/CA2306948C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4867Applying pastes or inks, e.g. screen printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/221Static displays, e.g. displaying permanent logos
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/125OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • H10K59/173Passive-matrix OLED displays comprising banks or shadow masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/321Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • H10K85/324Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/656Aromatic compounds comprising a hetero atom comprising two or more different heteroatoms per ring
    • H10K85/6565Oxadiazole compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
CA002306948A 1997-10-17 1998-10-14 Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same Expired - Fee Related CA2306948C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US6229497P 1997-10-17 1997-10-17
US60/062,294 1997-10-17
US7270998P 1998-01-27 1998-01-27
US60/072,709 1998-01-27
PCT/US1998/021665 WO1999021233A1 (en) 1997-10-17 1998-10-14 Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same

Publications (2)

Publication Number Publication Date
CA2306948A1 CA2306948A1 (en) 1999-04-29
CA2306948C true CA2306948C (en) 2004-09-07

Family

ID=26742089

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002306948A Expired - Fee Related CA2306948C (en) 1997-10-17 1998-10-14 Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same

Country Status (7)

Country Link
EP (1) EP1029369A4 (ko)
JP (1) JP2001521269A (ko)
KR (1) KR20010031169A (ko)
CN (1) CN1280708A (ko)
AU (1) AU725148B2 (ko)
CA (1) CA2306948C (ko)
WO (1) WO1999021233A1 (ko)

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* Cited by examiner, † Cited by third party
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BR0011888A (pt) 1999-06-21 2004-03-09 Univ Cambridge Tech Processo para formar um dispositivo eletrônico, dispositivo eletrônico, circuito lógico, visor de matriz ativa, e, transistor de polímero
TW512543B (en) 1999-06-28 2002-12-01 Semiconductor Energy Lab Method of manufacturing an electro-optical device
DE19937724C1 (de) * 1999-08-10 2000-12-07 Bosch Gmbh Robert Lichtemittierende Matrixanzeige sowie Verfahren zur Herstellung einer lichtemittierenden Matrixanzeige
TW480722B (en) 1999-10-12 2002-03-21 Semiconductor Energy Lab Manufacturing method of electro-optical device
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
TW471011B (en) * 1999-10-13 2002-01-01 Semiconductor Energy Lab Thin film forming apparatus
US6294398B1 (en) * 1999-11-23 2001-09-25 The Trustees Of Princeton University Method for patterning devices
JP4827294B2 (ja) * 1999-11-29 2011-11-30 株式会社半導体エネルギー研究所 成膜装置及び発光装置の作製方法
CA2395004C (en) * 1999-12-21 2014-01-28 Plastic Logic Limited Solution processing
EP1243035B1 (en) 1999-12-21 2016-03-02 Flexenable Limited Forming interconnects
GB9930217D0 (en) 1999-12-21 2000-02-09 Univ Cambridge Tech Solutiion processed transistors
EP1243034A1 (en) 1999-12-21 2002-09-25 Plastic Logic Limited Solution processed devices
CN100375310C (zh) * 1999-12-21 2008-03-12 造型逻辑有限公司 喷墨制作的集成电路
GB0002958D0 (en) * 2000-02-09 2000-03-29 Cambridge Display Tech Ltd Optoelectronic devices
US7163712B2 (en) * 2000-03-03 2007-01-16 Duke University Microstamping activated polymer surfaces
DE10012205A1 (de) 2000-03-13 2001-09-27 Siemens Ag Leuchtdiode auf der Basis von löslichen organischen Materialien
DE10045192A1 (de) 2000-09-13 2002-04-04 Siemens Ag Organischer Datenspeicher, RFID-Tag mit organischem Datenspeicher, Verwendung eines organischen Datenspeichers
US6424093B1 (en) * 2000-10-06 2002-07-23 Eastman Kodak Company Organic electroluminescent display device with performed images
GB2367788A (en) 2000-10-16 2002-04-17 Seiko Epson Corp Etching using an ink jet print head
GB2369428B (en) * 2000-11-22 2004-11-10 Imperial College Detection system
EP1374138A2 (de) * 2001-03-26 2004-01-02 Siemens Aktiengesellschaft Gerät mit zumindest zwei organischen elektronischen bauteilen und verfahren zur herstellung dazu
NL1020312C2 (nl) 2002-04-05 2003-10-07 Otb Groep B V Werkwijze en inrichting voor het vervaardigen van een display, zoals bijvoorbeeld een polymere OLED display, een display en een substraat ten gebruike bij de werkwijze.
GB0218202D0 (en) * 2002-08-06 2002-09-11 Avecia Ltd Organic light emitting diodes
US7098060B2 (en) 2002-09-06 2006-08-29 E.I. Du Pont De Nemours And Company Methods for producing full-color organic electroluminescent devices
WO2004093180A1 (en) 2003-04-15 2004-10-28 California Institute Of Technology Flexible carbon-based ohmic contacts for organic transistors
KR101142648B1 (ko) 2003-05-21 2012-05-10 다우 글로벌 테크놀로지스 엘엘씨 점도 개질제 및 발광성 화합물의 블렌드
DE10323889A1 (de) * 2003-05-27 2004-12-16 Ehrfeld Mikrotechnik Ag Wälzlager mit Polymerelektronik
WO2005024959A1 (en) 2003-09-09 2005-03-17 Csg Solar, Ag Adjustment of masks by re-flow
US7446051B2 (en) 2003-09-09 2008-11-04 Csg Solar Ag Method of etching silicon
CN100561668C (zh) * 2003-09-09 2009-11-18 Csg索拉尔有限公司 在有机树脂材料中形成开口的改进方法
US7067841B2 (en) 2004-04-22 2006-06-27 E. I. Du Pont De Nemours And Company Organic electronic devices
US7268006B2 (en) 2004-12-30 2007-09-11 E.I. Du Pont De Nemours And Company Electronic device including a guest material within a layer and a process for forming the same
KR101320808B1 (ko) * 2006-02-12 2013-10-21 박순영 시프트 레지스터로 제어되는 선형 디스플레이 모듈
KR100858223B1 (ko) * 2007-05-21 2008-09-10 연세대학교 산학협력단 자가정렬된 반도체 나노와이어 박막 트랜지스터 및 그 제조 방법
US8440785B2 (en) 2009-06-30 2013-05-14 Plextronics, Inc. Compositions, methods and polymers

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US5132248A (en) * 1988-05-31 1992-07-21 The United States Of America As Represented By The United States Department Of Energy Direct write with microelectronic circuit fabrication
EP0443861B2 (en) * 1990-02-23 2008-05-28 Sumitomo Chemical Company, Limited Organic electroluminescence device
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US6843937B1 (en) * 1997-07-16 2005-01-18 Seiko Epson Corporation Composition for an organic EL element and method of manufacturing the organic EL element

Also Published As

Publication number Publication date
CN1280708A (zh) 2001-01-17
KR20010031169A (ko) 2001-04-16
JP2001521269A (ja) 2001-11-06
CA2306948A1 (en) 1999-04-29
WO1999021233A1 (en) 1999-04-29
EP1029369A1 (en) 2000-08-23
AU725148B2 (en) 2000-10-05
AU1084699A (en) 1999-05-10
EP1029369A4 (en) 2002-04-03

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