CA2296595A1 - Objectif de balayage anamorphoseur pour lecteur laser - Google Patents

Objectif de balayage anamorphoseur pour lecteur laser Download PDF

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Publication number
CA2296595A1
CA2296595A1 CA002296595A CA2296595A CA2296595A1 CA 2296595 A1 CA2296595 A1 CA 2296595A1 CA 002296595 A CA002296595 A CA 002296595A CA 2296595 A CA2296595 A CA 2296595A CA 2296595 A1 CA2296595 A1 CA 2296595A1
Authority
CA
Canada
Prior art keywords
scan
lens
mirror
polygon
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002296595A
Other languages
English (en)
Inventor
John M. Tamkin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etec Systems Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2296595A1 publication Critical patent/CA2296595A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/125—Details of the optical system between the polygonal mirror and the image plane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

On décrit un objectif de balayage catadioptrique anamorphoseur, qui corrige simultanément les déformations, l'oscillation du miroir polygonal, et le balayage télécentrique aplanéique de la lumière laser polychromatique projetée sagittalement sur le miroir polygonal. Le système peut également représenter en image de multiples faisceaux et corriger la déformation différentielle. Cet objectif de balayage s'incorpore dans un scanner d'images photolithographiques.
CA002296595A 1997-07-08 1998-06-19 Objectif de balayage anamorphoseur pour lecteur laser Abandoned CA2296595A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US5280097P 1997-07-08 1997-07-08
US60/052,800 1997-07-08
US8243398A 1998-05-20 1998-05-20
US09/082,433 1998-05-20
PCT/US1998/012464 WO1999003012A1 (fr) 1997-07-08 1998-06-19 Objectif de balayage anamorphoseur pour lecteur laser

Publications (1)

Publication Number Publication Date
CA2296595A1 true CA2296595A1 (fr) 1999-01-21

Family

ID=26731092

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002296595A Abandoned CA2296595A1 (fr) 1997-07-08 1998-06-19 Objectif de balayage anamorphoseur pour lecteur laser

Country Status (7)

Country Link
EP (1) EP0995144A1 (fr)
JP (1) JP2001509613A (fr)
KR (1) KR20010014242A (fr)
CA (1) CA2296595A1 (fr)
IL (1) IL133751A0 (fr)
TW (1) TW394853B (fr)
WO (1) WO1999003012A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080039449A (ko) * 2005-08-02 2008-05-07 칼 짜이스 레이저 옵틱스 게엠베하 선 초점을 생성하기 위한 광학 시스템, 그러한 광학시스템을 이용하는 스캐닝 시스템, 및 기판의 레이저 공정방법
KR100701920B1 (ko) * 2005-11-15 2007-03-30 김명수 유동기능을 갖는 트랙터용 써레
US7466331B2 (en) 2005-12-07 2008-12-16 Palo Alto Research Center Incorporated Bow-free telecentric optical system for multiple beam scanning systems
ITMI20070885A1 (it) 2007-05-04 2008-11-05 Sapsa Bedding S R L Materasso con pannello trapuntato e relativi procedimenti di fabbricazione
KR200448779Y1 (ko) * 2009-10-09 2010-05-24 (주)엘이디웍스 광학계를 포함하는　회전형 디스플레이 장치
DE102013106533A1 (de) * 2013-06-21 2014-12-24 Jenoptik Optical Systems Gmbh Scaneinrichtung
ITVI20130229A1 (it) 2013-09-18 2015-03-19 Ettore Maurizio Costabeber Macchina stereolitografica con gruppo ottico perfezionato
JP6571092B2 (ja) * 2013-09-25 2019-09-04 エーエスエムエル ネザーランズ ビー．ブイ． ビームデリバリ装置及び方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0364726A (ja) * 1989-08-02 1991-03-20 Minolta Camera Co Ltd 光ビーム走査光学系
JPH04233867A (ja) * 1990-06-27 1992-08-21 Xerox Corp サブミクロンの揺動補正を有する光学的走査システム
US5168386A (en) * 1990-10-22 1992-12-01 Tencor Instruments Flat field telecentric scanner
JP3193546B2 (ja) * 1993-01-14 2001-07-30 旭光学工業株式会社 反射型走査光学系
US5512949A (en) * 1993-12-29 1996-04-30 Xerox Corporation Multiple beam raster output scanner optical system having telecentric chief exit rays
JP3275548B2 (ja) * 1994-07-28 2002-04-15 松下電器産業株式会社 光走査装置
JPH08160337A (ja) * 1994-12-09 1996-06-21 Minolta Co Ltd レーザビーム走査光学装置

Also Published As

Publication number Publication date
EP0995144A1 (fr) 2000-04-26
TW394853B (en) 2000-06-21
JP2001509613A (ja) 2001-07-24
WO1999003012A1 (fr) 1999-01-21
IL133751A0 (en) 2001-04-30
KR20010014242A (ko) 2001-02-26

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued