CA2250788C - Procede de fabrication et structure d'une tete d'impression a jet d'encre - Google Patents

Procede de fabrication et structure d'une tete d'impression a jet d'encre Download PDF

Info

Publication number
CA2250788C
CA2250788C CA 2250788 CA2250788A CA2250788C CA 2250788 C CA2250788 C CA 2250788C CA 2250788 CA2250788 CA 2250788 CA 2250788 A CA2250788 A CA 2250788A CA 2250788 C CA2250788 C CA 2250788C
Authority
CA
Canada
Prior art keywords
layer
resistor
over
forming
process according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2250788
Other languages
English (en)
Other versions
CA2250788A1 (fr
Inventor
Tse-Chi Mou
Yee-Shyi Chang
Arnold Chang-Mou Yang
Chin-Yi Chou
Kou-Yow Tseng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microjet Technology Co Ltd
Original Assignee
Microjet Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN97121341A external-priority patent/CN1072117C/zh
Priority claimed from CN97121346A external-priority patent/CN1074358C/zh
Priority claimed from CN97121345A external-priority patent/CN1080646C/zh
Application filed by Microjet Technology Co Ltd filed Critical Microjet Technology Co Ltd
Publication of CA2250788A1 publication Critical patent/CA2250788A1/fr
Application granted granted Critical
Publication of CA2250788C publication Critical patent/CA2250788C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CA 2250788 1997-10-21 1998-10-21 Procede de fabrication et structure d'une tete d'impression a jet d'encre Expired - Fee Related CA2250788C (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CN97121341A CN1072117C (zh) 1997-10-21 1997-10-21 喷墨头电阻层的制程
CN97121345.3 1997-10-21
CN97121346A CN1074358C (zh) 1997-10-21 1997-10-21 喷墨头的制程与结构
CN97121346.1 1997-10-21
CN97121345A CN1080646C (zh) 1997-10-21 1997-10-21 形成喷墨头电阻层的方法
CN97121341.0 1997-10-21

Publications (2)

Publication Number Publication Date
CA2250788A1 CA2250788A1 (fr) 1999-04-21
CA2250788C true CA2250788C (fr) 2003-05-20

Family

ID=27179142

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2250788 Expired - Fee Related CA2250788C (fr) 1997-10-21 1998-10-21 Procede de fabrication et structure d'une tete d'impression a jet d'encre

Country Status (2)

Country Link
EP (1) EP0930166B1 (fr)
CA (1) CA2250788C (fr)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562022A (en) * 1967-12-26 1971-02-09 Hughes Aircraft Co Method of doping semiconductor bodies by indirection implantation
US4459739A (en) * 1981-05-26 1984-07-17 Northern Telecom Limited Thin film transistors
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
JPH0486267A (ja) * 1990-07-31 1992-03-18 Tdk Corp サーマルヘッド用発熱体の製造方法
JPH0819516B2 (ja) * 1990-10-26 1996-02-28 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 薄膜状のアルファＴａを形成するための方法および構造
US5340752A (en) * 1992-10-23 1994-08-23 Ncr Corporation Method for forming a bipolar transistor using doped SOG
US5348909A (en) * 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
JP3344072B2 (ja) * 1994-03-31 2002-11-11 ソニー株式会社 薄膜トランジスタの製造方法
US20020063753A1 (en) * 1995-06-28 2002-05-30 Masahiko Kubota Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head
KR100203656B1 (ko) * 1996-04-09 1999-06-15 전주범 윤곽 영상신호 부호화 장치

Also Published As

Publication number Publication date
EP0930166B1 (fr) 2005-02-23
CA2250788A1 (fr) 1999-04-21
EP0930166A3 (fr) 2000-04-12
EP0930166A2 (fr) 1999-07-21

Similar Documents

Publication Publication Date Title
US4535343A (en) Thermal ink jet printhead with self-passivating elements
US6315384B1 (en) Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein
KR100191743B1 (ko) 열 발생 저항기, 액체 분사 헤드 및 장치, 및 액체 분사 헤드용 기판
US7716832B2 (en) Method of manufacturing a fluid ejection device
US4663640A (en) Recording head
US20030081069A1 (en) Monolithic ink-jet printhead and method for manufacturing the same
US20080246819A1 (en) Inkjet Printhead Nozzle Incorporating Movable Roof Structures
JP2001071501A (ja) 金属珪窒化物の発熱抵抗体を搭載したインク送出プリントヘッド
JP6873836B2 (ja) 液体吐出ヘッドの製造方法
JPH06191042A (ja) プリントヘッド
US11001062B2 (en) Liquid ejection head and a manufacturing method of the same
US6159387A (en) Manufacturing process and structure of ink jet printhead
US6450622B1 (en) Fluid ejection device
CA2250788C (fr) Procede de fabrication et structure d'une tete d'impression a jet d'encre
US20050078151A1 (en) Thin film ink jet printhead adhesion enhancement
US6875365B2 (en) Method for producing liquid discharge head
US20080115359A1 (en) High Resistance Heater Material for A Micro-Fluid Ejection Head
JP4979793B2 (ja) 液体吐出ヘッド用基板の製造方法
US5187499A (en) Liquid jet recording head with protective layer having an ion exchanger
JP3247426B2 (ja) ヘッドおよびその製造方法
US20040183865A1 (en) Fluid injector and method of manufacturing the same
US20030080359A1 (en) Structure with through hole, production method thereof, and liquid discharge head
JP2006229032A (ja) 光素子及びその製造方法
US7273266B2 (en) Micro-fluid ejection assemblies
US20070026666A1 (en) Method of forming metal line on semiconductor device

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed