CA2078612A1 - Guide de lumiere a substrat substantiellement planar et sa methode de fabrication - Google Patents
Guide de lumiere a substrat substantiellement planar et sa methode de fabricationInfo
- Publication number
- CA2078612A1 CA2078612A1 CA2078612A CA2078612A CA2078612A1 CA 2078612 A1 CA2078612 A1 CA 2078612A1 CA 2078612 A CA2078612 A CA 2078612A CA 2078612 A CA2078612 A CA 2078612A CA 2078612 A1 CA2078612 A1 CA 2078612A1
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- substantially planar
- optical waveguide
- planar substrate
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title abstract 5
- 230000003287 optical effect Effects 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 229920003002 synthetic resin Polymers 0.000 abstract 2
- 239000000057 synthetic resin Substances 0.000 abstract 2
- 239000004033 plastic Substances 0.000 abstract 1
- 229920001169 thermoplastic Polymers 0.000 abstract 1
- 239000004416 thermosoftening plastic Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP4130985.5 | 1991-09-18 | ||
DE4130985 | 1991-09-18 | ||
DEP4213454.4 | 1992-04-24 | ||
DE4213454 | 1992-04-24 | ||
DEP4228853.3 | 1992-08-29 | ||
DE4228853A DE4228853C2 (de) | 1991-09-18 | 1992-08-29 | Optischer Wellenleiter mit einem planaren oder nur geringfügig gewölbten Substrat und Verfahren zu dessen Herstellung sowie Verwendung eines solchen |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2078612A1 true CA2078612A1 (fr) | 1993-03-19 |
CA2078612C CA2078612C (fr) | 1999-08-24 |
Family
ID=27202930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002078612A Expired - Fee Related CA2078612C (fr) | 1991-09-18 | 1992-09-18 | Guide de lumiere a substrat substantiellement planar et sa methode de fabrication |
Country Status (7)
Country | Link |
---|---|
US (2) | US5369722A (fr) |
EP (2) | EP0533074B1 (fr) |
JP (1) | JP2903033B2 (fr) |
AT (2) | ATE344933T1 (fr) |
CA (1) | CA2078612C (fr) |
DE (3) | DE4228853C2 (fr) |
ES (1) | ES2136068T3 (fr) |
Families Citing this family (89)
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EP0617273B1 (fr) * | 1993-03-26 | 2002-10-16 | F. Hoffmann-La Roche Ag | Procédé et dispositif optique pour l'analyse de substances sur des surfaces de capteurs |
CH688165A5 (de) * | 1993-07-26 | 1997-05-30 | Balzers Hochvakuum | Verfahren zur Herstellung eines optischen Wellenleiters und darnach hergestellter optischer Wellenleiter |
NZ276157A (en) * | 1993-11-16 | 1997-11-24 | Scapa Group Plc | Phase separation apparatus comprising an organically modified ceramic (ormocer) useful to coat filters and paper-making roller |
US5822472A (en) * | 1994-05-27 | 1998-10-13 | Novartis Corporation | Process for detecting evanescently excited luminescence |
CH693368A5 (de) * | 1994-12-09 | 2003-06-30 | Unaxis Balzers Ag | Verfahren zur Herstellung eines Beugungsgitters, Lichtleiterbauteil sowie deren Verwendungen. |
DE4445427C2 (de) * | 1994-12-20 | 1997-04-30 | Schott Glaswerke | Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht |
US5659640A (en) * | 1995-06-27 | 1997-08-19 | Lucent Technologies Inc. | Integrated waveguide having an internal optical grating |
US5659648A (en) * | 1995-09-29 | 1997-08-19 | Motorola, Inc. | Polyimide optical waveguide having electrical conductivity |
ATE273253T1 (de) * | 1996-02-28 | 2004-08-15 | Fraunhofer Ges Forschung | Barriereschichten |
JPH1010348A (ja) * | 1996-06-26 | 1998-01-16 | Ngk Insulators Ltd | 光導波路デバイスの製造方法 |
US6083852A (en) | 1997-05-07 | 2000-07-04 | Applied Materials, Inc. | Method for applying films using reduced deposition rates |
DE19634795C2 (de) * | 1996-08-29 | 1999-11-04 | Schott Glas | Plasma-CVD-Anlage mit einem Array von Mikrowellen-Plasmaelektroden und Plasma-CVD-Verfahren |
AU5479998A (en) * | 1996-11-11 | 1998-06-03 | Novartis Ag | Use of biosensors to diagnose plant diseases |
US5991493A (en) * | 1996-12-13 | 1999-11-23 | Corning Incorporated | Optically transmissive bonding material |
US6144795A (en) * | 1996-12-13 | 2000-11-07 | Corning Incorporated | Hybrid organic-inorganic planar optical waveguide device |
JP2000162460A (ja) | 1998-11-27 | 2000-06-16 | Sharp Corp | 有機光導波路およびその製造方法並びにそれを用いた光学部品 |
US6704335B1 (en) | 1998-12-17 | 2004-03-09 | Seiko Epson Corporation | Light-emitting device |
WO2000046622A1 (fr) | 1999-02-05 | 2000-08-10 | Corning Incorporated | Composant de fibre optique a element optique en forme et son procede d'obtention |
JP2000277260A (ja) | 1999-03-23 | 2000-10-06 | Seiko Epson Corp | 発光装置 |
DE60041532D1 (de) | 1999-06-10 | 2009-03-26 | Seiko Epson Corp | Licht emittierende vorrichtung |
DK1192448T3 (da) | 1999-07-05 | 2007-01-15 | Novartis Ag | Fremgangsmåde til anvendelse af en sensorplatform |
US6771376B2 (en) * | 1999-07-05 | 2004-08-03 | Novartis Ag | Sensor platform, apparatus incorporating the platform, and process using the platform |
JP2001196162A (ja) | 1999-10-25 | 2001-07-19 | Seiko Epson Corp | 発光装置 |
US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
US6961490B2 (en) * | 2000-01-27 | 2005-11-01 | Unaxis-Balzers Aktiengesellschaft | Waveguide plate and process for its production and microtitre plate |
US6510263B1 (en) | 2000-01-27 | 2003-01-21 | Unaxis Balzers Aktiengesellschaft | Waveguide plate and process for its production and microtitre plate |
JP2001244066A (ja) | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 発光装置 |
US7058245B2 (en) | 2000-04-04 | 2006-06-06 | Waveguide Solutions, Inc. | Integrated optical circuits |
DE10029905A1 (de) * | 2000-06-17 | 2002-01-03 | Schott Auer Gmbh | Reflektor, insbesondere zur Anwendung bei einem Kraftfahrzeug |
US6629763B2 (en) * | 2000-06-17 | 2003-10-07 | Schott Glas | Object which has optical layers |
DE50115382D1 (de) | 2000-08-09 | 2010-04-22 | Artificial Sensing Instr Asi A | Wellenleitergitterstruktur und optische messanordnung |
JP2002056989A (ja) | 2000-08-11 | 2002-02-22 | Seiko Epson Corp | 発光装置 |
US6847745B2 (en) | 2000-08-16 | 2005-01-25 | Siemens Aktiengesellschaft | Winding arrangement with a winding body and an optical wave guide introduced therein or therethrough |
JP2002139638A (ja) * | 2000-08-23 | 2002-05-17 | Matsushita Electric Ind Co Ltd | 光学素子及びその製造方法 |
EP1182472B1 (fr) * | 2000-08-23 | 2006-04-05 | Matsushita Electric Industrial Co., Ltd. | Elément optique et procédé de sa fabrication |
DE10048243A1 (de) * | 2000-09-29 | 2002-04-18 | Bosch Gmbh Robert | Substrat mit geglätteter Oberfläche und Verfahren zu seiner Herstellung |
FR2816062B1 (fr) * | 2000-10-27 | 2003-10-31 | Shakticom | Filtre optique, son procede de fabrication par dopage ionique et son utilisation pour un systeme multiplex |
DE60115966T2 (de) * | 2000-10-13 | 2006-07-06 | Compagnie Industrielle Des Lasers Cilas | Optische filter, ihre herstellungsverfahren und ihre anwendung für ein multiplexsystem |
FR2815417B1 (fr) * | 2000-10-13 | 2003-10-31 | Shakticom | Filtre optique, son procede de fabrication et son utilisation pour un systeme multiplex |
GB2369820B (en) * | 2000-12-08 | 2003-04-23 | Univ Southampton | Fabrication of substrates for planar waveguide devices and planar waveguide devices |
US6875379B2 (en) * | 2000-12-29 | 2005-04-05 | Amkor Technology, Inc. | Tool and method for forming an integrated optical circuit |
US6980710B2 (en) * | 2001-03-09 | 2005-12-27 | Waveguide Solutions Inc | Process for efficient light extraction from light emitting chips |
GB0106050D0 (en) * | 2001-03-12 | 2001-05-02 | Suisse Electronique Microtech | Polarisers and mass-production method and apparatus for polarisers |
US20040101636A1 (en) * | 2001-03-29 | 2004-05-27 | Markus Kuhr | Method for producing a coated synthetic body |
US6792303B2 (en) * | 2001-05-11 | 2004-09-14 | Scimed Life Systems, Inc. | Apparatus for improved sensor accuracy |
US20020191916A1 (en) * | 2001-06-15 | 2002-12-19 | Confluent Photonics, Corporation | Vertical waveguide tapers for optical coupling between optical fibers and thin silicon waveguides |
US7767131B2 (en) | 2001-08-30 | 2010-08-03 | Bayer Technology Services Gmbh | Method for production of moulded bodies, in particular optical structures and use thereof |
DE10152002A1 (de) * | 2001-10-22 | 2003-05-08 | Infineon Technologies Ag | Halbleitervorrichtung mit mehrschichtigem Aufbau sowie Verfahren zu dessen Herstellung |
US20030113085A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials, Inc., A Delaware Corporation | HDP-CVD film for uppercladding application in optical waveguides |
US20030110808A1 (en) * | 2001-12-14 | 2003-06-19 | Applied Materials Inc., A Delaware Corporation | Method of manufacturing an optical core |
KR100418908B1 (ko) * | 2001-12-21 | 2004-02-14 | 엘지전자 주식회사 | 광도파로용 실리카막 제조방법 |
US6728286B2 (en) | 2002-08-07 | 2004-04-27 | Honeywell International Inc. | Method of joining mirrors to ring laser gyro block assemblies |
US6936194B2 (en) * | 2002-09-05 | 2005-08-30 | Molecular Imprints, Inc. | Functional patterning material for imprint lithography processes |
US6902871B2 (en) * | 2002-10-03 | 2005-06-07 | Lumera Corporation | Method for manufacturing polymer microstructures and polymer waveguides |
US6905773B2 (en) * | 2002-10-22 | 2005-06-14 | Schlage Lock Company | Corrosion-resistant coatings and methods of manufacturing the same |
US7080528B2 (en) | 2002-10-23 | 2006-07-25 | Applied Materials, Inc. | Method of forming a phosphorus doped optical core using a PECVD process |
US6937811B2 (en) * | 2002-11-19 | 2005-08-30 | Lumera Corporation | Polymer waveguide devices incorporating electro-optically active polymer clads |
KR100895148B1 (ko) * | 2002-11-20 | 2009-05-04 | 엘지전자 주식회사 | 고분자 광도파관 그레이팅 제조방법 |
US20040112862A1 (en) * | 2002-12-12 | 2004-06-17 | Molecular Imprints, Inc. | Planarization composition and method of patterning a substrate using the same |
US20040191639A1 (en) * | 2003-03-26 | 2004-09-30 | Danliang Jin | Micro-imprinting method and template for use in same |
US20060108710A1 (en) * | 2004-11-24 | 2006-05-25 | Molecular Imprints, Inc. | Method to reduce adhesion between a conformable region and a mold |
US7307118B2 (en) | 2004-11-24 | 2007-12-11 | Molecular Imprints, Inc. | Composition to reduce adhesion between a conformable region and a mold |
US6985664B2 (en) * | 2003-08-01 | 2006-01-10 | Corning Incorporated | Substrate index modification for increasing the sensitivity of grating-coupled waveguides |
JP4453335B2 (ja) * | 2003-10-22 | 2010-04-21 | 富士ゼロックス株式会社 | 光回路パターン及び高分子光導波路の製造方法 |
US7122482B2 (en) | 2003-10-27 | 2006-10-17 | Molecular Imprints, Inc. | Methods for fabricating patterned features utilizing imprint lithography |
US7241394B2 (en) * | 2004-01-21 | 2007-07-10 | Lumera Corporation | Process of fabricating polymer sustained microelectrodes |
US6852563B1 (en) | 2004-01-21 | 2005-02-08 | Lumera Corporation | Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes |
US7125949B2 (en) * | 2004-01-21 | 2006-10-24 | Lumera Corporation | Fluorinated sol-gel electro-optic materials, process for producing same, and devices therefrom |
US7250712B2 (en) * | 2004-01-21 | 2007-07-31 | Lumera Corporation | Polymer sustained microelectrodes |
US8076386B2 (en) | 2004-02-23 | 2011-12-13 | Molecular Imprints, Inc. | Materials for imprint lithography |
US7939131B2 (en) | 2004-08-16 | 2011-05-10 | Molecular Imprints, Inc. | Method to provide a layer with uniform etch characteristics |
US20060062922A1 (en) | 2004-09-23 | 2006-03-23 | Molecular Imprints, Inc. | Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor |
US20060081557A1 (en) * | 2004-10-18 | 2006-04-20 | Molecular Imprints, Inc. | Low-k dielectric functional imprinting materials |
US8557351B2 (en) * | 2005-07-22 | 2013-10-15 | Molecular Imprints, Inc. | Method for adhering materials together |
US7759407B2 (en) | 2005-07-22 | 2010-07-20 | Molecular Imprints, Inc. | Composition for adhering materials together |
US8808808B2 (en) | 2005-07-22 | 2014-08-19 | Molecular Imprints, Inc. | Method for imprint lithography utilizing an adhesion primer layer |
US8142703B2 (en) * | 2005-10-05 | 2012-03-27 | Molecular Imprints, Inc. | Imprint lithography method |
US7218802B1 (en) | 2005-11-30 | 2007-05-15 | Corning Incorporated | Low drift planar waveguide grating sensor and method for manufacturing same |
US7505651B2 (en) * | 2006-10-06 | 2009-03-17 | Motorola, Inc. | Optical planar wavelength selective filter and method of manufacture |
DE102006054310A1 (de) * | 2006-11-17 | 2008-05-29 | Siemens Ag | Vermessen eines Hohlraums mittels zylindersymmetrischer Triangulation |
JP5101345B2 (ja) | 2008-03-04 | 2012-12-19 | 日東電工株式会社 | 光導波路装置の製造方法 |
EP2110694B1 (fr) | 2008-04-18 | 2013-08-14 | Sony DADC Austria AG | Procédé de fabrication d'un guide d'onde optique, guide d'onde optique, et agencement de capteur |
DE102008046579A1 (de) * | 2008-09-10 | 2010-03-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer optischen Wellenleiterschicht |
US8442360B2 (en) * | 2008-11-05 | 2013-05-14 | Gigoptix, Inc. | Intrinsically low resistivity hybrid sol-gel polymer clads and electro-optic devices made therefrom |
JP2012511106A (ja) * | 2008-12-05 | 2012-05-17 | ロータス アプライド テクノロジー エルエルシー | 改善されたバリア層の性質を有する薄膜の高速成膜 |
DE102010063704A1 (de) * | 2010-12-21 | 2012-06-21 | Elgan-Diamantwerkzeuge Gmbh & Co. Kg | Bearbeitungsverfahren und Bearbeitungswerkzeug zum Bearbeiten einer gekrümmten Werkstückoberfläche |
DE102012214440B3 (de) * | 2012-08-14 | 2013-10-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Planaroptisches Element, Sensorelement und Verfahren zu deren Herstellung |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
DE102016015587B4 (de) | 2016-12-31 | 2019-11-21 | Technische Universität Braunschweig | Substrat und dessen Herstellung |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3674336A (en) * | 1970-08-28 | 1972-07-04 | Bell Telephone Labor Inc | Light wave coupling into thin film light guides with bragg type gratings |
US3822928A (en) * | 1971-08-02 | 1974-07-09 | Bell Telephone Labor Inc | Thin film light guide |
US4579750A (en) * | 1980-07-07 | 1986-04-01 | Massachusetts Institute Of Technology | Laser heated CVD process |
NL8302461A (nl) * | 1983-07-11 | 1985-02-01 | Philips Nv | Geodetisch optisch element. |
NL8303905A (nl) * | 1983-11-15 | 1985-06-03 | Philips Nv | Werkwijze voor het vervaardigen van een geodetische component en geintegreerde optische inrichting die deze component bevat. |
US4749245A (en) * | 1985-03-11 | 1988-06-07 | Kuraray Co., Ltd. | Thin film waveguide device and manufacturing method for making same |
CA1268618A (fr) * | 1986-11-05 | 1990-05-08 | William P. Trumble | Methode de fabrication d'un element de guide d'ondes optiques |
JP2539406B2 (ja) * | 1987-02-04 | 1996-10-02 | 株式会社日立製作所 | 固体光ピツクアツプ |
US4827870A (en) * | 1987-10-05 | 1989-05-09 | Honeywell Inc. | Apparatus for applying multilayer optical interference coating on complex curved substrates |
JPH01131031A (ja) * | 1987-11-16 | 1989-05-23 | Seiko Epson Corp | ガラス転写体の製造方法 |
JPH01169203U (fr) * | 1988-05-20 | 1989-11-29 | ||
JPH0258284A (ja) * | 1988-08-24 | 1990-02-27 | Nec Corp | 回折格子の製造方法 |
FR2646930B1 (fr) * | 1989-05-12 | 1993-04-09 | Essilor Int | Procede de realisation d'un element diffractif, utilisable notamment dans la fabrication de lentilles optiques artificielles, et lentilles ainsi obtenues |
US5138687A (en) * | 1989-09-26 | 1992-08-11 | Omron Corporation | Rib optical waveguide and method of manufacturing the same |
US4955977A (en) * | 1989-10-11 | 1990-09-11 | Eastman Kodak Company | Nonlinear optical article with improved buffer layer |
FR2658307A1 (fr) * | 1990-02-13 | 1991-08-16 | Thomson Csf | Guide d'onde optique integre et procede de realisation. |
DE4008405C1 (fr) | 1990-03-16 | 1991-07-11 | Schott Glaswerke, 6500 Mainz, De | |
US5009920A (en) * | 1990-03-30 | 1991-04-23 | Honeywell Inc. | Method for applying optical interference coating |
US5026135A (en) * | 1990-04-20 | 1991-06-25 | E. I. Du Pont De Nemours And Company | Moisture sealing of optical waveguide devices with doped silicon dioxide |
DE59109246D1 (de) | 1990-05-03 | 2003-04-03 | Hoffmann La Roche | Mikrooptischer Sensor |
DE4137606C1 (fr) * | 1991-11-15 | 1992-07-30 | Schott Glaswerke, 6500 Mainz, De |
-
1992
- 1992-08-29 DE DE4228853A patent/DE4228853C2/de not_active Expired - Fee Related
- 1992-09-12 EP EP92115622A patent/EP0533074B1/fr not_active Expired - Lifetime
- 1992-09-12 DE DE59210005T patent/DE59210005D1/de not_active Expired - Fee Related
- 1992-09-12 DE DE59209662T patent/DE59209662D1/de not_active Expired - Fee Related
- 1992-09-12 ES ES92115622T patent/ES2136068T3/es not_active Expired - Lifetime
- 1992-09-12 EP EP94109950A patent/EP0622647B1/fr not_active Expired - Lifetime
- 1992-09-12 AT AT94109950T patent/ATE344933T1/de not_active IP Right Cessation
- 1992-09-12 AT AT92115622T patent/ATE178144T1/de not_active IP Right Cessation
- 1992-09-18 CA CA002078612A patent/CA2078612C/fr not_active Expired - Fee Related
- 1992-09-18 JP JP4273410A patent/JP2903033B2/ja not_active Expired - Fee Related
- 1992-09-18 US US07/946,072 patent/US5369722A/en not_active Expired - Lifetime
-
1995
- 1995-04-07 US US08/418,895 patent/US5480687A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ES2136068T3 (es) | 1999-11-16 |
DE59209662D1 (de) | 1999-04-29 |
US5480687A (en) | 1996-01-02 |
US5369722A (en) | 1994-11-29 |
EP0622647A3 (en) | 1994-12-07 |
EP0533074A1 (fr) | 1993-03-24 |
EP0622647A2 (fr) | 1994-11-02 |
EP0533074B1 (fr) | 1999-03-24 |
DE4228853A1 (de) | 1993-03-25 |
JPH05273427A (ja) | 1993-10-22 |
ATE344933T1 (de) | 2006-11-15 |
JP2903033B2 (ja) | 1999-06-07 |
DE59210005D1 (de) | 2006-12-21 |
DE4228853C2 (de) | 1993-10-21 |
EP0622647B1 (fr) | 2006-11-08 |
CA2078612C (fr) | 1999-08-24 |
ATE178144T1 (de) | 1999-04-15 |
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