CA2008294C - Method of refining rare gas fluoride excimer laser gas - Google Patents
Method of refining rare gas fluoride excimer laser gasInfo
- Publication number
- CA2008294C CA2008294C CA002008294A CA2008294A CA2008294C CA 2008294 C CA2008294 C CA 2008294C CA 002008294 A CA002008294 A CA 002008294A CA 2008294 A CA2008294 A CA 2008294A CA 2008294 C CA2008294 C CA 2008294C
- Authority
- CA
- Canada
- Prior art keywords
- gas
- laser
- metal
- laser gas
- fluoride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007670 refining Methods 0.000 title claims description 29
- 238000000034 method Methods 0.000 title claims description 27
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 29
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 25
- 239000011737 fluorine Substances 0.000 claims abstract description 25
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 24
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910021536 Zeolite Inorganic materials 0.000 claims abstract description 23
- 239000010457 zeolite Substances 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 17
- 239000007787 solid Substances 0.000 claims abstract description 17
- 239000012535 impurity Substances 0.000 claims abstract description 16
- 229910001512 metal fluoride Inorganic materials 0.000 claims abstract description 14
- 150000002222 fluorine compounds Chemical class 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 229910052742 iron Inorganic materials 0.000 claims abstract description 6
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 claims abstract description 5
- 239000000920 calcium hydroxide Substances 0.000 claims abstract description 5
- 229910001861 calcium hydroxide Inorganic materials 0.000 claims abstract description 5
- 235000011116 calcium hydroxide Nutrition 0.000 claims abstract description 5
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 3
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 9
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- 229910052783 alkali metal Inorganic materials 0.000 claims description 5
- 150000001340 alkali metals Chemical class 0.000 claims description 5
- 230000009257 reactivity Effects 0.000 claims description 5
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 4
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 4
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 claims description 4
- 229910020323 ClF3 Inorganic materials 0.000 claims description 3
- 101100441092 Danio rerio crlf3 gene Proteins 0.000 claims description 3
- 150000001341 alkaline earth metal compounds Chemical class 0.000 claims description 3
- 239000000292 calcium oxide Substances 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 claims description 3
- 150000001339 alkali metal compounds Chemical class 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 33
- 229910052786 argon Inorganic materials 0.000 abstract description 5
- 229910052743 krypton Inorganic materials 0.000 abstract description 5
- 229910052724 xenon Inorganic materials 0.000 abstract description 5
- -1 Ca(OH)2 Chemical class 0.000 abstract description 4
- 238000009825 accumulation Methods 0.000 abstract description 2
- 239000003463 adsorbent Substances 0.000 abstract description 2
- 239000000615 nonconductor Substances 0.000 abstract description 2
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 114
- 229910004014 SiF4 Inorganic materials 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000000274 adsorptive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000003701 inert diluent Substances 0.000 description 2
- SHXXPRJOPFJRHA-UHFFFAOYSA-K iron(iii) fluoride Chemical compound F[Fe](F)F SHXXPRJOPFJRHA-UHFFFAOYSA-K 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical group [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 208000000884 Airway Obstruction Diseases 0.000 description 1
- 206010008589 Choking Diseases 0.000 description 1
- 229910021564 Chromium(III) fluoride Inorganic materials 0.000 description 1
- 229910006160 GeF4 Inorganic materials 0.000 description 1
- 229910021572 Manganese(IV) fluoride Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910021174 PF5 Inorganic materials 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- AFYPFACVUDMOHA-UHFFFAOYSA-N chlorotrifluoromethane Chemical compound FC(F)(F)Cl AFYPFACVUDMOHA-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- OBCUTHMOOONNBS-UHFFFAOYSA-N phosphorus pentafluoride Chemical compound FP(F)(F)(F)F OBCUTHMOOONNBS-UHFFFAOYSA-N 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical compound F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- FTBATIJJKIIOTP-UHFFFAOYSA-K trifluorochromium Chemical compound F[Cr](F)F FTBATIJJKIIOTP-UHFFFAOYSA-K 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1-20284 | 1989-01-30 | ||
| JP1020284A JPH0760914B2 (ja) | 1989-01-30 | 1989-01-30 | エキシマーレーザーガスの精製法並びにその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2008294A1 CA2008294A1 (en) | 1990-07-30 |
| CA2008294C true CA2008294C (en) | 1996-03-19 |
Family
ID=12022871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002008294A Expired - Fee Related CA2008294C (en) | 1989-01-30 | 1990-01-22 | Method of refining rare gas fluoride excimer laser gas |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4964137A (enExample) |
| JP (1) | JPH0760914B2 (enExample) |
| CA (1) | CA2008294C (enExample) |
| DE (1) | DE4002642A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0527986B1 (en) * | 1991-03-06 | 1994-07-20 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | A method for extending the gas lifetime of excimer lasers |
| US5307364A (en) * | 1993-05-24 | 1994-04-26 | Spectra Gases, Inc. | Addition of oxygen to a gas mix for use in an excimer laser |
| US5622682A (en) * | 1994-04-06 | 1997-04-22 | Atmi Ecosys Corporation | Method for concentration and recovery of halocarbons from effluent gas streams |
| US6030591A (en) * | 1994-04-06 | 2000-02-29 | Atmi Ecosys Corporation | Process for removing and recovering halocarbons from effluent process streams |
| JP3986597B2 (ja) * | 1996-10-15 | 2007-10-03 | 関東電化工業株式会社 | 三フッ化窒素含有ガスの処理方法及びそのための処理剤 |
| US6128323A (en) * | 1997-04-23 | 2000-10-03 | Cymer, Inc. | Reliable modular production quality narrow-band high REP rate excimer laser |
| US5982795A (en) * | 1997-12-22 | 1999-11-09 | Cymer, Inc. | Excimer laser having power supply with fine digital regulation |
| US6330261B1 (en) | 1997-07-18 | 2001-12-11 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
| JP3725781B2 (ja) * | 1997-12-15 | 2005-12-14 | サイマー， インコーポレイテッド | 高パルス速度パルス電源システム |
| US6526085B2 (en) | 1998-10-05 | 2003-02-25 | Lambda Physik Ag | Performance control system and method for gas discharge lasers |
| US6212214B1 (en) * | 1998-10-05 | 2001-04-03 | Lambda Physik Ag | Performance control system and method for gas discharge lasers |
| DE19942455A1 (de) | 1998-10-05 | 2000-04-06 | Lambda Physik Gmbh | Leistungssteuersystem und -verfahren für Gasentladungslaser |
| US6069909A (en) * | 1999-03-08 | 2000-05-30 | Xmr, Inc. | Excimer laser with improved window mount |
| US6727731B1 (en) | 1999-03-12 | 2004-04-27 | Lambda Physik Ag | Energy control for an excimer or molecular fluorine laser |
| CA2430608C (en) | 2002-06-03 | 2012-01-10 | Praxair Technology, Inc. | Carbon dioxide laser resonator gas |
| KR20020096026A (ko) * | 2002-10-16 | 2002-12-28 | 장성진 | 고순도의 염기성／불활성 가스 제조를 위한 정제방법 및장치 |
| US6843830B2 (en) * | 2003-04-15 | 2005-01-18 | Advanced Technology Materials, Inc. | Abatement system targeting a by-pass effluent stream of a semiconductor process tool |
| US7074378B2 (en) * | 2004-01-23 | 2006-07-11 | Air Products And Chemicals, Inc. | Process for the purification of NF3 |
| JP6175471B2 (ja) * | 2015-10-30 | 2017-08-02 | 日本エア・リキード株式会社 | ネオン回収精製システムおよびネオン回収精製方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4674090A (en) * | 1985-01-28 | 1987-06-16 | Signetics Corporation | Method of using complementary logic gates to test for faults in electronic components |
| US4722090A (en) * | 1985-03-18 | 1988-01-26 | Mitsubishi Denki Kabushiki Kaisha | Excimer laser equipment |
| JPH0624605B2 (ja) * | 1986-05-29 | 1994-04-06 | セントラル硝子株式会社 | 希ガスハライドエキシマ−レ−ザ−ガスの精製法 |
| CA1298959C (en) * | 1985-09-28 | 1992-04-21 | Kohzo Hakuta | Method of refining rare gas halide excimer laser gas |
| JPS6274430A (ja) * | 1985-09-28 | 1987-04-06 | Central Glass Co Ltd | 希ガスハライドエキシマ−レ−ザ−ガスの精製法 |
| JPH0199272A (ja) * | 1987-10-13 | 1989-04-18 | Hamamatsu Photonics Kk | ガス精製装置 |
-
1989
- 1989-01-30 JP JP1020284A patent/JPH0760914B2/ja not_active Expired - Fee Related
-
1990
- 1990-01-18 US US07/466,930 patent/US4964137A/en not_active Expired - Lifetime
- 1990-01-22 CA CA002008294A patent/CA2008294C/en not_active Expired - Fee Related
- 1990-01-30 DE DE4002642A patent/DE4002642A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| US4964137A (en) | 1990-10-16 |
| CA2008294A1 (en) | 1990-07-30 |
| DE4002642C2 (enExample) | 1992-02-06 |
| JPH0760914B2 (ja) | 1995-06-28 |
| DE4002642A1 (de) | 1990-08-02 |
| JPH02201984A (ja) | 1990-08-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |