CA2000626C

CA2000626C - Corps frittes dielectriques a base d'oxyde metallique, poudres de frittage et methode de fabrication

Corps frittes dielectriques a base d'oxyde metallique, poudres de frittage et methode de fabrication

Info

Publication number: CA2000626C
Authority: CA; Canada
Prior art keywords: oxide; bismuth; atom; silica; source
Prior art date: 1988-10-14
Legal status : Expired - Fee Related

Application number

CA 2000626

Other languages

English (en)

Other versions

CA2000626A1 (fr

Inventor

Adam C. Tanous

Ryan W. Dupon

Mark S. Thompson

Gary H. Wiseman

Douglas J. Musolf

Current Assignee

Raychem Corp

Original Assignee

Raychem Corp

Priority date

1988-10-14

Filing date

1989-10-13

Publication date

1999-12-28

1989-10-13 Application filed by Raychem Corp filed Critical Raychem Corp

1990-04-14 Publication of CA2000626A1 publication Critical patent/CA2000626A1/fr

1999-12-28 Application granted granted Critical

1999-12-28 Publication of CA2000626C publication Critical patent/CA2000626C/fr

2009-10-13 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 50
150000004706 metal oxides Chemical class 0.000 title claims abstract description 50
238000000034 method Methods 0.000 title claims description 70
239000000843 powder Substances 0.000 title claims description 67
239000002243 precursor Substances 0.000 title claims description 48
229910052797 bismuth Inorganic materials 0.000 claims abstract description 86
JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 77
239000011777 magnesium Substances 0.000 claims abstract description 47
229910052749 magnesium Inorganic materials 0.000 claims abstract description 41
229910052782 aluminium Inorganic materials 0.000 claims abstract description 39
229910052710 silicon Inorganic materials 0.000 claims abstract description 37
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims abstract description 32
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 29
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 28
239000000395 magnesium oxide Substances 0.000 claims abstract description 27
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims abstract description 27
229910052796 boron Inorganic materials 0.000 claims abstract description 25
229910000416 bismuth oxide Inorganic materials 0.000 claims abstract description 24
229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 22
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 21
239000011701 zinc Substances 0.000 claims abstract description 18
229910052810 boron oxide Inorganic materials 0.000 claims abstract description 17
JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims abstract description 17
239000010703 silicon Substances 0.000 claims abstract description 16
229910052725 zinc Inorganic materials 0.000 claims abstract description 16
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 14
239000011787 zinc oxide Substances 0.000 claims abstract description 14
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 8
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 152
238000005245 sintering Methods 0.000 claims description 93
239000000203 mixture Substances 0.000 claims description 58
239000000377 silicon dioxide Substances 0.000 claims description 49
229910052878 cordierite Inorganic materials 0.000 claims description 32
JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 claims description 32
KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 29
229910052863 mullite Inorganic materials 0.000 claims description 29
239000008119 colloidal silica Substances 0.000 claims description 27
239000000758 substrate Substances 0.000 claims description 21
239000004020 conductor Substances 0.000 claims description 19
TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 19
150000004679 hydroxides Chemical class 0.000 claims description 17
229910052844 willemite Inorganic materials 0.000 claims description 17
230000001376 precipitating effect Effects 0.000 claims description 15
239000003795 chemical substances by application Substances 0.000 claims description 12
239000004927 clay Substances 0.000 claims description 12
XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 11
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 11
KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 10
239000004327 boric acid Substances 0.000 claims description 10
229910052596 spinel Inorganic materials 0.000 claims description 8
239000011029 spinel Substances 0.000 claims description 8
150000001621 bismuth Chemical class 0.000 claims description 7
150000001642 boronic acid derivatives Chemical class 0.000 claims description 6
238000004519 manufacturing process Methods 0.000 claims description 6
238000001035 drying Methods 0.000 claims description 5
239000000454 talc Substances 0.000 claims description 5
229910052623 talc Inorganic materials 0.000 claims description 5
150000003681 vanadium Chemical class 0.000 claims description 5
AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 4
239000004065 semiconductor Substances 0.000 claims description 4
150000003751 zinc Chemical class 0.000 claims description 3
159000000003 magnesium salts Chemical class 0.000 claims 4
229910052570 clay Inorganic materials 0.000 claims 2
LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract description 13
229910001935 vanadium oxide Inorganic materials 0.000 abstract description 12
229910052720 vanadium Inorganic materials 0.000 abstract description 11
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 49
239000008188 pellet Substances 0.000 description 39
241000894007 species Species 0.000 description 33
239000000463 material Substances 0.000 description 31
239000011550 stock solution Substances 0.000 description 31
238000002360 preparation method Methods 0.000 description 30
238000001556 precipitation Methods 0.000 description 25
VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 22
239000000908 ammonium hydroxide Substances 0.000 description 22
238000002441 X-ray diffraction Methods 0.000 description 21
239000008367 deionised water Substances 0.000 description 20
229910021641 deionized water Inorganic materials 0.000 description 20
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 19
229910017604 nitric acid Inorganic materials 0.000 description 19
238000000967 suction filtration Methods 0.000 description 16
238000007865 diluting Methods 0.000 description 15
238000010438 heat treatment Methods 0.000 description 14
-1 oxides Chemical class 0.000 description 14
239000000243 solution Substances 0.000 description 14
PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 13
FBXVOTBTGXARNA-UHFFFAOYSA-N bismuth;trinitrate;pentahydrate Chemical compound O.O.O.O.O.[Bi+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O FBXVOTBTGXARNA-UHFFFAOYSA-N 0.000 description 13
238000002156 mixing Methods 0.000 description 13
150000003839 salts Chemical class 0.000 description 13
238000004458 analytical method Methods 0.000 description 12
MFUVDXOKPBAHMC-UHFFFAOYSA-N magnesium;dinitrate;hexahydrate Chemical compound O.O.O.O.O.O.[Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MFUVDXOKPBAHMC-UHFFFAOYSA-N 0.000 description 12
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 10
229910052802 copper Inorganic materials 0.000 description 10
239000010949 copper Substances 0.000 description 10
MDBGGTQNNUOQRC-UHFFFAOYSA-N Allidochlor Chemical compound ClCC(=O)N(CC=C)CC=C MDBGGTQNNUOQRC-UHFFFAOYSA-N 0.000 description 9
239000011369 resultant mixture Substances 0.000 description 9
PPNKDDZCLDMRHS-UHFFFAOYSA-N bismuth(III) nitrate Inorganic materials [Bi+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O PPNKDDZCLDMRHS-UHFFFAOYSA-N 0.000 description 8
239000000725 suspension Substances 0.000 description 8
XNDZQQSKSQTQQD-UHFFFAOYSA-N 3-methylcyclohex-2-en-1-ol Chemical compound CC1=CC(O)CCC1 XNDZQQSKSQTQQD-UHFFFAOYSA-N 0.000 description 7
XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 7
239000002245 particle Substances 0.000 description 7
239000000654 additive Substances 0.000 description 6
239000012071 phase Substances 0.000 description 6
230000000052 comparative effect Effects 0.000 description 5
229910052906 cristobalite Inorganic materials 0.000 description 5
238000001704 evaporation Methods 0.000 description 5
YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 5
238000002844 melting Methods 0.000 description 5
230000008018 melting Effects 0.000 description 5
150000002823 nitrates Chemical class 0.000 description 5
LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 5
229910052905 tridymite Inorganic materials 0.000 description 5
BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 4
AXPJXWWKFVOKMS-UHFFFAOYSA-N [B]=O.[Bi]=O Chemical group [B]=O.[Bi]=O AXPJXWWKFVOKMS-UHFFFAOYSA-N 0.000 description 4
239000007864 aqueous solution Substances 0.000 description 4
239000011230 binding agent Substances 0.000 description 4
DQUIAMCJEJUUJC-UHFFFAOYSA-N dibismuth;dioxido(oxo)silane Chemical compound [Bi+3].[Bi+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O DQUIAMCJEJUUJC-UHFFFAOYSA-N 0.000 description 4
239000011521 glass Substances 0.000 description 4
229910052751 metal Inorganic materials 0.000 description 4
239000002184 metal Substances 0.000 description 4
229920001223 polyethylene glycol Polymers 0.000 description 4
239000002002 slurry Substances 0.000 description 4
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
238000000280 densification Methods 0.000 description 3
238000007571 dilatometry Methods 0.000 description 3
238000010304 firing Methods 0.000 description 3
239000002241 glass-ceramic Substances 0.000 description 3
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
229910052737 gold Inorganic materials 0.000 description 3
239000010931 gold Substances 0.000 description 3
229910052709 silver Inorganic materials 0.000 description 3
239000004332 silver Substances 0.000 description 3
239000002904 solvent Substances 0.000 description 3
238000005406 washing Methods 0.000 description 3
HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
IRIAEXORFWYRCZ-UHFFFAOYSA-N Butylbenzyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCC1=CC=CC=C1 IRIAEXORFWYRCZ-UHFFFAOYSA-N 0.000 description 2
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
239000002202 Polyethylene glycol Substances 0.000 description 2
241000534944 Thia Species 0.000 description 2
230000002378 acidificating effect Effects 0.000 description 2
125000002877 alkyl aryl group Chemical class 0.000 description 2
150000001412 amines Chemical class 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
150000001649 bromium compounds Chemical class 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
150000001805 chlorine compounds Chemical class 0.000 description 2
230000009977 dual effect Effects 0.000 description 2
NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 2
239000007791 liquid phase Substances 0.000 description 2
239000002667 nucleating agent Substances 0.000 description 2
150000003891 oxalate salts Chemical class 0.000 description 2
239000004014 plasticizer Substances 0.000 description 2
229920002451 polyvinyl alcohol Polymers 0.000 description 2
239000002994 raw material Substances 0.000 description 2
229910052572 stoneware Inorganic materials 0.000 description 2
150000003467 sulfuric acid derivatives Chemical class 0.000 description 2
239000006228 supernatant Substances 0.000 description 2
239000004094 surface-active agent Substances 0.000 description 2
DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 2
XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
NYNZQNWKBKUAII-KBXCAEBGSA-N (3s)-n-[5-[(2r)-2-(2,5-difluorophenyl)pyrrolidin-1-yl]pyrazolo[1,5-a]pyrimidin-3-yl]-3-hydroxypyrrolidine-1-carboxamide Chemical compound C1[C@@H](O)CCN1C(=O)NC1=C2N=C(N3[C@H](CCC3)C=3C(=CC=C(F)C=3)F)C=CN2N=C1 NYNZQNWKBKUAII-KBXCAEBGSA-N 0.000 description 1
WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
241000287227 Fringillidae Species 0.000 description 1
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
229910002651 NO3 Inorganic materials 0.000 description 1
ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
239000005642 Oleic acid Substances 0.000 description 1
239000004721 Polyphenylene oxide Substances 0.000 description 1
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
235000021355 Stearic acid Nutrition 0.000 description 1
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
230000001476 alcoholic effect Effects 0.000 description 1
150000001298 alcohols Chemical class 0.000 description 1
229910052783 alkali metal Inorganic materials 0.000 description 1
150000001340 alkali metals Chemical class 0.000 description 1
150000005215 alkyl ethers Chemical class 0.000 description 1
229910000323 aluminium silicate Inorganic materials 0.000 description 1
SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical class [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 description 1
150000001450 anions Chemical class 0.000 description 1
239000002585 base Substances 0.000 description 1
BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
239000006227 byproduct Substances 0.000 description 1
239000000292 calcium oxide Substances 0.000 description 1
235000012255 calcium oxide Nutrition 0.000 description 1
239000003990 capacitor Substances 0.000 description 1
150000001735 carboxylic acids Chemical class 0.000 description 1
229920002678 cellulose Polymers 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000004581 coalescence Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
229910002026 crystalline silica Inorganic materials 0.000 description 1
238000002425 crystallisation Methods 0.000 description 1
230000008025 crystallization Effects 0.000 description 1
239000003989 dielectric material Substances 0.000 description 1
238000007598 dipping method Methods 0.000 description 1
239000002270 dispersing agent Substances 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
238000011049 filling Methods 0.000 description 1
150000002334 glycols Chemical class 0.000 description 1
230000017525 heat dissipation Effects 0.000 description 1
239000008241 heterogeneous mixture Substances 0.000 description 1
239000012456 homogeneous solution Substances 0.000 description 1
WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
239000012535 impurity Substances 0.000 description 1
229910052500 inorganic mineral Inorganic materials 0.000 description 1
239000012212 insulator Substances 0.000 description 1
QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
229910052622 kaolinite Inorganic materials 0.000 description 1
238000002386 leaching Methods 0.000 description 1
239000007788 liquid Substances 0.000 description 1
RAHPVAFVXPHMLR-UHFFFAOYSA-N magnesium oxobismuthanylium oxygen(2-) Chemical compound [Bi+]=O.[O-2].[Mg+2] RAHPVAFVXPHMLR-UHFFFAOYSA-N 0.000 description 1
239000000391 magnesium silicate Substances 0.000 description 1
235000012243 magnesium silicates Nutrition 0.000 description 1
GSJMPHIKYICTQX-UHFFFAOYSA-N magnesium;oxosilicon Chemical compound [Mg].[Si]=O GSJMPHIKYICTQX-UHFFFAOYSA-N 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
239000000155 melt Substances 0.000 description 1
238000001465 metallisation Methods 0.000 description 1
238000005649 metathesis reaction Methods 0.000 description 1
239000011707 mineral Substances 0.000 description 1
235000010755 mineral Nutrition 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
239000004570 mortar (masonry) Substances 0.000 description 1
238000006386 neutralization reaction Methods 0.000 description 1
MAJZZCVHPGUSPM-UHFFFAOYSA-N nitric acid nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.O[N+]([O-])=O MAJZZCVHPGUSPM-UHFFFAOYSA-N 0.000 description 1
QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
150000002889 oleic acids Chemical class 0.000 description 1
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
238000004806 packaging method and process Methods 0.000 description 1
XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical class OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 1
229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
229920000570 polyether Polymers 0.000 description 1
239000004926 polymethyl methacrylate Substances 0.000 description 1
229920001451 polypropylene glycol Polymers 0.000 description 1
229920002689 polyvinyl acetate Polymers 0.000 description 1
239000011118 polyvinyl acetate Substances 0.000 description 1
229910052700 potassium Inorganic materials 0.000 description 1
KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Substances [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
238000000518 rheometry Methods 0.000 description 1
238000007650 screen-printing Methods 0.000 description 1
238000012216 screening Methods 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
229910052708 sodium Inorganic materials 0.000 description 1
HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Substances [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 1
238000000638 solvent extraction Methods 0.000 description 1
238000005507 spraying Methods 0.000 description 1
239000008117 stearic acid Substances 0.000 description 1
238000003756 stirring Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
238000010345 tape casting Methods 0.000 description 1
229920001169 thermoplastic Polymers 0.000 description 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
229910052723 transition metal Inorganic materials 0.000 description 1
150000003624 transition metals Chemical class 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
238000002424 x-ray crystallography Methods 0.000 description 1
229910001928 zirconium oxide Inorganic materials 0.000 description 1