CA1336937C - Fluidized bed for production of polycrystalline silicon - Google Patents

Fluidized bed for production of polycrystalline silicon

Info

Publication number
CA1336937C
CA1336937C CA 585897 CA585897A CA1336937C CA 1336937 C CA1336937 C CA 1336937C CA 585897 CA585897 CA 585897 CA 585897 A CA585897 A CA 585897A CA 1336937 C CA1336937 C CA 1336937C
Authority
CA
Canada
Prior art keywords
silicon
particles
fluidized bed
zone
entrainment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 585897
Other languages
English (en)
French (fr)
Inventor
Robert Nicholas Flagella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Silicon Materials LLC
Original Assignee
Advanced Silicon Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Silicon Materials LLC filed Critical Advanced Silicon Materials LLC
Application granted granted Critical
Publication of CA1336937C publication Critical patent/CA1336937C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA 585897 1987-12-14 1988-12-14 Fluidized bed for production of polycrystalline silicon Expired - Fee Related CA1336937C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13249087A 1987-12-14 1987-12-14
US132,490 1987-12-14

Publications (1)

Publication Number Publication Date
CA1336937C true CA1336937C (en) 1995-09-12

Family

ID=22454295

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 585897 Expired - Fee Related CA1336937C (en) 1987-12-14 1988-12-14 Fluidized bed for production of polycrystalline silicon

Country Status (3)

Country Link
JP (1) JP2562360B2 (enrdf_load_stackoverflow)
CA (1) CA1336937C (enrdf_load_stackoverflow)
DE (1) DE3842099A1 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910343A1 (de) * 1988-03-31 1989-10-12 Union Carbide Corp Aussenbeheizter wirbelschicht-reaktor
DE10060469A1 (de) * 2000-12-06 2002-07-04 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularem Silizium
DE102004010055A1 (de) * 2004-03-02 2005-09-22 Degussa Ag Verfahren zur Herstellung von Silicium
DE102004027563A1 (de) * 2004-06-04 2005-12-22 Joint Solar Silicon Gmbh & Co. Kg Silizium sowie Verfahren zu dessen Herstellung
DE202008013839U1 (de) 2008-12-23 2009-04-09 G+R Polysilicon Gmbh Rohrwärmetauscher für eine Einrichtung zur Herstellung von Polysilizium
US8534904B2 (en) * 2010-03-10 2013-09-17 Lord Ltd., Lp Apparatus for restarting a gas-solids contactor
DE102013210039A1 (de) * 2013-05-29 2014-12-04 Wacker Chemie Ag Verfahren zur Herstellung von granularem Polysilicium
CN116272693B (zh) * 2023-01-31 2025-09-26 内蒙古鄂尔多斯多晶硅业有限公司 一种适用于冷氢化流化床的硅粉颗粒选取方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4314525A (en) * 1980-03-03 1982-02-09 California Institute Of Technology Fluidized bed silicon deposition from silane

Also Published As

Publication number Publication date
DE3842099A1 (de) 1989-06-22
JPH026392A (ja) 1990-01-10
JP2562360B2 (ja) 1996-12-11
DE3842099C2 (enrdf_load_stackoverflow) 1992-11-05

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