CA1290719C - Process and apparatus for continuous production of lightweight arrays of photovoltaic cells - Google Patents
Process and apparatus for continuous production of lightweight arrays of photovoltaic cellsInfo
- Publication number
- CA1290719C CA1290719C CA000519110A CA519110A CA1290719C CA 1290719 C CA1290719 C CA 1290719C CA 000519110 A CA000519110 A CA 000519110A CA 519110 A CA519110 A CA 519110A CA 1290719 C CA1290719 C CA 1290719C
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- semiconductor alloy
- support material
- film
- surrogate substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000003491 array Methods 0.000 title description 4
- 238000010924 continuous production Methods 0.000 title description 2
- 239000010408 film Substances 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 79
- 239000004065 semiconductor Substances 0.000 claims abstract description 71
- 239000000956 alloy Substances 0.000 claims abstract description 68
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 44
- 238000000151 deposition Methods 0.000 claims abstract description 33
- 230000008021 deposition Effects 0.000 claims abstract description 22
- 230000035939 shock Effects 0.000 claims abstract description 12
- 238000000926 separation method Methods 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims abstract description 6
- 239000010935 stainless steel Substances 0.000 claims abstract description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 4
- 238000000059 patterning Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract description 3
- 229910000676 Si alloy Inorganic materials 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 44
- 239000000203 mixture Substances 0.000 description 12
- 239000002243 precursor Substances 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 8
- 239000002019 doping agent Substances 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229910015900 BF3 Inorganic materials 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000078 germane Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 2
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical compound F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- PQISQOHUTDZDEU-UHFFFAOYSA-N F[P](F)(F)F Chemical compound F[P](F)(F)F PQISQOHUTDZDEU-UHFFFAOYSA-N 0.000 description 1
- WTDRDQBEARUVNC-LURJTMIESA-N L-DOPA Chemical compound OC(=O)[C@@H](N)CC1=CC=C(O)C(O)=C1 WTDRDQBEARUVNC-LURJTMIESA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- -1 acryl Chemical group 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- BFMKFCLXZSUVPI-UHFFFAOYSA-N ethyl but-3-enoate Chemical compound CCOC(=O)CC=C BFMKFCLXZSUVPI-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- UHZYTMXLRWXGPK-UHFFFAOYSA-N phosphorus pentachloride Chemical compound ClP(Cl)(Cl)(Cl)Cl UHZYTMXLRWXGPK-UHFFFAOYSA-N 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229940071182 stannate Drugs 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/139—Manufacture or treatment of devices covered by this subclass using temporary substrates
- H10F71/1395—Manufacture or treatment of devices covered by this subclass using temporary substrates for thin-film devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/107—Continuous treatment of the devices, e.g. roll-to roll processes or multi-chamber deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/169—Thin semiconductor films on metallic or insulating substrates
- H10F77/1692—Thin semiconductor films on metallic or insulating substrates the films including only Group IV materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/786,782 US4663828A (en) | 1985-10-11 | 1985-10-11 | Process and apparatus for continuous production of lightweight arrays of photovoltaic cells |
| US786,782 | 1985-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1290719C true CA1290719C (en) | 1991-10-15 |
Family
ID=25139576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000519110A Expired - Lifetime CA1290719C (en) | 1985-10-11 | 1986-09-25 | Process and apparatus for continuous production of lightweight arrays of photovoltaic cells |
Country Status (9)
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2667616B1 (fr) * | 1990-10-05 | 1993-01-15 | Aerospatiale | Procede et installation de metallisation en continu d'une meche de fibres etalee. |
| DE4324320B4 (de) * | 1992-07-24 | 2006-08-31 | Fuji Electric Co., Ltd., Kawasaki | Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung |
| US6001432A (en) * | 1992-11-19 | 1999-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for forming films on a substrate |
| US7264850B1 (en) | 1992-12-28 | 2007-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Process for treating a substrate with a plasma |
| US6001431A (en) * | 1992-12-28 | 1999-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Process for fabricating a magnetic recording medium |
| US5674325A (en) * | 1995-06-07 | 1997-10-07 | Photon Energy, Inc. | Thin film photovoltaic device and process of manufacture |
| US6093290A (en) * | 1997-05-14 | 2000-07-25 | Canon Kabushiki Kaisha | Method of generating a reciprocating plurality of magnetic fluxes on a target |
| NL1013900C2 (nl) * | 1999-12-21 | 2001-06-25 | Akzo Nobel Nv | Werkwijze voor de vervaardiging van een zonnecelfolie met in serie geschakelde zonnecellen. |
| US6441298B1 (en) | 2000-08-15 | 2002-08-27 | Nec Research Institute, Inc | Surface-plasmon enhanced photovoltaic device |
| US20030044539A1 (en) * | 2001-02-06 | 2003-03-06 | Oswald Robert S. | Process for producing photovoltaic devices |
| US20020117199A1 (en) * | 2001-02-06 | 2002-08-29 | Oswald Robert S. | Process for producing photovoltaic devices |
| US6649901B2 (en) | 2002-03-14 | 2003-11-18 | Nec Laboratories America, Inc. | Enhanced optical transmission apparatus with improved aperture geometry |
| US7170001B2 (en) * | 2003-06-26 | 2007-01-30 | Advent Solar, Inc. | Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias |
| US7649141B2 (en) * | 2003-06-30 | 2010-01-19 | Advent Solar, Inc. | Emitter wrap-through back contact solar cells on thin silicon wafers |
| US20060060238A1 (en) * | 2004-02-05 | 2006-03-23 | Advent Solar, Inc. | Process and fabrication methods for emitter wrap through back contact solar cells |
| US7144751B2 (en) * | 2004-02-05 | 2006-12-05 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
| US7335555B2 (en) * | 2004-02-05 | 2008-02-26 | Advent Solar, Inc. | Buried-contact solar cells with self-doping contacts |
| US20050172996A1 (en) * | 2004-02-05 | 2005-08-11 | Advent Solar, Inc. | Contact fabrication of emitter wrap-through back contact silicon solar cells |
| US7799699B2 (en) | 2004-06-04 | 2010-09-21 | The Board Of Trustees Of The University Of Illinois | Printable semiconductor structures and related methods of making and assembling |
| CN103633099B (zh) | 2004-06-04 | 2016-09-28 | 伊利诺伊大学评议会 | 可拉伸半导体元件、可拉伸电路及其制造方法 |
| WO2006053218A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pressure control system in a photovoltaic substrate deposition |
| EP1809786A2 (en) * | 2004-11-10 | 2007-07-25 | Daystar Technologies, Inc. | Method and apparatus for forming a thin-film solar cell using a continuous process |
| FR2879821B1 (fr) * | 2004-12-21 | 2007-06-08 | Solaforce Soc Par Actions Simp | Procede de fabrication de cellules photovoltaiques |
| US20070221268A1 (en) * | 2006-03-21 | 2007-09-27 | Hasch Bruce M | Encapsulants for electronic components |
| TWI438827B (zh) * | 2006-09-20 | 2014-05-21 | Univ Illinois | 用於製造可印刷半導體結構、裝置及裝置元件的脫離對策 |
| CA2568136C (en) * | 2006-11-30 | 2008-07-29 | Tenxc Wireless Inc. | Butler matrix implementation |
| AT504680B1 (de) * | 2006-12-20 | 2009-06-15 | 3S Swiss Solar Systems Ag | Verfahren und vorrichtung zum herstellen laminierter solarmodule |
| WO2008080160A1 (en) * | 2006-12-22 | 2008-07-03 | Advent Solar, Inc. | Interconnect technologies for back contact solar cells and modules |
| US7972875B2 (en) | 2007-01-17 | 2011-07-05 | The Board Of Trustees Of The University Of Illinois | Optical systems fabricated by printing-based assembly |
| WO2009064870A2 (en) * | 2007-11-13 | 2009-05-22 | Advent Solar, Inc. | Selective emitter and texture processes for back contact solar cells |
| KR20110008284A (ko) * | 2008-04-29 | 2011-01-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 모놀리식 모듈 어셈블리 기술들을 이용하여 제조된 광전지 모듈들 |
| EP2349440B1 (en) | 2008-10-07 | 2019-08-21 | Mc10, Inc. | Catheter balloon having stretchable integrated circuitry and sensor array |
| US8372726B2 (en) | 2008-10-07 | 2013-02-12 | Mc10, Inc. | Methods and applications of non-planar imaging arrays |
| US8097926B2 (en) | 2008-10-07 | 2012-01-17 | Mc10, Inc. | Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy |
| US8886334B2 (en) | 2008-10-07 | 2014-11-11 | Mc10, Inc. | Systems, methods, and devices using stretchable or flexible electronics for medical applications |
| US8389862B2 (en) | 2008-10-07 | 2013-03-05 | Mc10, Inc. | Extremely stretchable electronics |
| KR20110114577A (ko) * | 2008-12-17 | 2011-10-19 | 알타 디바이씨즈, 인크. | 테이프-기반 에피택셜 리프트 오프 장치 및 방법 |
| TWI671811B (zh) | 2009-05-12 | 2019-09-11 | 美國伊利諾大學理事會 | 用於可變形及半透明顯示器之超薄微刻度無機發光二極體之印刷總成 |
| US20110030773A1 (en) * | 2009-08-06 | 2011-02-10 | Alliance For Sustainable Energy, Llc | Photovoltaic cell with back-surface reflectivity scattering |
| US8466447B2 (en) | 2009-08-06 | 2013-06-18 | Alliance For Sustainable Energy, Llc | Back contact to film silicon on metal for photovoltaic cells |
| WO2011041727A1 (en) | 2009-10-01 | 2011-04-07 | Mc10, Inc. | Protective cases with integrated electronics |
| US10441185B2 (en) | 2009-12-16 | 2019-10-15 | The Board Of Trustees Of The University Of Illinois | Flexible and stretchable electronic systems for epidermal electronics |
| US9936574B2 (en) | 2009-12-16 | 2018-04-03 | The Board Of Trustees Of The University Of Illinois | Waterproof stretchable optoelectronics |
| JP6046491B2 (ja) | 2009-12-16 | 2016-12-21 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | コンフォーマル電子機器を使用した生体内での電気生理学 |
| US8759664B2 (en) | 2009-12-28 | 2014-06-24 | Hanergy Hi-Tech Power (Hk) Limited | Thin film solar cell strings |
| KR101724273B1 (ko) | 2010-03-17 | 2017-04-07 | 더 보드 오브 트러스티즈 오브 더 유니버시티 오브 일리노이 | 생체흡수성 기판 상 이식가능한 바이오의료 장치 |
| EP2395567B1 (en) | 2010-06-10 | 2018-10-03 | Solarwave AB | A method for producing a solar cell module |
| KR101648563B1 (ko) * | 2010-06-29 | 2016-08-16 | 한화테크윈 주식회사 | 그래핀 전사필름 제조방법 및 그래핀 전사필름 제조장치 |
| US9442285B2 (en) | 2011-01-14 | 2016-09-13 | The Board Of Trustees Of The University Of Illinois | Optical component array having adjustable curvature |
| WO2012158709A1 (en) | 2011-05-16 | 2012-11-22 | The Board Of Trustees Of The University Of Illinois | Thermally managed led arrays assembled by printing |
| KR102000302B1 (ko) | 2011-05-27 | 2019-07-15 | 엠씨10, 인크 | 전자, 광학, 및/또는 기계 장치 및 시스템, 그리고 이를 제조하기 위한 방법 |
| EP2713863B1 (en) | 2011-06-03 | 2020-01-15 | The Board of Trustees of the University of Illionis | Conformable actively multiplexed high-density surface electrode array for brain interfacing |
| KR101979354B1 (ko) | 2011-12-01 | 2019-08-29 | 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 | 프로그램 변형을 실행하도록 설계된 과도 장치 |
| JP2015521303A (ja) | 2012-03-30 | 2015-07-27 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシ | 表面への形状適合可能な付属物装着可能電子デバイス |
| US9385254B2 (en) | 2012-04-17 | 2016-07-05 | Hanergy Hi-Tech Power (Hk) Limited | Integrated thin film solar cell interconnection |
| US9171794B2 (en) | 2012-10-09 | 2015-10-27 | Mc10, Inc. | Embedding thin chips in polymer |
| WO2014117138A1 (en) | 2013-01-28 | 2014-07-31 | Global Solar Energy, Inc. | Photovoltaic interconnect systems, devices, and methods |
| JP2018524566A (ja) | 2015-06-01 | 2018-08-30 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | 代替的ｕｖセンシング手法 |
| MX2017015586A (es) | 2015-06-01 | 2018-08-23 | Univ Illinois | Sistemas electronicos miniaturizados con capacidades de energia inalambrica y comunicacion de campo cercano. |
| US10925543B2 (en) | 2015-11-11 | 2021-02-23 | The Board Of Trustees Of The University Of Illinois | Bioresorbable silicon electronics for transient implants |
| WO2018087420A1 (en) * | 2016-11-08 | 2018-05-17 | Nanovate Oy | A system and a method for producing continuous and monolithic graphene |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE622403A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | ||||
| US3969163A (en) * | 1974-09-19 | 1976-07-13 | Texas Instruments Incorporated | Vapor deposition method of forming low cost semiconductor solar cells including reconstitution of the reacted gases |
| DE2638270C2 (de) * | 1976-08-25 | 1983-01-27 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur Herstellung großflächiger, freitragender Platten aus Silicium |
| ES465638A1 (es) * | 1977-12-30 | 1978-10-01 | Complisa Sa | Procedimiento para la metalizacion especular de cualquier soporte en bandas y hojas. |
| GB2033355B (en) * | 1978-09-07 | 1982-05-06 | Standard Telephones Cables Ltd | Semiconductor processing |
| DE3000889C2 (de) * | 1980-01-11 | 1984-07-26 | Siemens AG, 1000 Berlin und 8000 München | Verwendung einer um zwei Rollen umlaufenden Metallfolie zum Stranggießen von amorphem Silizium |
| EP0506146A2 (en) * | 1980-04-10 | 1992-09-30 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material |
| US4323419A (en) * | 1980-05-08 | 1982-04-06 | Atlantic Richfield Company | Method for ribbon solar cell fabrication |
| US4410558A (en) * | 1980-05-19 | 1983-10-18 | Energy Conversion Devices, Inc. | Continuous amorphous solar cell production system |
| US4379020A (en) * | 1980-06-16 | 1983-04-05 | Massachusetts Institute Of Technology | Polycrystalline semiconductor processing |
| US4370288A (en) * | 1980-11-18 | 1983-01-25 | Motorola, Inc. | Process for forming self-supporting semiconductor film |
| US4419178A (en) * | 1981-06-19 | 1983-12-06 | Rode Daniel L | Continuous ribbon epitaxy |
| JPS5848473A (ja) * | 1981-09-17 | 1983-03-22 | Konishiroku Photo Ind Co Ltd | アモルフアスシリコン太陽電池の製造方法 |
| US4492181A (en) * | 1982-03-19 | 1985-01-08 | Sovonics Solar Systems | Apparatus for continuously producing tandem amorphous photovoltaic cells |
-
1985
- 1985-10-11 US US06/786,782 patent/US4663828A/en not_active Expired - Lifetime
-
1986
- 1986-09-25 IN IN849/DEL/86A patent/IN170221B/en unknown
- 1986-09-25 CA CA000519110A patent/CA1290719C/en not_active Expired - Lifetime
- 1986-10-02 EP EP86113552A patent/EP0218193B1/en not_active Expired - Lifetime
- 1986-10-02 ES ES198686113552T patent/ES2031812T3/es not_active Expired - Lifetime
- 1986-10-02 DE DE8686113552T patent/DE3685287D1/de not_active Expired - Lifetime
- 1986-10-02 AT AT86113552T patent/ATE76221T1/de not_active IP Right Cessation
- 1986-10-09 JP JP61241171A patent/JPH0746732B2/ja not_active Expired - Lifetime
-
1992
- 1992-05-18 GR GR920400974T patent/GR3004642T3/el unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP0218193A2 (en) | 1987-04-15 |
| ATE76221T1 (de) | 1992-05-15 |
| JPH0746732B2 (ja) | 1995-05-17 |
| GR3004642T3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-04-28 |
| ES2031812T3 (es) | 1993-01-01 |
| JPS6288372A (ja) | 1987-04-22 |
| EP0218193A3 (en) | 1989-05-10 |
| EP0218193B1 (en) | 1992-05-13 |
| IN170221B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-29 |
| DE3685287D1 (de) | 1992-06-17 |
| US4663828A (en) | 1987-05-12 |
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