CA1289270C - Plasma amplified photoelectron process endpoint detection apparatus - Google Patents

Plasma amplified photoelectron process endpoint detection apparatus

Info

Publication number
CA1289270C
CA1289270C CA000579536A CA579536A CA1289270C CA 1289270 C CA1289270 C CA 1289270C CA 000579536 A CA000579536 A CA 000579536A CA 579536 A CA579536 A CA 579536A CA 1289270 C CA1289270 C CA 1289270C
Authority
CA
Canada
Prior art keywords
plasma
generating
signal
excitation
item
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA000579536A
Other languages
English (en)
French (fr)
Inventor
John Howard Keller
Gary Stewart Selwyn
Jyothi Singh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1289270C publication Critical patent/CA1289270C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
CA000579536A 1987-12-09 1988-10-05 Plasma amplified photoelectron process endpoint detection apparatus Expired - Lifetime CA1289270C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US130,573 1987-12-09
US07/130,573 US4846920A (en) 1987-12-09 1987-12-09 Plasma amplified photoelectron process endpoint detection apparatus

Publications (1)

Publication Number Publication Date
CA1289270C true CA1289270C (en) 1991-09-17

Family

ID=22445312

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000579536A Expired - Lifetime CA1289270C (en) 1987-12-09 1988-10-05 Plasma amplified photoelectron process endpoint detection apparatus

Country Status (6)

Country Link
US (1) US4846920A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0320425B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH01171225A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BR (1) BR8806481A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1289270C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3879418T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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FR2656465B1 (fr) * 1989-12-21 1992-05-07 France Etat Procede de mesure des dimensions d'un espaceur.
US5160402A (en) * 1990-05-24 1992-11-03 Applied Materials, Inc. Multi-channel plasma discharge endpoint detection method
JP3016821B2 (ja) * 1990-06-15 2000-03-06 東京エレクトロン株式会社 プラズマ処理方法
US5198072A (en) * 1990-07-06 1993-03-30 Vlsi Technology, Inc. Method and apparatus for detecting imminent end-point when etching dielectric layers in a plasma etch system
US5302882A (en) * 1991-09-09 1994-04-12 Sematech, Inc. Low pass filter for plasma discharge
US5245794A (en) * 1992-04-09 1993-09-21 Advanced Micro Devices, Inc. Audio end point detector for chemical-mechanical polishing and method therefor
US5325019A (en) * 1992-08-21 1994-06-28 Sematech, Inc. Control of plasma process by use of harmonic frequency components of voltage and current
US5288367A (en) * 1993-02-01 1994-02-22 International Business Machines Corporation End-point detection
US5330610A (en) * 1993-05-28 1994-07-19 Martin Marietta Energy Systems, Inc. Method of digital epilaxy by externally controlled closed-loop feedback
US5824158A (en) * 1993-06-30 1998-10-20 Kabushiki Kaisha Kobe Seiko Sho Chemical vapor deposition using inductively coupled plasma and system therefor
JP3223661B2 (ja) * 1993-08-31 2001-10-29 ソニー株式会社 プラズマ堆積方法
US5576629A (en) * 1994-10-24 1996-11-19 Fourth State Technology, Inc. Plasma monitoring and control method and system
US5718511A (en) * 1995-06-30 1998-02-17 Lam Research Corporation Temperature mapping method
US5654796A (en) * 1995-12-22 1997-08-05 Lam Research Corporation Apparatus and method for mapping plasma characteristics
US5846373A (en) * 1996-06-28 1998-12-08 Lam Research Corporation Method for monitoring process endpoints in a plasma chamber and a process monitoring arrangement in a plasma chamber
US6104487A (en) * 1996-12-20 2000-08-15 Texas Instruments Incorporated Plasma etching with fast endpoint detector
US6034768A (en) * 1997-09-26 2000-03-07 Physical Sciences Inc. Induced breakdown spectroscopy detector system with controllable delay time
US5969805A (en) * 1997-11-04 1999-10-19 Micron Technology, Inc. Method and apparatus employing external light source for endpoint detection
US7102737B2 (en) * 1997-11-04 2006-09-05 Micron Technology, Inc. Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
US6704107B1 (en) 1997-11-04 2004-03-09 Micron Technology, Inc. Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light
US5993613A (en) * 1997-11-07 1999-11-30 Sierra Applied Sciences, Inc. Method and apparatus for periodic polarity reversal during an active state
US6071375A (en) * 1997-12-31 2000-06-06 Lam Research Corporation Gas purge protection of sensors and windows in a gas phase processing reactor
US6174407B1 (en) 1998-12-03 2001-01-16 Lsi Logic Corporation Apparatus and method for detecting an endpoint of an etching process by transmitting infrared light signals through a semiconductor wafer
US6136719A (en) * 1999-04-30 2000-10-24 Lsi Logic Corporation Method and arrangement for fabricating a semiconductor device
US6143667A (en) * 1999-06-28 2000-11-07 Micron Technology, Inc. Method and apparatus for using photoemission to determine the endpoint of an etch process
US6970700B1 (en) * 2000-01-31 2005-11-29 Eni Technology, Inc. Power delivery system
US6627464B2 (en) 2001-02-07 2003-09-30 Eni Technology, Inc. Adaptive plasma characterization system
US6587019B2 (en) * 2001-04-11 2003-07-01 Eni Technology, Inc. Dual directional harmonics dissipation system
JP2005531912A (ja) * 2002-07-03 2005-10-20 東京エレクトロン株式会社 半導体プラズマパラメータの非侵入性の測定と解析のための方法と装置
JP2005531931A (ja) * 2002-07-03 2005-10-20 東京エレクトロン株式会社 半導体プロセスパラメータの非侵入性の測定と解析のための方法と装置
US7020224B2 (en) * 2003-09-30 2006-03-28 Pulse—LINK, Inc. Ultra-wideband correlating receiver
US6980613B2 (en) * 2003-09-30 2005-12-27 Pulse-Link, Inc. Ultra-wideband correlating receiver
WO2009076568A2 (en) * 2007-12-13 2009-06-18 Lam Research Corporation Plasma unconfinement sensor and methods thereof
KR20110122664A (ko) * 2008-07-17 2011-11-10 베러티 인스트루먼트, 인코퍼레이티드 처리 시스템의 화학적 분석에 사용하기 위한 전자 빔 여기 장치
US9997325B2 (en) 2008-07-17 2018-06-12 Verity Instruments, Inc. Electron beam exciter for use in chemical analysis in processing systems
WO2010008598A1 (en) * 2008-07-17 2010-01-21 Verity Instruments, Inc. Electron beam exciter for use in chemical analysis in processing systems
WO2012048308A2 (en) 2010-10-08 2012-04-12 Photon Machines, Inc. Spark emission particle detector
US9909923B2 (en) * 2014-09-05 2018-03-06 Bwt Property, Inc. Laser induced breakdown spectroscopy (LIBS) apparatus based on high repetition rate pulsed laser
FR3058602B1 (fr) * 2016-11-08 2021-02-12 Centre Nat Rech Scient Circuit d'adaptation d'impedance entre un generateur et une charge a des frequences multiples, ensemble comportant un tel circuit et utlisation liee.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA686529A (en) * 1964-05-12 Beauzee Claude Method of manufacturing photo-electric semi-conductor devices
JPS6050923A (ja) * 1983-08-31 1985-03-22 Hitachi Ltd プラズマ表面処理方法
JPS60243958A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd イオンビ−ム装置
JPS6136A (ja) * 1984-06-09 1986-01-06 Maruzen Sekiyu Kagaku Kk ２．６−ジ−ｔｅｒｔ−ブチルフエノ−ルの製造方法
US4615761A (en) * 1985-03-15 1986-10-07 Hitachi, Ltd. Method of and apparatus for detecting an end point of plasma treatment
US4602981A (en) * 1985-05-06 1986-07-29 International Business Machines Corporation Monitoring technique for plasma etching
US4664769A (en) * 1985-10-28 1987-05-12 International Business Machines Corporation Photoelectric enhanced plasma glow discharge system and method including radiation means
US4675072A (en) * 1986-06-25 1987-06-23 International Business Machines Corporation Trench etch endpoint detection by LIF

Also Published As

Publication number Publication date
DE3879418D1 (de) 1993-04-22
EP0320425A2 (en) 1989-06-14
EP0320425A3 (en) 1990-03-07
EP0320425B1 (en) 1993-03-17
JPH0581168B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-11-11
JPH01171225A (ja) 1989-07-06
DE3879418T2 (de) 1993-09-23
BR8806481A (pt) 1989-08-22
US4846920A (en) 1989-07-11

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