CA1239807A - Catalytic combustion sensor - Google Patents
Catalytic combustion sensorInfo
- Publication number
- CA1239807A CA1239807A CA000480853A CA480853A CA1239807A CA 1239807 A CA1239807 A CA 1239807A CA 000480853 A CA000480853 A CA 000480853A CA 480853 A CA480853 A CA 480853A CA 1239807 A CA1239807 A CA 1239807A
- Authority
- CA
- Canada
- Prior art keywords
- support
- heater film
- film
- substrate
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007084 catalytic combustion reaction Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 239000003054 catalyst Substances 0.000 claims abstract description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000009792 diffusion process Methods 0.000 claims abstract description 7
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052737 gold Inorganic materials 0.000 claims abstract description 4
- 239000010931 gold Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 16
- 238000003754 machining Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 13
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims 4
- 239000011241 protective layer Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 54
- 239000000463 material Substances 0.000 abstract description 31
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 24
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 5
- 235000010269 sulphur dioxide Nutrition 0.000 abstract description 4
- 239000004291 sulphur dioxide Substances 0.000 abstract description 4
- -1 platinum group compound Chemical class 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000001273 butane Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3416657 | 1984-05-05 | ||
| DEP3416657.2 | 1984-05-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1239807A true CA1239807A (en) | 1988-08-02 |
Family
ID=6235028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000480853A Expired CA1239807A (en) | 1984-05-05 | 1985-05-06 | Catalytic combustion sensor |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4703555A (OSRAM) |
| JP (1) | JPS60243549A (OSRAM) |
| CA (1) | CA1239807A (OSRAM) |
| GB (1) | GB2158586B (OSRAM) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2179748B (en) * | 1985-08-20 | 1989-09-06 | Sharp Kk | Thermal flow sensor |
| GB2195449B (en) * | 1986-09-26 | 1991-02-13 | Thorn Emi Protech Limited | Heat detecting unit |
| FI82774C (fi) * | 1988-06-08 | 1991-04-10 | Vaisala Oy | Integrerad uppvaermbar sensor. |
| DE3844023A1 (de) * | 1988-12-27 | 1990-06-28 | Hartmann & Braun Ag | Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung |
| CN1019331B (zh) * | 1989-08-11 | 1992-12-02 | 法国煤矿公司 | 薄膜细丝型传感器及其制造方法和应用 |
| GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
| DE4020383C2 (de) * | 1990-06-27 | 1999-04-01 | Bosch Gmbh Robert | Verfahren zum Schutz von Katalysatoren für die Abgasreinigung sowie Wärmetönungssensor zur Durchführung des Verfahrens |
| KR100261783B1 (ko) * | 1990-11-26 | 2000-07-15 | 다나까 세이이찌로 | 연료 혼합물 연소를 위한 다단공정 |
| US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
| EP0722565B1 (en) * | 1993-10-08 | 1999-05-19 | Microchip (Proprietary) Limited | A catalytic gas sensor |
| DE4400838A1 (de) * | 1994-01-14 | 1995-07-20 | Smt & Hybrid Gmbh | Gassensorchip und Verfahren zu dessen Herstellung |
| JPH0894561A (ja) * | 1994-09-26 | 1996-04-12 | Fuji Electric Co Ltd | ガスセンサおよびその製造方法 |
| US5533393A (en) * | 1995-01-13 | 1996-07-09 | Honeywell Inc. | Determination of dew point or absolute humidity |
| TW366417B (en) * | 1997-10-27 | 1999-08-11 | Nat Science Council | Integrated high-performance gas sensor and the manufacturing method |
| US6026639A (en) | 1997-11-03 | 2000-02-22 | Engelhard Corporation | Apparatus and method for diagnosis of catalyst performance |
| US6744346B1 (en) | 1998-02-27 | 2004-06-01 | Micron Technology, Inc. | Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece |
| US6229322B1 (en) * | 1998-08-21 | 2001-05-08 | Micron Technology, Inc. | Electronic device workpiece processing apparatus and method of communicating signals within an electronic device workpiece processing apparatus |
| US6967497B1 (en) * | 1998-08-21 | 2005-11-22 | Micron Technology, Inc. | Wafer processing apparatuses and electronic device workpiece processing apparatuses |
| US7109842B1 (en) * | 1998-12-07 | 2006-09-19 | Honeywell International Inc. | Robust fluid flow and property microsensor made of optimal material |
| US6794981B2 (en) | 1998-12-07 | 2004-09-21 | Honeywell International Inc. | Integratable-fluid flow and property microsensor assembly |
| US6184773B1 (en) * | 1998-12-07 | 2001-02-06 | Honeywell Inc. | Rugged fluid flow and property microsensor |
| US6114943A (en) * | 1999-05-26 | 2000-09-05 | Ut-Battelle, L.L.C. | Resistive hydrogen sensing element |
| WO2003036225A1 (en) * | 2001-10-26 | 2003-05-01 | University Of Rochester | Method for biomolecular sensing and system thereof |
| JP4115482B2 (ja) * | 2005-02-22 | 2008-07-09 | 日本特殊陶業株式会社 | ガスセンサ |
| US7972865B2 (en) * | 2008-08-26 | 2011-07-05 | Ut-Battelle, Llc | Sensor for detecting and differentiating chemical analytes |
| DE102013218840A1 (de) | 2013-09-19 | 2015-03-19 | Robert Bosch Gmbh | Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4171477A (en) * | 1976-03-16 | 1979-10-16 | International Business Machines Corporation | Micro-surface welding |
| JPS52122192A (en) * | 1976-04-07 | 1977-10-14 | Matsushita Electric Ind Co Ltd | Combustible gas detecting element |
| US4397702A (en) * | 1980-01-09 | 1983-08-09 | Johnson Controls, Inc. | Fabrication of non-conductive charged sensing probe unit |
| JPS574545A (en) * | 1980-06-10 | 1982-01-11 | Ricoh Co Ltd | Electric heater |
| JPS5821156A (ja) * | 1981-07-30 | 1983-02-07 | Kamiya Hiroshi | ガスセンサ |
-
1985
- 1985-04-24 JP JP60086631A patent/JPS60243549A/ja active Granted
- 1985-05-02 GB GB08511148A patent/GB2158586B/en not_active Expired
- 1985-05-06 CA CA000480853A patent/CA1239807A/en not_active Expired
- 1985-06-28 US US06/750,529 patent/US4703555A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB2158586A (en) | 1985-11-13 |
| JPS60243549A (ja) | 1985-12-03 |
| JPH0375061B2 (OSRAM) | 1991-11-28 |
| GB2158586B (en) | 1988-06-08 |
| US4703555A (en) | 1987-11-03 |
| GB8511148D0 (en) | 1985-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |