CA1179036A - Method and apparatus for detecting surface defects in mechanical workpieces - Google Patents
Method and apparatus for detecting surface defects in mechanical workpiecesInfo
- Publication number
- CA1179036A CA1179036A CA000395907A CA395907A CA1179036A CA 1179036 A CA1179036 A CA 1179036A CA 000395907 A CA000395907 A CA 000395907A CA 395907 A CA395907 A CA 395907A CA 1179036 A CA1179036 A CA 1179036A
- Authority
- CA
- Canada
- Prior art keywords
- light
- spatial
- transparent
- layer
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims description 13
- 230000001427 coherent effect Effects 0.000 claims abstract description 34
- 238000009826 distribution Methods 0.000 claims abstract description 24
- 239000011159 matrix material Substances 0.000 claims abstract description 18
- 230000010287 polarization Effects 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 28
- 238000001514 detection method Methods 0.000 abstract 2
- 230000000875 corresponding effect Effects 0.000 description 9
- 230000005855 radiation Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 238000010422 painting Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 230000005697 Pockels effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT67187-A/81 | 1981-02-10 | ||
| IT67187/81A IT1143380B (it) | 1981-02-10 | 1981-02-10 | Procedimento e dispositivo per il rilevamento di difetti superficiali di pezzi meccanici in particolare di pezzi a superficie curva |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1179036A true CA1179036A (en) | 1984-12-04 |
Family
ID=11300313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000395907A Expired CA1179036A (en) | 1981-02-10 | 1982-02-10 | Method and apparatus for detecting surface defects in mechanical workpieces |
Country Status (6)
| Country | Link |
|---|---|
| CA (1) | CA1179036A (enrdf_load_stackoverflow) |
| DE (2) | DE3204295A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2499718A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2095398B (enrdf_load_stackoverflow) |
| IT (1) | IT1143380B (enrdf_load_stackoverflow) |
| SE (1) | SE448030B (enrdf_load_stackoverflow) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58219441A (ja) * | 1982-06-15 | 1983-12-20 | Hajime Sangyo Kk | 凸面体の表面欠陥検査装置 |
| GB2133871A (en) * | 1982-12-23 | 1984-08-01 | Austin Rover Group | Apparatus for a method of inspecting automotive components |
| US4920385A (en) * | 1984-02-14 | 1990-04-24 | Diffracto Ltd. | Panel surface flaw inspection |
| US4629319A (en) * | 1984-02-14 | 1986-12-16 | Diffracto Ltd. | Panel surface flaw inspection |
| GB2159271B (en) * | 1984-04-27 | 1988-05-18 | Nissan Motor | Surface flaw detecting method and apparatus |
| US5206700A (en) * | 1985-03-14 | 1993-04-27 | Diffracto, Ltd. | Methods and apparatus for retroreflective surface inspection and distortion measurement |
| JPH0682102B2 (ja) * | 1987-02-27 | 1994-10-19 | 三菱電機株式会社 | パターン欠陥検査装置及びパターン欠陥検査方法 |
| US5168322A (en) * | 1991-08-19 | 1992-12-01 | Diffracto Ltd. | Surface inspection using retro-reflective light field |
| US5225890A (en) * | 1991-10-28 | 1993-07-06 | Gencorp Inc. | Surface inspection apparatus and method |
| DE4219691A1 (de) * | 1992-06-16 | 1993-12-23 | Siemens Ag | Meßvorrichtung zur Bestimmung der Richtung der Polarisationsebene von linear polarisiertem Licht |
| RU2167470C2 (ru) * | 1999-04-13 | 2001-05-20 | Научно-исследовательский институт измерительных систем | Способ контроля дефектности диэлектрических пленок |
| RU2179351C2 (ru) * | 2000-02-14 | 2002-02-10 | Научно-исследовательский институт измерительных систем | Способ контроля дефектности диэлектрических пленок |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2311287A1 (fr) * | 1975-05-12 | 1976-12-10 | Bertin & Cie | Procede et dispositif optique de mesure des mouvements ondulatoires d'une etendue liquide |
-
1981
- 1981-02-10 IT IT67187/81A patent/IT1143380B/it active
-
1982
- 1982-02-08 GB GB8203572A patent/GB2095398B/en not_active Expired
- 1982-02-08 SE SE8200712A patent/SE448030B/sv not_active IP Right Cessation
- 1982-02-09 FR FR8202093A patent/FR2499718A1/fr active Granted
- 1982-02-09 DE DE19823204295 patent/DE3204295A1/de not_active Ceased
- 1982-02-09 DE DE8203330U patent/DE8203330U1/de not_active Expired
- 1982-02-10 CA CA000395907A patent/CA1179036A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE8200712L (sv) | 1982-08-11 |
| SE448030B (sv) | 1987-01-12 |
| GB2095398A (en) | 1982-09-29 |
| FR2499718B1 (enrdf_load_stackoverflow) | 1985-04-26 |
| IT8167187A0 (it) | 1981-02-10 |
| DE3204295A1 (de) | 1982-08-19 |
| GB2095398B (en) | 1984-08-08 |
| FR2499718A1 (fr) | 1982-08-13 |
| DE8203330U1 (de) | 1985-05-23 |
| IT1143380B (it) | 1986-10-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5355213A (en) | Inspection system for detecting surface flaws | |
| US3614232A (en) | Pattern defect sensing using error free blocking spacial filter | |
| CA1179036A (en) | Method and apparatus for detecting surface defects in mechanical workpieces | |
| US4448527A (en) | Method and apparatus for detecting surface defects in mechanical workpieces | |
| US5805278A (en) | Particle detection method and apparatus | |
| US5627638A (en) | Method and apparatus for detecting defects in lenses | |
| EP0174939B2 (en) | Panel surface flaw inspection | |
| US7180084B2 (en) | Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering | |
| JP3452141B2 (ja) | 表面検査のための適応型空間フィルタ | |
| US5659390A (en) | Method and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patterns | |
| KR960008272A (ko) | 용기 마무리 치수 파라미터의 광학적 검사 | |
| KR20010034323A (ko) | 광학적 검사 방법 및 장치 | |
| JPS58122411A (ja) | 基板上の被覆における不規則を検出する方法及び装置 | |
| US3612702A (en) | Web defect determination by laser beam irradiation and reflected light examination | |
| US20030218740A1 (en) | System and method for imaging contamination on a surface | |
| KR970000781B1 (ko) | 이물 검사 장치 | |
| JPS6330570B2 (enrdf_load_stackoverflow) | ||
| US5880843A (en) | Apparatus and method for determining the optical distortion of a transparent substrate | |
| GB1328877A (en) | Apparatus and method for optically inspecting the physical condition of a surface | |
| US7528940B2 (en) | System and method for inspecting an object using an acousto-optic device | |
| CN208156292U (zh) | 一种光学元件体散射缺陷探测装置 | |
| JPH0792236A (ja) | 基板表面の電圧分布の検査装置 | |
| EP0777850A1 (en) | Integral field lens illumination for video inspection | |
| JPS6423144A (en) | Method for detecting flaw in thin film layer of crystal substrate | |
| JPH09218162A (ja) | 表面欠陥検査装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEC | Expiry (correction) | ||
| MKEX | Expiry |