CA1161295A - Dispositif d'imagerie a semiconducteur avec filtre couleur a couche barriere photoreticulable - Google Patents
Dispositif d'imagerie a semiconducteur avec filtre couleur a couche barriere photoreticulableInfo
- Publication number
- CA1161295A CA1161295A CA000370478A CA370478A CA1161295A CA 1161295 A CA1161295 A CA 1161295A CA 000370478 A CA000370478 A CA 000370478A CA 370478 A CA370478 A CA 370478A CA 1161295 A CA1161295 A CA 1161295A
- Authority
- CA
- Canada
- Prior art keywords
- dye
- polymer
- layer
- radiation
- islands
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 35
- 230000004888 barrier function Effects 0.000 title abstract description 12
- 239000000203 mixture Substances 0.000 claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 238000004043 dyeing Methods 0.000 claims abstract description 6
- 229920000642 polymer Polymers 0.000 claims description 100
- 230000005855 radiation Effects 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 33
- 239000011347 resin Substances 0.000 claims description 25
- 229920005989 resin Polymers 0.000 claims description 25
- -1 alkali metal sulfonate Chemical class 0.000 claims description 21
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 claims description 20
- 229920000554 ionomer Polymers 0.000 claims description 18
- 239000002904 solvent Substances 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 229920000728 polyester Polymers 0.000 claims description 11
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 10
- 125000003118 aryl group Chemical group 0.000 claims description 10
- 230000002209 hydrophobic effect Effects 0.000 claims description 9
- 125000000129 anionic group Chemical group 0.000 claims description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 150000001450 anions Chemical class 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 150000001768 cations Chemical class 0.000 claims description 4
- 229920006037 cross link polymer Polymers 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 229910052729 chemical element Inorganic materials 0.000 claims description 3
- BLPUXJIIRIWMSQ-UHFFFAOYSA-N 2-cinnamylidenepropanedioic acid Chemical compound OC(=O)C(C(O)=O)=CC=CC1=CC=CC=C1 BLPUXJIIRIWMSQ-UHFFFAOYSA-N 0.000 claims description 2
- ZFCNOKDRWHSHNR-UHFFFAOYSA-N 3-[2-(2-carboxyethenyl)phenyl]prop-2-enoic acid Chemical compound OC(=O)C=CC1=CC=CC=C1C=CC(O)=O ZFCNOKDRWHSHNR-UHFFFAOYSA-N 0.000 claims description 2
- 125000002877 alkyl aryl group Chemical group 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 2
- 125000004429 atom Chemical group 0.000 claims description 2
- 125000004122 cyclic group Chemical group 0.000 claims description 2
- ZSCAFJYAQAGJBT-UHFFFAOYSA-N cyclohexa-2,4-diene-1,1-dicarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CC=CC=C1 ZSCAFJYAQAGJBT-UHFFFAOYSA-N 0.000 claims description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 2
- 125000006353 oxyethylene group Chemical group 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- RVUCJDMRTJONCF-UHFFFAOYSA-N sodium;bis[(3-carboxyphenyl)sulfonyl]azanide Chemical compound [Na+].OC(=O)C1=CC=CC(S(=O)(=O)[N-]S(=O)(=O)C=2C=C(C=CC=2)C(O)=O)=C1 RVUCJDMRTJONCF-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 88
- 239000000975 dye Substances 0.000 description 28
- 235000012431 wafers Nutrition 0.000 description 21
- 229910052709 silver Inorganic materials 0.000 description 14
- 239000004332 silver Substances 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- 239000000020 Nitrocellulose Substances 0.000 description 12
- FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 12
- 238000003491 array Methods 0.000 description 12
- 229940079938 nitrocellulose Drugs 0.000 description 12
- 229920001220 nitrocellulos Polymers 0.000 description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- 108010010803 Gelatin Proteins 0.000 description 8
- 229920000159 gelatin Polymers 0.000 description 8
- 239000008273 gelatin Substances 0.000 description 8
- 235000019322 gelatine Nutrition 0.000 description 8
- 235000011852 gelatine desserts Nutrition 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 230000000996 additive effect Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 150000007513 acids Chemical class 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 150000002009 diols Chemical class 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012954 diazonium Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- YIMQCDZDWXUDCA-UHFFFAOYSA-N [4-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCC(CO)CC1 YIMQCDZDWXUDCA-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 239000001045 blue dye Substances 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical class [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- 238000002386 leaching Methods 0.000 description 2
- 125000005647 linker group Chemical group 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- QLAJNZSPVITUCQ-UHFFFAOYSA-N 1,3,2-dioxathietane 2,2-dioxide Chemical compound O=S1(=O)OCO1 QLAJNZSPVITUCQ-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- OPELWUSJOIBVJS-UHFFFAOYSA-N 3,3'-spirobi[1,2-dihydroindene] Chemical compound C12=CC=CC=C2CCC11C2=CC=CC=C2CC1 OPELWUSJOIBVJS-UHFFFAOYSA-N 0.000 description 1
- 102000009027 Albumins Human genes 0.000 description 1
- 108010088751 Albumins Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920001634 Copolyester Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 241000027294 Fusi Species 0.000 description 1
- 229920000084 Gum arabic Polymers 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FQORROGUIFBEFC-UHFFFAOYSA-N OC(=O)C1=CC([Na])=CC(C(O)=O)=C1S(O)(=O)=O Chemical compound OC(=O)C1=CC([Na])=CC(C(O)=O)=C1S(O)(=O)=O FQORROGUIFBEFC-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 241000978776 Senegalia senegal Species 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000000205 acacia gum Substances 0.000 description 1
- 235000010489 acacia gum Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229940050528 albumin Drugs 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- 125000001142 dicarboxylic acid group Chemical group 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- YMWUJEATGCHHMB-UHFFFAOYSA-N dichloromethane Substances ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- QYGWZBFQWUBYAT-UHFFFAOYSA-N ethyl 3-[4-(3-ethoxy-3-oxoprop-1-enyl)phenyl]prop-2-enoate Chemical compound CCOC(=O)C=CC1=CC=C(C=CC(=O)OCC)C=C1 QYGWZBFQWUBYAT-UHFFFAOYSA-N 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 125000003010 ionic group Chemical group 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QQVIHTHCMHWDBS-UHFFFAOYSA-L isophthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC(C([O-])=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-L 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 239000001044 red dye Substances 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 230000003381 solubilizing effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US127,605 | 1980-03-06 | ||
| US06/127,605 US4315978A (en) | 1980-03-06 | 1980-03-06 | Solid-state color imaging device having a color filter array using a photocrosslinkable barrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1161295A true CA1161295A (fr) | 1984-01-31 |
Family
ID=22430963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000370478A Expired CA1161295A (fr) | 1980-03-06 | 1981-02-10 | Dispositif d'imagerie a semiconducteur avec filtre couleur a couche barriere photoreticulable |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4315978A (fr) |
| EP (1) | EP0035886B1 (fr) |
| JP (1) | JPS56140658A (fr) |
| CA (1) | CA1161295A (fr) |
| DE (1) | DE3173045D1 (fr) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8105071A (nl) * | 1981-11-10 | 1983-06-01 | Philips Nv | Kleurenbeeldopneeminrichting. |
| JPS58134611A (ja) * | 1982-02-04 | 1983-08-10 | Konishiroku Photo Ind Co Ltd | フイルタ−色要素および多色光学フイルタ− |
| JPS58168017A (ja) * | 1982-03-29 | 1983-10-04 | Mitsubishi Electric Corp | 固体撮像素子 |
| EP0090865A1 (fr) * | 1982-04-02 | 1983-10-12 | Polaroid Corporation | Procédé de fabrication d'un dispositif, à l'état solide, pour l'obtention d'images en couleurs |
| JPS59166454U (ja) * | 1983-04-20 | 1984-11-08 | 三洋電機株式会社 | 半導体受光装置 |
| JPS6058668A (ja) * | 1983-09-12 | 1985-04-04 | Matsushita Electric Ind Co Ltd | カラ−フィルタ−の製造方法 |
| CA1293879C (fr) * | 1986-06-20 | 1992-01-07 | Laurel Jean Pace | Reseaux de filtres couleur |
| KR960005891B1 (ko) * | 1987-01-12 | 1996-05-03 | 브루어 사이언스, 인코포레이티드 | 마이크로일렉트로닉스용 광 필터 |
| US4808510A (en) * | 1987-08-20 | 1989-02-28 | Eastman Kodak Company | Photographic element and patternable mordant composition |
| US4876167A (en) * | 1987-08-20 | 1989-10-24 | Eastman Kodak Company | Color filter array containing a photocrosslinked polymeric mordant |
| US4876166A (en) * | 1988-05-19 | 1989-10-24 | Eastman Kodak Company | Color filter array |
| US4942103A (en) * | 1988-06-24 | 1990-07-17 | Eastman Kodak Company | Solid state color imaging sensor having a color filter array |
| US4892616A (en) * | 1988-10-28 | 1990-01-09 | Eastman Kodak Company | Process for stripping color filter arrays from substrates |
| JPH04260050A (ja) * | 1990-10-24 | 1992-09-16 | Xerox Corp | フィルター付き感光体 |
| US5266425A (en) * | 1992-05-29 | 1993-11-30 | Itt Corporation | Self-aligned process for applying color filters to electronic output color image intensifiers |
| US5510215A (en) * | 1995-01-25 | 1996-04-23 | Eastman Kodak Company | Method for patterning multilayer dielectric color filter |
| US5708264A (en) * | 1995-11-07 | 1998-01-13 | Eastman Kodak Company | Planar color filter array for CCDs from dyed and mordant layers |
| US5677202A (en) | 1995-11-20 | 1997-10-14 | Eastman Kodak Company | Method for making planar color filter array for image sensors with embedded color filter arrays |
| US6111247A (en) * | 1997-12-08 | 2000-08-29 | Intel Corporation | Passivation protection of sensor devices having a color filter on non-sensor portion |
| US6207947B1 (en) * | 1998-03-18 | 2001-03-27 | Intel Corporation | Using DUV curing to form a protective coating for color filters |
| US6642963B1 (en) * | 1998-06-29 | 2003-11-04 | Intel Corporation | Silylation layer for optical devices |
| US6297071B1 (en) | 1998-07-22 | 2001-10-02 | Eastman Kodak Company | Method of making planar image sensor color filter arrays |
| US6198093B1 (en) * | 1998-11-19 | 2001-03-06 | Xerox Corporation | Electro optical devices with reduced filter thinning on the edge pixel photosites and method of producing same |
| US6201293B1 (en) | 1998-11-19 | 2001-03-13 | Xerox Corporation | Electro optical devices with reduced filter thinning on the edge pixel photosites and method of producing same |
| US6456793B1 (en) | 2000-08-03 | 2002-09-24 | Eastman Kodak Company | Method and apparatus for a color scannerless range imaging system |
| US6998207B2 (en) * | 2003-04-03 | 2006-02-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | High performance color filter process for image sensor |
| US7502058B2 (en) * | 2003-06-09 | 2009-03-10 | Micron Technology, Inc. | Imager with tuned color filter |
| US20060159843A1 (en) * | 2005-01-18 | 2006-07-20 | Applied Materials, Inc. | Method of substrate treatment for manufacturing of color filters by inkjet printing systems |
| US9683890B2 (en) | 2015-06-30 | 2017-06-20 | Semiconductor Components Industries, Llc | Image sensor pixels with conductive bias grids |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3284208A (en) * | 1963-04-30 | 1966-11-08 | Polaroid Corp | Photographic products and processes for the production thereof |
| US3833369A (en) * | 1972-12-29 | 1974-09-03 | Polaroid Corp | Color diffusion transfer films and processes with polymer encapsulated reflecting agents |
| US3929489A (en) * | 1973-09-14 | 1975-12-30 | Eastman Kodak Co | Lithographic plates having radiation sensitive elements developable with aqueous alcohol |
| US3898088A (en) * | 1973-09-26 | 1975-08-05 | Eastman Kodak Co | Photographic elements containing polymeric mordants |
| FR2406230A1 (fr) * | 1977-10-11 | 1979-05-11 | Eastman Kodak Co | Composition photosensible et produi |
| JPS6033244B2 (ja) * | 1978-05-10 | 1985-08-01 | 大日本印刷株式会社 | カラ−ストライプフイルタ−の製造方法 |
| JPS54164147A (en) * | 1978-06-16 | 1979-12-27 | Dainippon Printing Co Ltd | Method of manufacturing color stripe filter |
| JPS556342A (en) * | 1978-06-28 | 1980-01-17 | Fuji Photo Film Co Ltd | Production of multicolor optical filter |
| JPS6046401B2 (ja) * | 1979-02-26 | 1985-10-16 | 株式会社日立製作所 | 固体撮像素子の製造方法 |
-
1980
- 1980-03-06 US US06/127,605 patent/US4315978A/en not_active Expired - Lifetime
-
1981
- 1981-02-10 CA CA000370478A patent/CA1161295A/fr not_active Expired
- 1981-03-06 DE DE8181300944T patent/DE3173045D1/de not_active Expired
- 1981-03-06 JP JP3142481A patent/JPS56140658A/ja active Pending
- 1981-03-06 EP EP81300944A patent/EP0035886B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0035886A2 (fr) | 1981-09-16 |
| DE3173045D1 (en) | 1986-01-09 |
| US4315978A (en) | 1982-02-16 |
| EP0035886B1 (fr) | 1985-11-27 |
| EP0035886A3 (en) | 1983-09-14 |
| JPS56140658A (en) | 1981-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1161295A (fr) | Dispositif d'imagerie a semiconducteur avec filtre couleur a couche barriere photoreticulable | |
| US4357415A (en) | Method of making a solid-state color imaging device having a color filter array using a photocrosslinkable barrier | |
| US4672021A (en) | Contrast enhancement layer composition with naphthoquinone diazide, indicator dye and polymeric binder | |
| US4863827A (en) | Postive working multi-level photoresist | |
| US4808501A (en) | Method for manufacturing an optical filter | |
| JP2693472B2 (ja) | レジスト | |
| US6187506B1 (en) | Antireflective coating for photoresist compositions | |
| US5529888A (en) | Water-soluble film forming composition | |
| JPH11154742A (ja) | 固体撮像装置 | |
| KR20100111744A (ko) | 반사 방지 도료용 습식 현상가능한 중합체 바인더로서 스핀 보울 상용성 폴리암산 및/또는 이미드 | |
| JPH07111485B2 (ja) | カラーフィルターの製造方法 | |
| US5654202A (en) | Stabilization of a patterned planarizing layer for solid state imagers prior to color filter pattern formation | |
| US4777111A (en) | Photographic element with diazo contrast enhancement layer and method of producing image in underlying photoresist layer of element | |
| US4885232A (en) | High temperature post exposure baking treatment for positive photoresist compositions | |
| US3043695A (en) | Photographic films | |
| EP0327991A2 (fr) | Matériel photosensible pour l'enregistrement avec une couche barrière à base de polysulfone | |
| US5990269A (en) | Copolymer of vinylpyrrolidone and vinylimidazole | |
| US6171761B1 (en) | Resist pattern forming method utilizing multiple baking and partial development steps | |
| EP0366785B1 (fr) | Reseau de filtre couleur | |
| CA1149214A (fr) | Melanges a base de copolymere colloide-latex, hydrophiles, bichromates | |
| US5360693A (en) | Positive o-quinone diazide photoresist containing base copolymer utilizing monomer having anhydride function and further monomer that increases etch resistance | |
| WO1997023808A2 (fr) | Systeme de solvant mixte pour resines photosensibles positives | |
| JP2614064B2 (ja) | 固体カラー撮像素子 | |
| US5795700A (en) | Method for forming resist pattern with enhanced contrast film | |
| JP3315274B2 (ja) | レジストパターンの形成方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |