CA1159579A - Methode d'alignement automatique de masque - Google Patents

Methode d'alignement automatique de masque

Info

Publication number
CA1159579A
CA1159579A CA000416531A CA416531A CA1159579A CA 1159579 A CA1159579 A CA 1159579A CA 000416531 A CA000416531 A CA 000416531A CA 416531 A CA416531 A CA 416531A CA 1159579 A CA1159579 A CA 1159579A
Authority
CA
Canada
Prior art keywords
target
mask
wafer
alignment
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000416531A
Other languages
English (en)
Inventor
Daniel H. Berry
David A. Markle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/019,964 external-priority patent/US4353087A/en
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Priority to CA000416531A priority Critical patent/CA1159579A/fr
Application granted granted Critical
Publication of CA1159579A publication Critical patent/CA1159579A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CA000416531A 1979-03-12 1982-11-26 Methode d'alignement automatique de masque Expired CA1159579A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000416531A CA1159579A (fr) 1979-03-12 1982-11-26 Methode d'alignement automatique de masque

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/019,964 US4353087A (en) 1979-03-12 1979-03-12 Automatic mask alignment
US019,964 1979-03-12
CA000345271A CA1150418A (fr) 1979-03-12 1980-02-08 Alignement automatique de masques
CA000416531A CA1159579A (fr) 1979-03-12 1982-11-26 Methode d'alignement automatique de masque

Publications (1)

Publication Number Publication Date
CA1159579A true CA1159579A (fr) 1983-12-27

Family

ID=27166578

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000416531A Expired CA1159579A (fr) 1979-03-12 1982-11-26 Methode d'alignement automatique de masque

Country Status (1)

Country Link
CA (1) CA1159579A (fr)

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Legal Events

Date Code Title Description
MKEX Expiry
MKEX Expiry

Effective date: 20001227