CA1149192A - Pressure sensor assembly - Google Patents
Pressure sensor assemblyInfo
- Publication number
- CA1149192A CA1149192A CA000377807A CA377807A CA1149192A CA 1149192 A CA1149192 A CA 1149192A CA 000377807 A CA000377807 A CA 000377807A CA 377807 A CA377807 A CA 377807A CA 1149192 A CA1149192 A CA 1149192A
- Authority
- CA
- Canada
- Prior art keywords
- housing
- pedestal
- base
- glass
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000011521 glass Substances 0.000 claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 17
- 239000010703 silicon Substances 0.000 claims abstract description 17
- 239000000853 adhesive Substances 0.000 claims abstract description 16
- 230000001070 adhesive effect Effects 0.000 claims abstract description 16
- 238000012546 transfer Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims 3
- 229920006332 epoxy adhesive Polymers 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 3
- 239000004593 Epoxy Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 3
- 229920000728 polyester Polymers 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000035882 stress Effects 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000005401 pressed glass Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US186,238 | 1980-09-11 | ||
| US06/186,238 US4295117A (en) | 1980-09-11 | 1980-09-11 | Pressure sensor assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1149192A true CA1149192A (en) | 1983-07-05 |
Family
ID=22684166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000377807A Expired CA1149192A (en) | 1980-09-11 | 1981-05-19 | Pressure sensor assembly |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4295117A (enExample) |
| JP (1) | JPS5779419A (enExample) |
| AU (1) | AU540260B2 (enExample) |
| CA (1) | CA1149192A (enExample) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4411158A (en) * | 1981-04-14 | 1983-10-25 | Ametek, Inc. | Apparatus for sensing the condition of a fluid |
| FR2522813A1 (fr) * | 1982-03-03 | 1983-09-09 | Auxitrol | Tete de detection de niveau par effet hydrostatique avec protection |
| JPH061226B2 (ja) * | 1986-05-07 | 1994-01-05 | 日本電装株式会社 | 半導体圧力センサ |
| FR2599147B1 (fr) * | 1986-05-23 | 1989-03-31 | Otic Fischer & Porter | Cellule de contention d'un capteur de pression notamment en ceramique |
| US4721938A (en) * | 1986-12-22 | 1988-01-26 | Delco Electronics Corporation | Process for forming a silicon pressure transducer |
| US4850228A (en) * | 1987-05-27 | 1989-07-25 | Smc Corporation | Pressure meter |
| US4772217A (en) * | 1987-06-30 | 1988-09-20 | Augat Inc. | Pressure sensor connector system |
| US4756193A (en) * | 1987-09-11 | 1988-07-12 | Delco Electronics Corporation | Pressure sensor |
| US4850227A (en) * | 1987-12-22 | 1989-07-25 | Delco Electronics Corporation | Pressure sensor and method of fabrication thereof |
| US5125275A (en) * | 1991-06-19 | 1992-06-30 | Honeywell Inc. | Pressure sensor package |
| US5233871A (en) * | 1991-11-01 | 1993-08-10 | Delco Electronics Corporation | Hybrid accelerometer assembly |
| US5209122A (en) * | 1991-11-20 | 1993-05-11 | Delco Electronics Corporation | Pressurer sensor and method for assembly of same |
| US5257547A (en) * | 1991-11-26 | 1993-11-02 | Honeywell Inc. | Amplified pressure transducer |
| US5263241A (en) * | 1992-04-06 | 1993-11-23 | Delco Electronics Corporation | Apparatus useful in the manufacture of a pressure sensor assembly |
| JPH08233848A (ja) * | 1995-02-28 | 1996-09-13 | Mitsubishi Electric Corp | 半導体センサ |
| DE69629024T2 (de) * | 1995-04-28 | 2004-04-22 | Rosemount Inc., Eden Prairie | Druckwandler mit montageanordnung mit hochdruckisolator |
| WO1996034265A1 (en) * | 1995-04-28 | 1996-10-31 | Rosemount Inc. | Mounting assembly for a pressure transmitter |
| US5900530A (en) * | 1995-07-31 | 1999-05-04 | Motorola, Inc. | Method for testing pressure sensors |
| NO304328B1 (no) * | 1996-02-27 | 1998-11-30 | Nyfotek As | TrykkmÕler |
| DE19612964A1 (de) * | 1996-04-01 | 1997-10-02 | Bosch Gmbh Robert | Drucksensor und Verfahren zur Herstellung eines Drucksensors |
| US5938038A (en) * | 1996-08-02 | 1999-08-17 | Dial Tool Industries, Inc. | Parts carrier strip and apparatus for assembling parts in such a strip |
| US5763787A (en) * | 1996-09-05 | 1998-06-09 | Rosemont Inc. | Carrier assembly for fluid sensor |
| US5948991A (en) * | 1996-12-09 | 1999-09-07 | Denso Corporation | Semiconductor physical quantity sensor device having semiconductor sensor chip integrated with semiconductor circuit chip |
| DE19717348A1 (de) * | 1997-04-24 | 1998-10-29 | Siemens Ag | Verfahren zum Herstellen einer Sensorbaugruppe sowie Sensorbaugruppe |
| US6053049A (en) * | 1997-05-30 | 2000-04-25 | Motorola Inc. | Electrical device having atmospheric isolation |
| US5967328A (en) * | 1998-01-22 | 1999-10-19 | Dial Tool Industries, Inc. | Part carrier strip |
| DE19919716B4 (de) * | 1999-04-30 | 2005-11-03 | Conti Temic Microelectronic Gmbh | Mikroelektronische Baugruppe |
| US6782754B1 (en) | 2000-07-07 | 2004-08-31 | Rosemount, Inc. | Pressure transmitter for clean environments |
| DE10109083B4 (de) * | 2001-02-24 | 2006-07-13 | Conti Temic Microelectronic Gmbh | Elektronische Baugruppe |
| JP4127396B2 (ja) * | 2001-10-18 | 2008-07-30 | 株式会社日立製作所 | センサ装置 |
| WO2005068958A1 (en) * | 2004-01-05 | 2005-07-28 | Case Western Reserve University | Structure and method for packaging micro strain sensors |
| US7347099B2 (en) * | 2004-07-16 | 2008-03-25 | Rosemount Inc. | Pressure transducer with external heater |
| JP4680566B2 (ja) * | 2004-10-26 | 2011-05-11 | 本田技研工業株式会社 | 多軸力センサチップとこれを用いた多軸力センサ |
| JP4203051B2 (ja) * | 2005-06-28 | 2008-12-24 | 本田技研工業株式会社 | 力覚センサ |
| US7679033B2 (en) * | 2005-09-29 | 2010-03-16 | Rosemount Inc. | Process field device temperature control |
| US7589420B2 (en) * | 2006-06-06 | 2009-09-15 | Hewlett-Packard Development Company, L.P. | Print head with reduced bonding stress and method |
| US7779698B2 (en) * | 2007-11-08 | 2010-08-24 | Rosemount Inc. | Pressure sensor |
| US7819016B2 (en) * | 2009-03-03 | 2010-10-26 | Kuo-Liang Chen | Non-disposable and reusable air pressure gauge |
| US20110044064A1 (en) * | 2009-08-18 | 2011-02-24 | Chi-Hsien Hu | Flash light for a bicycle with the function of direction and elevation indication |
| DE102013217888B4 (de) | 2012-12-20 | 2024-07-04 | Continental Automotive Technologies GmbH | Elektronische Vorrichtung und Verfahren zur Herstellung einer elektronischen Vorrichtung |
| TWI795918B (zh) * | 2015-01-15 | 2023-03-11 | 美商Ｍｋｓ儀器公司 | 製造測量裝置之方法 |
| DE102015110259A1 (de) * | 2015-06-25 | 2016-12-29 | Endress + Hauser Gmbh + Co. Kg | Drucksensormodul Messanordnung mit einem Drucksensormodul |
| CN109075010B (zh) | 2016-05-02 | 2020-09-15 | 万机仪器公司 | 冷阴极电离真空计和测量压力的方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3697917A (en) * | 1971-08-02 | 1972-10-10 | Gen Electric | Semiconductor strain gage pressure transducer |
| NL7415668A (nl) * | 1974-12-02 | 1976-06-04 | Philips Nv | Drukopnemer. |
| US4019388A (en) * | 1976-03-11 | 1977-04-26 | Bailey Meter Company | Glass to metal seal |
| US4127840A (en) * | 1977-02-22 | 1978-11-28 | Conrac Corporation | Solid state force transducer |
| JPS54144187A (en) * | 1978-04-29 | 1979-11-10 | Hitachi Ltd | Semiconductor pressure converter |
-
1980
- 1980-09-11 US US06/186,238 patent/US4295117A/en not_active Expired - Lifetime
-
1981
- 1981-05-19 CA CA000377807A patent/CA1149192A/en not_active Expired
- 1981-08-19 AU AU74340/81A patent/AU540260B2/en not_active Expired
- 1981-09-11 JP JP56142556A patent/JPS5779419A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5779419A (en) | 1982-05-18 |
| JPH023130B2 (enExample) | 1990-01-22 |
| AU7434081A (en) | 1982-03-18 |
| US4295117A (en) | 1981-10-13 |
| AU540260B2 (en) | 1984-11-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |