CA1083261A - Method for making conduction-cooled circuit package - Google Patents
Method for making conduction-cooled circuit packageInfo
- Publication number
- CA1083261A CA1083261A CA285,782A CA285782A CA1083261A CA 1083261 A CA1083261 A CA 1083261A CA 285782 A CA285782 A CA 285782A CA 1083261 A CA1083261 A CA 1083261A
- Authority
- CA
- Canada
- Prior art keywords
- solder
- chip
- pad
- heat
- heat sink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 229910000679 solder Inorganic materials 0.000 claims abstract description 99
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 4
- 239000000956 alloy Substances 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 4
- 229910001369 Brass Inorganic materials 0.000 claims description 3
- 239000010951 brass Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 8
- 238000000151 deposition Methods 0.000 claims 4
- QGVYLCICHZYPJA-UHFFFAOYSA-N [Cr].[Cu].[Au] Chemical compound [Cr].[Cu].[Au] QGVYLCICHZYPJA-UHFFFAOYSA-N 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 abstract description 26
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract description 26
- 238000002844 melting Methods 0.000 abstract description 6
- 230000008018 melting Effects 0.000 abstract description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 239000004020 conductor Substances 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000001816 cooling Methods 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 230000005496 eutectics Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- -1 7 e.g. Inorganic materials 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 101100114417 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) con-13 gene Proteins 0.000 description 1
- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000009365 direct transmission Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- SWQJXJOGLNCZEY-NJFSPNSNSA-N helium-6 atom Chemical compound [6He] SWQJXJOGLNCZEY-NJFSPNSNSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000009428 plumbing Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001228 trophic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30105—Capacitance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/720,470 US4034468A (en) | 1976-09-03 | 1976-09-03 | Method for making conduction-cooled circuit package |
US72,470 | 1976-09-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1083261A true CA1083261A (en) | 1980-08-05 |
Family
ID=24894123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA285,782A Expired CA1083261A (en) | 1976-09-03 | 1977-08-30 | Method for making conduction-cooled circuit package |
Country Status (9)
Country | Link |
---|---|
US (1) | US4034468A (enrdf_load_stackoverflow) |
JP (1) | JPS5924541B2 (enrdf_load_stackoverflow) |
AR (1) | AR215906A1 (enrdf_load_stackoverflow) |
BR (1) | BR7705901A (enrdf_load_stackoverflow) |
CA (1) | CA1083261A (enrdf_load_stackoverflow) |
FR (1) | FR2363891A1 (enrdf_load_stackoverflow) |
GB (1) | GB1569452A (enrdf_load_stackoverflow) |
IT (1) | IT1143676B (enrdf_load_stackoverflow) |
MX (1) | MX145056A (enrdf_load_stackoverflow) |
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JPS55168098U (enrdf_load_stackoverflow) * | 1979-05-21 | 1980-12-03 | ||
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US4642889A (en) * | 1985-04-29 | 1987-02-17 | Amp Incorporated | Compliant interconnection and method therefor |
US5917707A (en) | 1993-11-16 | 1999-06-29 | Formfactor, Inc. | Flexible contact structure with an electrically conductive shell |
GB8628967D0 (en) * | 1986-12-03 | 1987-01-07 | Microelectronics & Computer | Pin-fin microchannel heat sink |
US4829020A (en) * | 1987-10-23 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Substrate solder barriers for semiconductor epilayer growth |
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US5313366A (en) * | 1992-08-12 | 1994-05-17 | International Business Machines Corporation | Direct chip attach module (DCAM) |
DE4326207A1 (de) * | 1992-10-06 | 1994-04-07 | Hewlett Packard Co | Mechanisch schwimmendes Mehr-Chip-Substrat |
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JPH06349989A (ja) * | 1992-12-21 | 1994-12-22 | Internatl Business Mach Corp <Ibm> | 熱伝達冷却装置 |
US5430611A (en) * | 1993-07-06 | 1995-07-04 | Hewlett-Packard Company | Spring-biased heat sink assembly for a plurality of integrated circuits on a substrate |
US5396403A (en) * | 1993-07-06 | 1995-03-07 | Hewlett-Packard Company | Heat sink assembly with thermally-conductive plate for a plurality of integrated circuits on a substrate |
US7073254B2 (en) | 1993-11-16 | 2006-07-11 | Formfactor, Inc. | Method for mounting a plurality of spring contact elements |
US20020053734A1 (en) | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
US5820014A (en) * | 1993-11-16 | 1998-10-13 | Form Factor, Inc. | Solder preforms |
KR100322177B1 (ko) | 1993-12-27 | 2002-05-13 | 이누이 도모지 | 내연기관용점화장치 |
US5548486A (en) * | 1994-01-21 | 1996-08-20 | International Business Machines Corporation | Pinned module |
JP2664878B2 (ja) * | 1994-01-31 | 1997-10-22 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 半導体チップパッケージおよびその製造方法 |
US5519363A (en) * | 1994-05-31 | 1996-05-21 | The Whitaker Corporation | Controlled impedance lines connected to optoelectronic devices |
US5469329A (en) * | 1994-08-08 | 1995-11-21 | Ford Motor Company | Printed circuit board with bi-metallic heat spreader |
US5878483A (en) * | 1995-06-01 | 1999-03-09 | International Business Machines Corporation | Hammer for forming bulges in an array of compliant pin blanks |
US5994152A (en) * | 1996-02-21 | 1999-11-30 | Formfactor, Inc. | Fabricating interconnects and tips using sacrificial substrates |
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JP3923258B2 (ja) * | 2001-01-17 | 2007-05-30 | 松下電器産業株式会社 | 電力制御系電子回路装置及びその製造方法 |
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US6504723B1 (en) * | 2001-11-15 | 2003-01-07 | Intel Corporation | Electronic assembly having solder thermal interface between a die substrate and a heat spreader |
US7473995B2 (en) * | 2002-03-25 | 2009-01-06 | Intel Corporation | Integrated heat spreader, heat sink or heat pipe with pre-attached phase change thermal interface material and method of making an electronic assembly |
US7846778B2 (en) * | 2002-02-08 | 2010-12-07 | Intel Corporation | Integrated heat spreader, heat sink or heat pipe with pre-attached phase change thermal interface material and method of making an electronic assembly |
US20040080033A1 (en) * | 2002-04-09 | 2004-04-29 | Advanced Semiconductor Engineering Inc. | Flip chip assembly and method for producing the same |
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US7164585B2 (en) * | 2003-03-31 | 2007-01-16 | Intel Corporation | Thermal interface apparatus, systems, and methods |
US7132746B2 (en) * | 2003-08-18 | 2006-11-07 | Delphi Technologies, Inc. | Electronic assembly with solder-bonded heat sink |
US7063127B2 (en) * | 2003-09-18 | 2006-06-20 | International Business Machines Corporation | Method and apparatus for chip-cooling |
DE102006001792B8 (de) * | 2006-01-12 | 2013-09-26 | Infineon Technologies Ag | Halbleitermodul mit Halbleiterchipstapel und Verfahren zur Herstellung desselben |
JP2007266150A (ja) * | 2006-03-28 | 2007-10-11 | Fujitsu Ltd | 熱伝導性接合材、半導体パッケージ、ヒートスプレッダ、半導体チップ、及び半導体チップとヒートスプレッダとを接合する接合方法 |
US7834442B2 (en) * | 2007-12-12 | 2010-11-16 | International Business Machines Corporation | Electronic package method and structure with cure-melt hierarchy |
JP4789997B2 (ja) * | 2008-11-20 | 2011-10-12 | 三菱電機株式会社 | 電子基板装置 |
JP5546889B2 (ja) * | 2010-02-09 | 2014-07-09 | 日本電産エレシス株式会社 | 電子部品ユニット及びその製造方法 |
US9831190B2 (en) | 2014-01-09 | 2017-11-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device package with warpage control structure |
CN203951677U (zh) * | 2014-05-19 | 2014-11-19 | 京东方科技集团股份有限公司 | 一种散热焊盘及印刷电路板 |
US11306578B2 (en) | 2018-04-16 | 2022-04-19 | Baker Hughes, A Ge Company, Llc | Thermal barrier for downhole flasked electronics |
US11033990B2 (en) * | 2018-11-29 | 2021-06-15 | Raytheon Company | Low cost approach for depositing solder and adhesives in a pattern for forming electronic assemblies |
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US3267341A (en) * | 1962-02-09 | 1966-08-16 | Hughes Aircraft Co | Double container arrangement for transistors |
GB1030540A (en) * | 1964-01-02 | 1966-05-25 | Gen Electric | Improvements in and relating to semi-conductor diodes |
US3430335A (en) * | 1965-06-08 | 1969-03-04 | Hughes Aircraft Co | Method of treating semiconductor devices or components |
US3429040A (en) * | 1965-06-18 | 1969-02-25 | Ibm | Method of joining a component to a substrate |
CA892844A (en) * | 1970-08-14 | 1972-02-08 | H. Hantusch Gerald | Semiconductor heat sink |
US3741292A (en) * | 1971-06-30 | 1973-06-26 | Ibm | Liquid encapsulated air cooled module |
US3972062A (en) * | 1973-10-04 | 1976-07-27 | Motorola, Inc. | Mounting assemblies for a plurality of transistor integrated circuit chips |
US3993123A (en) * | 1975-10-28 | 1976-11-23 | International Business Machines Corporation | Gas encapsulated cooling module |
-
1976
- 1976-09-03 US US05/720,470 patent/US4034468A/en not_active Expired - Lifetime
-
1977
- 1977-07-21 FR FR7723001A patent/FR2363891A1/fr active Granted
- 1977-07-26 JP JP52088907A patent/JPS5924541B2/ja not_active Expired
- 1977-08-05 GB GB32952/77A patent/GB1569452A/en not_active Expired
- 1977-08-30 IT IT27063/77A patent/IT1143676B/it active
- 1977-08-30 CA CA285,782A patent/CA1083261A/en not_active Expired
- 1977-09-02 MX MX170455A patent/MX145056A/es unknown
- 1977-09-02 AR AR269086A patent/AR215906A1/es active
- 1977-09-02 BR BR7705901A patent/BR7705901A/pt unknown
Also Published As
Publication number | Publication date |
---|---|
MX145056A (es) | 1982-01-04 |
IT1143676B (it) | 1986-10-22 |
US4034468A (en) | 1977-07-12 |
JPS5331967A (en) | 1978-03-25 |
AR215906A1 (es) | 1979-11-15 |
BR7705901A (pt) | 1978-06-27 |
FR2363891B1 (enrdf_load_stackoverflow) | 1980-01-04 |
FR2363891A1 (fr) | 1978-03-31 |
GB1569452A (en) | 1980-06-18 |
JPS5924541B2 (ja) | 1984-06-09 |
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