CA1075523A - Methode de conversion d'une couche photoresistante positive en image photoresistante negative - Google Patents

Methode de conversion d'une couche photoresistante positive en image photoresistante negative

Info

Publication number
CA1075523A
CA1075523A CA256,223A CA256223A CA1075523A CA 1075523 A CA1075523 A CA 1075523A CA 256223 A CA256223 A CA 256223A CA 1075523 A CA1075523 A CA 1075523A
Authority
CA
Canada
Prior art keywords
photoresist
layer
image
exposed
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA256,223A
Other languages
English (en)
Inventor
Holger Moritz
Gabor Paal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to CA256,223A priority Critical patent/CA1075523A/fr
Application granted granted Critical
Publication of CA1075523A publication Critical patent/CA1075523A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CA256,223A 1976-06-30 1976-06-30 Methode de conversion d'une couche photoresistante positive en image photoresistante negative Expired CA1075523A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA256,223A CA1075523A (fr) 1976-06-30 1976-06-30 Methode de conversion d'une couche photoresistante positive en image photoresistante negative

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA256,223A CA1075523A (fr) 1976-06-30 1976-06-30 Methode de conversion d'une couche photoresistante positive en image photoresistante negative

Publications (1)

Publication Number Publication Date
CA1075523A true CA1075523A (fr) 1980-04-15

Family

ID=4106348

Family Applications (1)

Application Number Title Priority Date Filing Date
CA256,223A Expired CA1075523A (fr) 1976-06-30 1976-06-30 Methode de conversion d'une couche photoresistante positive en image photoresistante negative

Country Status (1)

Country Link
CA (1) CA1075523A (fr)

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