CA1045235A - Semiconductor device having an antireflective coating - Google Patents

Semiconductor device having an antireflective coating

Info

Publication number
CA1045235A
CA1045235A CA236,812A CA236812A CA1045235A CA 1045235 A CA1045235 A CA 1045235A CA 236812 A CA236812 A CA 236812A CA 1045235 A CA1045235 A CA 1045235A
Authority
CA
Canada
Prior art keywords
polycrystalline silicon
silicon layer
substrate
junction
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA236,812A
Other languages
English (en)
French (fr)
Inventor
Takayoshi Mamine
Takeshi Matsushita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of CA1045235A publication Critical patent/CA1045235A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Formation Of Insulating Films (AREA)
  • Solid State Image Pick-Up Elements (AREA)
CA236,812A 1974-10-09 1975-10-01 Semiconductor device having an antireflective coating Expired CA1045235A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49116418A JPS5824951B2 (ja) 1974-10-09 1974-10-09 コウガクソウチ

Publications (1)

Publication Number Publication Date
CA1045235A true CA1045235A (en) 1978-12-26

Family

ID=14686575

Family Applications (1)

Application Number Title Priority Date Filing Date
CA236,812A Expired CA1045235A (en) 1974-10-09 1975-10-01 Semiconductor device having an antireflective coating

Country Status (12)

Country Link
US (1) US3990100A (en:Method)
JP (1) JPS5824951B2 (en:Method)
AT (1) AT344805B (en:Method)
AU (1) AU499375B2 (en:Method)
CA (1) CA1045235A (en:Method)
CH (1) CH593563A5 (en:Method)
DE (1) DE2545136A1 (en:Method)
FR (1) FR2287775A1 (en:Method)
GB (1) GB1497442A (en:Method)
IT (1) IT1043219B (en:Method)
NL (1) NL182524C (en:Method)
SE (1) SE405776B (en:Method)

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JPS51128285A (en) * 1975-04-30 1976-11-09 Sony Corp Solid photographing unit
JPS51128268A (en) * 1975-04-30 1976-11-09 Sony Corp Semiconductor unit
GB1536412A (en) * 1975-05-14 1978-12-20 English Electric Valve Co Ltd Photocathodes
US4086102A (en) * 1976-12-13 1978-04-25 King William J Inexpensive solar cell and method therefor
FR2376513A1 (fr) * 1976-12-31 1978-07-28 Radiotechnique Compelec Dispositif semiconducteur muni d'un film protecteur
US4101923A (en) * 1977-03-22 1978-07-18 Gulko Arnold G Solar cells
US4133699A (en) * 1978-04-26 1979-01-09 Communications Satellite Corporation Shaped edge solar cell coverslide
JPS5614201A (en) * 1979-07-16 1981-02-12 Matsushita Electric Ind Co Ltd Reflection preventing film
JPS5624969A (en) * 1979-08-09 1981-03-10 Canon Inc Semiconductor integrated circuit element
DE2944185A1 (de) * 1979-11-02 1981-05-07 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Solarzelle
US4246043A (en) * 1979-12-03 1981-01-20 Solarex Corporation Yttrium oxide antireflective coating for solar cells
USRE31151E (en) * 1980-04-07 1983-02-15 Inexpensive solar cell and method therefor
JPS5787183A (en) * 1980-11-20 1982-05-31 Sanyo Electric Co Ltd Photosensitive semiconductor
JPH0614552B2 (ja) * 1983-02-02 1994-02-23 富士ゼロックス株式会社 光電変換素子の製造方法
JPS59143362A (ja) * 1983-02-03 1984-08-16 Fuji Xerox Co Ltd パツシベ−シヨン膜
JPS6326601A (ja) * 1986-07-21 1988-02-04 Mitsui Toatsu Chem Inc Ｃｒｔフイルタ−
JPS6326602A (ja) * 1986-07-21 1988-02-04 Mitsui Toatsu Chem Inc Ｃｒｔフイルタ−
JPS63150976A (ja) * 1986-12-12 1988-06-23 Fujitsu Ltd 赤外線検出装置
DK170189B1 (da) * 1990-05-30 1995-06-06 Yakov Safir Fremgangsmåde til fremstilling af halvlederkomponenter, samt solcelle fremstillet deraf
DE4019853C2 (de) * 1990-06-22 1996-02-22 Wandel & Goltermann Halbleiter-Fotodiode mit Antireflex-Beschichtung
US5968324A (en) * 1995-12-05 1999-10-19 Applied Materials, Inc. Method and apparatus for depositing antireflective coating
US5620904A (en) * 1996-03-15 1997-04-15 Evergreen Solar, Inc. Methods for forming wraparound electrical contacts on solar cells
US5741370A (en) * 1996-06-27 1998-04-21 Evergreen Solar, Inc. Solar cell modules with improved backskin and methods for forming same
US5986203A (en) * 1996-06-27 1999-11-16 Evergreen Solar, Inc. Solar cell roof tile and method of forming same
US5762720A (en) * 1996-06-27 1998-06-09 Evergreen Solar, Inc. Solar cell modules with integral mounting structure and methods for forming same
US6083852A (en) * 1997-05-07 2000-07-04 Applied Materials, Inc. Method for applying films using reduced deposition rates
US6127262A (en) 1996-06-28 2000-10-03 Applied Materials, Inc. Method and apparatus for depositing an etch stop layer
US5895972A (en) 1996-12-31 1999-04-20 Intel Corporation Method and apparatus for cooling the backside of a semiconductor device using an infrared transparent heat slug
US6278053B1 (en) 1997-03-25 2001-08-21 Evergreen Solar, Inc. Decals and methods for providing an antireflective coating and metallization on a solar cell
US5923086A (en) * 1997-05-14 1999-07-13 Intel Corporation Apparatus for cooling a semiconductor die
US6114046A (en) * 1997-07-24 2000-09-05 Evergreen Solar, Inc. Encapsulant material for solar cell module and laminated glass applications
US6187448B1 (en) 1997-07-24 2001-02-13 Evergreen Solar, Inc. Encapsulant material for solar cell module and laminated glass applications
US6320116B1 (en) 1997-09-26 2001-11-20 Evergreen Solar, Inc. Methods for improving polymeric materials for use in solar cell applications
US20060210783A1 (en) * 2005-03-18 2006-09-21 Seder Thomas A Coated article with anti-reflective coating and method of making same
DE102007034782A1 (de) * 2007-07-25 2009-01-29 Atmel Germany Gmbh Halbleiterbauelement, Beleuchtungseinrichtung für Matrixbildschirme und Verfahren zum Herstellen eines Halbleiterbauelements
DE102008035575B4 (de) * 2008-07-30 2016-08-11 Soitec Solar Gmbh Photovoltaik-Vorrichtung zur direkten Umwandlung von Sonnenenergie in elektrische Energie enthaltend eine zweistufige aus mehreren Elementen bestehende Konzentratoroptik
US20110089557A1 (en) * 2009-10-19 2011-04-21 Jeng-Jye Shau Area reduction for die-scale surface mount package chips
WO2012043736A1 (ja) * 2010-09-30 2012-04-05 三菱マテリアル株式会社 太陽電池の反射防止膜用組成物、太陽電池の反射防止膜、太陽電池の反射防止膜の製造方法、及び太陽電池
EP2651035B1 (en) * 2012-04-11 2017-05-03 Imec Low voltage drop unidirectional smart bypass elements
FR2993087B1 (fr) * 2012-07-06 2014-06-27 Wysips Dispositif pour ameliorer la qualite d'une image recouverte d'un film photovoltaique semi-transparent
US10276816B2 (en) 2014-12-11 2019-04-30 International Business Machines Corporation Illumination sensitive current control device
CN106950722B (zh) * 2017-04-12 2023-05-23 厦门腾诺光学科技有限公司 一种雾面太阳镜片及其生产工艺
CN117334775B (zh) * 2023-10-09 2024-09-27 江苏致芯微电子技术有限公司 一种光纤接收电路的高传输速率的光电二极管及工艺方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2049507C3 (de) * 1970-10-08 1979-11-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Lichtempfindliche Halbleiteranordnung
US3743847A (en) * 1971-06-01 1973-07-03 Motorola Inc Amorphous silicon film as a uv filter
NL7204741A (en:Method) * 1972-04-08 1973-10-10
US3922774A (en) * 1972-05-01 1975-12-02 Communications Satellite Corp Tantalum pentoxide anti-reflective coating
US3886587A (en) * 1973-07-19 1975-05-27 Harris Corp Isolated photodiode array

Also Published As

Publication number Publication date
SE7511249L (sv) 1976-04-12
ATA773775A (de) 1977-12-15
CH593563A5 (en:Method) 1977-12-15
AU8535675A (en) 1977-04-07
FR2287775A1 (fr) 1976-05-07
AU499375B2 (en) 1979-04-12
DE2545136A1 (de) 1976-04-22
US3990100A (en) 1976-11-02
JPS5143088A (en:Method) 1976-04-13
AT344805B (de) 1978-08-10
NL7511906A (nl) 1976-04-13
GB1497442A (en) 1978-01-12
NL182524B (nl) 1987-10-16
JPS5824951B2 (ja) 1983-05-24
FR2287775B1 (en:Method) 1979-06-29
IT1043219B (it) 1980-02-20
NL182524C (nl) 1988-03-16
SE405776B (sv) 1978-12-27

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