CA1036272A - Methode et appareil de production epitaxiale d'une couche semiconductrice laminee en phase liquide - Google Patents

Methode et appareil de production epitaxiale d'une couche semiconductrice laminee en phase liquide

Info

Publication number
CA1036272A
CA1036272A CA242,234A CA242234A CA1036272A CA 1036272 A CA1036272 A CA 1036272A CA 242234 A CA242234 A CA 242234A CA 1036272 A CA1036272 A CA 1036272A
Authority
CA
Canada
Prior art keywords
semiconductor layer
same
liquid phase
epitaxially growing
laminate semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA242,234A
Other languages
English (en)
Inventor
Yoshiji Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of CA1036272A publication Critical patent/CA1036272A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/10—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
CA242,234A 1974-12-20 1975-12-18 Methode et appareil de production epitaxiale d'une couche semiconductrice laminee en phase liquide Expired CA1036272A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49145599A JPS5248949B2 (fr) 1974-12-20 1974-12-20

Publications (1)

Publication Number Publication Date
CA1036272A true CA1036272A (fr) 1978-08-08

Family

ID=15388776

Family Applications (1)

Application Number Title Priority Date Filing Date
CA242,234A Expired CA1036272A (fr) 1974-12-20 1975-12-18 Methode et appareil de production epitaxiale d'une couche semiconductrice laminee en phase liquide

Country Status (7)

Country Link
US (1) US4013040A (fr)
JP (1) JPS5248949B2 (fr)
CA (1) CA1036272A (fr)
DE (1) DE2556928C3 (fr)
FR (1) FR2295565A1 (fr)
GB (1) GB1495310A (fr)
NL (1) NL166074C (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51129882A (en) * 1975-05-07 1976-11-11 Nippon Telegr & Teleph Corp <Ntt> Process for liquid phase epitaxial growth
JPS5556625A (en) * 1978-10-20 1980-04-25 Matsushita Electric Ind Co Ltd Semiconductor crystal growing device
FR2470810A1 (fr) * 1979-12-07 1981-06-12 Labo Electronique Physique Procede de fabrication de structures semi-conductrices par croissance epitaxiale en phase liquide et structures obtenues
FR2476690A1 (fr) * 1980-02-27 1981-08-28 Radiotechnique Compelec Nacelle utilisable pour des depots epitaxiques en phase liquide et procede de depot mettant en jeu ladite nacelle
FR2481325A1 (fr) * 1980-04-23 1981-10-30 Radiotechnique Compelec Nacelle utilisable pour des depots epitaxiques multicouches en phase liquide et procede de depot mettant en jeu ladite nacelle
DE3345214A1 (de) * 1983-12-14 1985-06-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Diode
DE3427056A1 (de) * 1984-07-23 1986-01-23 Standard Elektrik Lorenz Ag, 7000 Stuttgart Anlage zum herstellen von halbleiter-schichtstrukturen durch epitaktisches wachstum
US5264190A (en) * 1990-04-19 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Liquid phase epitaxial film growth apparatus
DE102021123241A1 (de) * 2021-09-08 2023-03-09 Tdk Electronics Ag Verfahren zum Aufbringen einer Beschichtung auf mindestens ein elektronisches Bauteil und Sensoranordnung mit einer Beschichtung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3665888A (en) * 1970-03-16 1972-05-30 Bell Telephone Labor Inc Horizontal liquid phase crystal growth apparatus
US3767481A (en) * 1972-04-07 1973-10-23 Rca Corp Method for epitaxially growing layers of a semiconductor material from the liquid phase
US3755011A (en) * 1972-06-01 1973-08-28 Rca Corp Method for depositing an epitaxial semiconductive layer from the liquid phase
US3821039A (en) * 1973-03-22 1974-06-28 Rca Corp Method of epitaxially depositing a semiconductor material on a substrate
NL7306004A (fr) * 1973-05-01 1974-11-05

Also Published As

Publication number Publication date
FR2295565B1 (fr) 1978-05-19
NL7514816A (nl) 1976-06-22
DE2556928B2 (de) 1978-06-22
FR2295565A1 (fr) 1976-07-16
JPS5248949B2 (fr) 1977-12-13
DE2556928A1 (de) 1976-06-24
DE2556928C3 (de) 1979-02-22
JPS5171882A (fr) 1976-06-22
NL166074B (nl) 1981-01-15
US4013040A (en) 1977-03-22
GB1495310A (en) 1977-12-14
NL166074C (nl) 1981-06-15

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