CA1029122A - Surface acoustic wave transducer - Google Patents

Surface acoustic wave transducer

Info

Publication number
CA1029122A
CA1029122A CA208,869A CA208869A CA1029122A CA 1029122 A CA1029122 A CA 1029122A CA 208869 A CA208869 A CA 208869A CA 1029122 A CA1029122 A CA 1029122A
Authority
CA
Canada
Prior art keywords
acoustic wave
surface acoustic
wave transducer
transducer
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA208,869A
Other languages
English (en)
French (fr)
Other versions
CA208869S (en
Inventor
Thomas M. Reeder
Anthony J. Demaria
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Application granted granted Critical
Publication of CA1029122A publication Critical patent/CA1029122A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/36—Devices for manipulating acoustic surface waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/326—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator the resonator being an acoustic wave device, e.g. SAW or BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/04—Piezoelectric

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CA208,869A 1974-02-25 1974-09-10 Surface acoustic wave transducer Expired CA1029122A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/445,193 US3978731A (en) 1974-02-25 1974-02-25 Surface acoustic wave transducer

Publications (1)

Publication Number Publication Date
CA1029122A true CA1029122A (en) 1978-04-04

Family

ID=23767943

Family Applications (1)

Application Number Title Priority Date Filing Date
CA208,869A Expired CA1029122A (en) 1974-02-25 1974-09-10 Surface acoustic wave transducer

Country Status (8)

Country Link
US (1) US3978731A (de)
JP (1) JPS626174B2 (de)
CA (1) CA1029122A (de)
DE (1) DE2505461C2 (de)
FR (1) FR2262288B1 (de)
GB (1) GB1486377A (de)
IT (1) IT1031931B (de)
SE (1) SE417870B (de)

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DE10343498A1 (de) * 2003-02-07 2005-05-04 Univ Leipzig Verfahren zur Feststellung wenigstens eines Zustandsparameters eines Dichtungssystems sowie Dichtungssystem
US20040159166A1 (en) * 2003-02-13 2004-08-19 Schiller Peter J. Solid-state piezoelectric motion transducer
US6907787B2 (en) * 2003-04-30 2005-06-21 Honeywell International Inc. Surface acoustic wave pressure sensor with microstructure sensing elements
US7100451B2 (en) * 2003-08-29 2006-09-05 Sawtek, Inc. Surface acoustic wave sensing system and method for measuring pressure and temperature
US6868731B1 (en) * 2003-11-20 2005-03-22 Honeywell International, Inc. Digital output MEMS pressure sensor and method
JP4099504B2 (ja) * 2003-11-27 2008-06-11 京セラ株式会社 圧力センサ装置
JP4511206B2 (ja) * 2004-01-29 2010-07-28 京セラ株式会社 圧力センサモジュール
JP4511208B2 (ja) * 2004-01-29 2010-07-28 京セラ株式会社 圧力センサモジュール
JP4511207B2 (ja) * 2004-01-29 2010-07-28 京セラ株式会社 圧力センサモジュール
JP4511216B2 (ja) * 2004-02-26 2010-07-28 京セラ株式会社 圧力センサモジュール
US7000298B2 (en) * 2004-04-20 2006-02-21 Honeywell International Inc. Method a quartz sensor
US7198981B2 (en) * 2004-10-21 2007-04-03 Honeywell International Inc. Vacuum sealed surface acoustic wave pressure sensor
JP2006268578A (ja) * 2005-03-24 2006-10-05 Fuji Xerox Co Ltd 情報提供システムおよび画像形成装置
US7140261B2 (en) * 2005-04-27 2006-11-28 Honeywell International Inc. Acoustic wave flow sensor
US20070051176A1 (en) * 2005-09-08 2007-03-08 Honeywell International Inc. Passive hybrid lc/SAW/BAW wireless sensor
EP1764597B1 (de) * 2005-09-16 2011-03-23 STMicroelectronics Srl Druckwandler mit akoustischen Oberflächenwellen
JP4345984B2 (ja) * 2005-11-11 2009-10-14 Ｎｅｃトーキン株式会社 振動検知方法、振動検知システム、バッテリレス振動センサ及び質問器
TWI330461B (en) * 2006-01-12 2010-09-11 Ind Tech Res Inst Surface acoustic wave bio-chip
JP5138246B2 (ja) * 2006-03-21 2013-02-06 ラディ・メディカル・システムズ・アクチェボラーグ 圧力センサ
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US8572844B2 (en) * 2008-08-29 2013-11-05 United Technologies Corporation Airfoil with leading edge cooling passage
US8303252B2 (en) * 2008-10-16 2012-11-06 United Technologies Corporation Airfoil with cooling passage providing variable heat transfer rate
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US8317392B2 (en) * 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
JP5310572B2 (ja) * 2010-01-13 2013-10-09 凸版印刷株式会社 圧力センサ
US8486020B2 (en) 2010-08-11 2013-07-16 Zevex, Inc. Pressure sensor and method of use
US7954387B1 (en) * 2010-08-18 2011-06-07 General Electric Company Ultrasonic transducer device
CA2812768C (en) 2010-10-01 2016-05-17 Zevex, Inc. Pressure monitoring system for infusion pumps
AU2011308700B2 (en) 2010-10-01 2015-04-02 Zevex, Inc. Pressure sensor seal and method of use
JP2012189333A (ja) * 2011-03-08 2012-10-04 Seiko Instruments Inc センサ
JP4853596B1 (ja) * 2011-03-15 2012-01-11 オムロン株式会社 酸化金属膜を備えたセンサおよびその利用
CN103926017A (zh) * 2013-01-14 2014-07-16 北京中讯四方科技股份有限公司 一种基于特殊石英材料的声表面波温度传感器
US9702772B2 (en) 2014-03-26 2017-07-11 Mnemonics, Inc. Surface acoustic wave (SAW) based strain sensor
CN106840056A (zh) * 2016-12-28 2017-06-13 电子科技大学 一种双声表面波应变传感器及其设计方法
CN110462558A (zh) * 2017-07-19 2019-11-15 深圳纽迪瑞科技开发有限公司 一种压力感应装置及压力感应设备
CN109427975B (zh) * 2017-08-23 2021-01-22 京东方科技集团股份有限公司 柔性基板及其制备方法、检测弯曲的方法以及柔性显示装置
EP3467457B1 (de) 2018-04-30 2022-07-20 Sonion Nederland B.V. Vibrationssensor
BE1026684B1 (fr) * 2018-10-05 2020-05-07 Safran Aero Boosters Sa Pièce de machine d’aéronef intégrant au moins un capteur de pression
US11143561B2 (en) * 2018-12-05 2021-10-12 Resonant Inc. Passive microphone/pressure sensor using a piezoelectric diaphragm
US11835414B2 (en) 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate
CN110044538B (zh) * 2019-04-09 2020-10-09 重庆大学 一种液体作用下圆形薄膜最大应力的确定方法
CN111023957B (zh) * 2019-12-20 2021-05-28 北京航空航天大学 一种耐高温径向位移传感器装置
CN115023585A (zh) * 2020-08-06 2022-09-06 株式会社村田制作所 变形量检测装置

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Also Published As

Publication number Publication date
AU7735175A (en) 1976-07-22
IT1031931B (it) 1979-05-10
DE2505461C2 (de) 1987-03-26
JPS626174B2 (de) 1987-02-09
SE417870B (sv) 1981-04-13
FR2262288A1 (de) 1975-09-19
US3978731A (en) 1976-09-07
SE7501968L (de) 1975-08-26
FR2262288B1 (de) 1980-05-09
JPS50120673A (de) 1975-09-22
DE2505461A1 (de) 1975-08-28
GB1486377A (en) 1977-09-21

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