BRPI0503872A - sistema e método para prover um revestimento de proteção regenerador em um dispositivo mems - Google Patents
sistema e método para prover um revestimento de proteção regenerador em um dispositivo memsInfo
- Publication number
- BRPI0503872A BRPI0503872A BRPI0503872-3A BRPI0503872A BRPI0503872A BR PI0503872 A BRPI0503872 A BR PI0503872A BR PI0503872 A BRPI0503872 A BR PI0503872A BR PI0503872 A BRPI0503872 A BR PI0503872A
- Authority
- BR
- Brazil
- Prior art keywords
- protective coating
- regenerative
- providing
- mems device
- mems
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00944—Maintaining a critical distance between the structures to be released
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
- B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Composite Materials (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
"SISTEMA E MéTODO PAPA PROVER UM REVESTIMENTO DE PROTEçãO REGENERADOR EM UM DISPOSITIVO MEMS". Em várias modalidades da invenção, um revestimento de proteção regenerador é formado em pelo menos uma superfície de uma cavidade interior de um dispositivo MEMS 80. As modalidades específicas provêem um revestimento de proteção regenerador 170 em uma ou mais superfícies de espelho de um dispositivo de modulador de luz interferométrico, também conhecido como um iMoD em algumas modalidades. O revestimento de proteção pode ser regenerado através da adição de calor ou de energia ao revestimento de proteção.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61356404P | 2004-09-27 | 2004-09-27 | |
US11/134,028 US7446926B2 (en) | 2004-09-27 | 2005-05-20 | System and method of providing a regenerating protective coating in a MEMS device |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0503872A true BRPI0503872A (pt) | 2006-05-09 |
Family
ID=35198023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0503872-3A BRPI0503872A (pt) | 2004-09-27 | 2005-09-26 | sistema e método para prover um revestimento de proteção regenerador em um dispositivo mems |
Country Status (11)
Country | Link |
---|---|
US (1) | US7446926B2 (pt) |
EP (1) | EP1640315A3 (pt) |
JP (1) | JP2006099068A (pt) |
KR (1) | KR20060092890A (pt) |
AU (1) | AU2005203343A1 (pt) |
BR (1) | BRPI0503872A (pt) |
CA (1) | CA2517109A1 (pt) |
MX (1) | MXPA05009405A (pt) |
RU (1) | RU2005129962A (pt) |
SG (1) | SG121064A1 (pt) |
TW (1) | TW200626927A (pt) |
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-
2005
- 2005-05-20 US US11/134,028 patent/US7446926B2/en not_active Expired - Fee Related
- 2005-07-29 AU AU2005203343A patent/AU2005203343A1/en not_active Abandoned
- 2005-08-11 TW TW094127335A patent/TW200626927A/zh unknown
- 2005-08-11 JP JP2005233673A patent/JP2006099068A/ja active Pending
- 2005-08-17 SG SG200505242A patent/SG121064A1/en unknown
- 2005-08-25 CA CA002517109A patent/CA2517109A1/en not_active Abandoned
- 2005-09-02 MX MXPA05009405A patent/MXPA05009405A/es unknown
- 2005-09-14 EP EP05255681A patent/EP1640315A3/en not_active Withdrawn
- 2005-09-21 KR KR1020050087784A patent/KR20060092890A/ko not_active Application Discontinuation
- 2005-09-26 RU RU2005129962/28A patent/RU2005129962A/ru not_active Application Discontinuation
- 2005-09-26 BR BRPI0503872-3A patent/BRPI0503872A/pt not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
SG121064A1 (en) | 2006-04-26 |
JP2006099068A (ja) | 2006-04-13 |
US7446926B2 (en) | 2008-11-04 |
KR20060092890A (ko) | 2006-08-23 |
CA2517109A1 (en) | 2006-03-27 |
EP1640315A2 (en) | 2006-03-29 |
AU2005203343A1 (en) | 2006-04-13 |
TW200626927A (en) | 2006-08-01 |
EP1640315A3 (en) | 2008-04-16 |
US20060077150A1 (en) | 2006-04-13 |
RU2005129962A (ru) | 2007-04-10 |
MXPA05009405A (es) | 2006-03-29 |
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