BRPI0413417A - processo para fabricação de um dispositivo que requer um material getter não evaporável para sua operação - Google Patents
processo para fabricação de um dispositivo que requer um material getter não evaporável para sua operaçãoInfo
- Publication number
- BRPI0413417A BRPI0413417A BRPI0413417-6A BRPI0413417A BRPI0413417A BR PI0413417 A BRPI0413417 A BR PI0413417A BR PI0413417 A BRPI0413417 A BR PI0413417A BR PI0413417 A BRPI0413417 A BR PI0413417A
- Authority
- BR
- Brazil
- Prior art keywords
- getter material
- unevaporable
- manufacturing
- requires
- devices
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/20—Other heavy metals
- C23G1/205—Other heavy metals refractory metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Optical Head (AREA)
- Optical Integrated Circuits (AREA)
- Gyroscopes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Abstract
"PROCESSO PARA FABRICAçãO DE UM DISPOSITIVO QUE REQUER UM MATERIAL GETTER NãO EVAPORáVEL PARA SUA OPERAçãO". revelado um processo que permite simplificar a fabricação de dispositivos (20; 30) que contêm em seu interior um depósito de material getter não evaporável (17; 32) sobre um suporte (22; 33), o qual pode ser uma parede interna dos mesmos dispositivos. O processo compreende a operação de tratar o suporte com o material getter com pelo menos uma solução ácida ou básica.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT002209A ITMI20032209A1 (it) | 2003-11-14 | 2003-11-14 | Processo per la produzione di dispositivi che richiedono per il loro funzionamento un materiale getter non evaporabile. |
ITMI2003A002209 | 2003-11-14 | ||
PCT/IT2004/000615 WO2005047558A2 (en) | 2003-11-14 | 2004-11-09 | Process for manufacturing devices which require a non evaporable getter material for their working |
Publications (2)
Publication Number | Publication Date |
---|---|
BRPI0413417A true BRPI0413417A (pt) | 2006-10-10 |
BRPI0413417B1 BRPI0413417B1 (pt) | 2014-10-14 |
Family
ID=34586992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0413417-6A BRPI0413417B1 (pt) | 2003-11-14 | 2004-11-09 | "processo para fabricação de um dispositivo que requer um material de sorção não evaporável para sua operação". |
Country Status (18)
Country | Link |
---|---|
EP (1) | EP1685269B1 (pt) |
JP (1) | JP4865562B2 (pt) |
KR (1) | KR100742422B1 (pt) |
CN (1) | CN100554496C (pt) |
AU (1) | AU2004288886B2 (pt) |
BR (1) | BRPI0413417B1 (pt) |
CA (1) | CA2533643C (pt) |
DE (1) | DE602004022078D1 (pt) |
DK (1) | DK1685269T3 (pt) |
ES (1) | ES2326812T3 (pt) |
IL (1) | IL173224A (pt) |
IT (1) | ITMI20032209A1 (pt) |
MX (1) | MXPA06002390A (pt) |
MY (1) | MY139594A (pt) |
NO (1) | NO20060595L (pt) |
PL (1) | PL1685269T3 (pt) |
TW (1) | TWI261930B (pt) |
WO (1) | WO2005047558A2 (pt) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20052343A1 (it) * | 2005-12-06 | 2007-06-07 | Getters Spa | Processo per la produzione di dispositivi micromeccanici contenenti un materiale getter e dispositivi cosi'prodotti |
FR2898597B1 (fr) * | 2006-03-16 | 2008-09-19 | Commissariat Energie Atomique | Encapsulation dans une cavite hermetique d'un compose microelectronique, notamment d'un mems |
FR2903678B1 (fr) * | 2006-07-13 | 2008-10-24 | Commissariat Energie Atomique | Microcomposant encapsule equipe d'au moins un getter |
FR2922202B1 (fr) * | 2007-10-15 | 2009-11-20 | Commissariat Energie Atomique | Structure comportant une couche getter et une sous-couche d'ajustement et procede de fabrication. |
DE102008060796B4 (de) * | 2008-11-18 | 2014-01-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Ausbilden einer Mikro-Oberflächenstruktur sowie zum Herstellen eines mikroelektromechanischen Bauelements, Mikro-Oberflächenstruktur sowie mikroelektromechanisches Bauelement mit einer solchen Struktur |
CN102040186B (zh) * | 2010-11-09 | 2012-11-21 | 北京自动化控制设备研究所 | 一种高真空陶瓷lcc封装方法 |
JP2015002414A (ja) * | 2013-06-14 | 2015-01-05 | セイコーインスツル株式会社 | 電子デバイス |
CN105366624B (zh) * | 2014-07-30 | 2017-06-13 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
CN109680249A (zh) * | 2019-01-25 | 2019-04-26 | 苏州大学 | 非蒸散型薄膜吸气剂及其制备方法 |
CN113061854A (zh) * | 2021-03-19 | 2021-07-02 | 上海松尚国际贸易有限公司 | 利用amat pvd腔体制备吸气剂的方法及其薄膜吸气剂 |
CN113699425B (zh) * | 2021-08-31 | 2022-07-15 | 中国科学技术大学 | 非蒸散型四元Ti-Zr-V-Cu真空吸气剂薄膜及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1015645B (zh) * | 1989-09-07 | 1992-02-26 | 安守环 | 非蒸散型低温激活吸气剂及其制造工艺 |
JPH08210251A (ja) * | 1995-02-06 | 1996-08-20 | Toshiba Corp | ゲッターポンプとその製造方法 |
IT1283484B1 (it) * | 1996-07-23 | 1998-04-21 | Getters Spa | Metodo per la produzione di strati sottili supportati di materiale getter non-evaporabile e dispositivi getter cosi' prodotti |
JPH1157466A (ja) * | 1997-08-20 | 1999-03-02 | Sumitomo Metal Ind Ltd | リボン状ゲッタ材とその製造方法 |
TW533188B (en) * | 2001-07-20 | 2003-05-21 | Getters Spa | Support for microelectronic, microoptoelectronic or micromechanical devices |
US6923625B2 (en) * | 2002-01-07 | 2005-08-02 | Integrated Sensing Systems, Inc. | Method of forming a reactive material and article formed thereby |
-
2003
- 2003-11-14 IT IT002209A patent/ITMI20032209A1/it unknown
-
2004
- 2004-11-09 BR BRPI0413417-6A patent/BRPI0413417B1/pt not_active IP Right Cessation
- 2004-11-09 WO PCT/IT2004/000615 patent/WO2005047558A2/en active Application Filing
- 2004-11-09 EP EP04799409A patent/EP1685269B1/en active Active
- 2004-11-09 DE DE602004022078T patent/DE602004022078D1/de active Active
- 2004-11-09 KR KR1020067006260A patent/KR100742422B1/ko active IP Right Grant
- 2004-11-09 MX MXPA06002390A patent/MXPA06002390A/es active IP Right Grant
- 2004-11-09 CA CA002533643A patent/CA2533643C/en active Active
- 2004-11-09 JP JP2006539078A patent/JP4865562B2/ja active Active
- 2004-11-09 AU AU2004288886A patent/AU2004288886B2/en not_active Ceased
- 2004-11-09 DK DK04799409T patent/DK1685269T3/da active
- 2004-11-09 PL PL04799409T patent/PL1685269T3/pl unknown
- 2004-11-09 CN CNB2004800256050A patent/CN100554496C/zh active Active
- 2004-11-09 ES ES04799409T patent/ES2326812T3/es active Active
- 2004-11-10 TW TW093134335A patent/TWI261930B/zh active
- 2004-11-10 MY MYPI20044709A patent/MY139594A/en unknown
-
2006
- 2006-01-18 IL IL173224A patent/IL173224A/en active IP Right Grant
- 2006-02-06 NO NO20060595A patent/NO20060595L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
WO2005047558A2 (en) | 2005-05-26 |
CA2533643A1 (en) | 2005-05-26 |
PL1685269T3 (pl) | 2009-11-30 |
DE602004022078D1 (de) | 2009-08-27 |
NO20060595L (no) | 2006-06-27 |
WO2005047558A3 (en) | 2005-10-13 |
JP4865562B2 (ja) | 2012-02-01 |
MXPA06002390A (es) | 2006-06-20 |
MY139594A (en) | 2009-10-30 |
CN1846012A (zh) | 2006-10-11 |
JP2007523467A (ja) | 2007-08-16 |
TW200527692A (en) | 2005-08-16 |
EP1685269B1 (en) | 2009-07-15 |
ITMI20032209A1 (it) | 2005-05-15 |
CA2533643C (en) | 2010-01-12 |
DK1685269T3 (da) | 2009-11-02 |
KR20060113891A (ko) | 2006-11-03 |
IL173224A0 (en) | 2006-06-11 |
KR100742422B1 (ko) | 2007-07-24 |
ES2326812T3 (es) | 2009-10-20 |
AU2004288886A1 (en) | 2005-05-26 |
CN100554496C (zh) | 2009-10-28 |
IL173224A (en) | 2010-05-31 |
BRPI0413417B1 (pt) | 2014-10-14 |
TWI261930B (en) | 2006-09-11 |
EP1685269A2 (en) | 2006-08-02 |
AU2004288886B2 (en) | 2008-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B06A | Patent application procedure suspended [chapter 6.1 patent gazette] | ||
B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 09/11/2004, OBSERVADAS AS CONDICOES LEGAIS. |
|
B21F | Lapse acc. art. 78, item iv - on non-payment of the annual fees in time | ||
B24J | Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12) |
Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2435 DE 05-09-2017 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |