BR8400680A - Composicoes para remocao de filmes fotoresistente e metodo de uso - Google Patents

Composicoes para remocao de filmes fotoresistente e metodo de uso

Info

Publication number
BR8400680A
BR8400680A BR8400680A BR8400680A BR8400680A BR 8400680 A BR8400680 A BR 8400680A BR 8400680 A BR8400680 A BR 8400680A BR 8400680 A BR8400680 A BR 8400680A BR 8400680 A BR8400680 A BR 8400680A
Authority
BR
Brazil
Prior art keywords
photoristic
films
compositions
removing photoristic
photoristic films
Prior art date
Application number
BR8400680A
Other languages
English (en)
Inventor
Wesley L Archer
Susan M Dallessandro
Vicki A Lynn
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Publication of BR8400680A publication Critical patent/BR8400680A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/261—Alcohols; Phenols
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5013—Organic solvents containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/028—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons
    • C23G5/02806—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons containing only chlorine as halogen atom
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/266—Esters or carbonates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Medicine (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Paints Or Removers (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
BR8400680A 1983-02-14 1984-02-13 Composicoes para remocao de filmes fotoresistente e metodo de uso BR8400680A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/465,975 US4438192A (en) 1983-02-14 1983-02-14 Photoresist stripper composition and method of use

Publications (1)

Publication Number Publication Date
BR8400680A true BR8400680A (pt) 1984-09-18

Family

ID=23849937

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8400680A BR8400680A (pt) 1983-02-14 1984-02-13 Composicoes para remocao de filmes fotoresistente e metodo de uso

Country Status (9)

Country Link
US (1) US4438192A (pt)
EP (1) EP0116343B1 (pt)
JP (1) JPS59157639A (pt)
BR (1) BR8400680A (pt)
CA (1) CA1193177A (pt)
DE (1) DE3471770D1 (pt)
FI (1) FI78310C (pt)
HK (1) HK79489A (pt)
NO (1) NO165218C (pt)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3444293A1 (de) * 1984-12-05 1986-06-05 Metallgesellschaft Ag, 6000 Frankfurt Mittel zum reinigen von verarbeitungsanlagen fuer hochviskose reaktive mehrkomponentenmischungen
FR2601703B1 (fr) * 1986-07-21 1993-05-07 Atochem Composition a base de chlorure de methylene - son utilisation pour l'enlevement des films photoresist
CA2024589A1 (en) * 1989-09-05 1991-03-06 Masaru Sugita Cleaning compositions and applications thereof
US5218979A (en) * 1989-09-05 1993-06-15 Nagase & Company, Ltd. Method of cleaning printed circuit boards with dimethylcyclooctadienes
JP2519807B2 (ja) * 1989-10-13 1996-07-31 信越化学工業株式会社 オ―バ―ヘッドプロジェクタ用フィルムの再生方法
FR2657876B1 (fr) * 1990-02-07 1992-05-15 Atochem Composition nettoyante a base de 1,1-dichloro-1-fluoroethane et de formiate de methyle.
FR2657877B1 (fr) * 1990-02-07 1992-05-15 Atochem Composition nettoyante a base de 1,1-dichloro-1-fluoroethane, de formiate de methyle et de methanol.
US6511547B1 (en) 1996-01-30 2003-01-28 Siliconvalley Chemlabs, Inc. Dibasic ester stripping composition
US5909744A (en) * 1996-01-30 1999-06-08 Silicon Valley Chemlabs, Inc. Dibasic ester stripping composition
US5741368A (en) * 1996-01-30 1998-04-21 Silicon Valley Chemlabs Dibasic ester stripping composition
AU2001273598A1 (en) 2000-06-29 2002-01-14 Huntsman Petrochemical Corporation Carbonate-based photoresist stripping compositions

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU37804A1 (pt) 1958-11-04
LU37891A1 (pt) 1958-12-11
US3113154A (en) 1960-05-27 1963-12-03 Ethyl Corp Stable methylchloroform compositions
US3600322A (en) 1968-05-29 1971-08-17 Union Carbide Corp Paint removal formulation
US3650969A (en) 1968-07-29 1972-03-21 Allied Chem Compositions for removal of finish coatings
US3625763A (en) 1968-12-04 1971-12-07 Bunker Ramo Conformal coating stripping method and composition
US3813309A (en) 1969-12-23 1974-05-28 Ibm Method for stripping resists from substrates
GB1329731A (en) 1970-08-12 1973-09-12 Imp Chemical Ind Ld Method for removal of resists from printed circuit boards
US3988256A (en) 1974-04-03 1976-10-26 Allied Chemical Corporation Photoresist stripper rinse
GB2049972B (en) 1977-07-12 1982-06-23 Asahi Chemical Ind Photosensitive element for producing a printed circuit board
US4187191A (en) 1978-07-26 1980-02-05 General Motors Corporation Photoresist stripper with dodecylsulfonic acid and chlorinated solvents
EP0011658B1 (en) * 1978-12-01 1982-05-19 Dow Chemical (Europe) S.A. Stabilized methylene chloride formulation for vapor degreasing
US4246130A (en) 1979-06-21 1981-01-20 Amchem Products, Inc. Stripping composition and method for metals
US4367324A (en) 1980-02-05 1983-01-04 Ciba-Geigy Corporation Photocrosslinkable polymers with thioxanthone and imidyl groupings in side chains
US4269724A (en) 1980-02-13 1981-05-26 Hodson James V Composition for paint stripper
NL8001016A (nl) * 1980-02-22 1981-09-16 Kluthe Gmbh Chem Werke Toepassing van methylalcohol als stabilisator tegen explosiegevaar in een ontvettingsmiddel uit dichloormethaan voor metaaloppervlakken.
US4278557A (en) 1980-04-15 1981-07-14 The United States Of America As Represented By The Secretary Of The Air Force Solvent mixture for dissolving and removing epoxy resinous compounds

Also Published As

Publication number Publication date
FI840593A0 (fi) 1984-02-14
CA1193177A (en) 1985-09-10
DE3471770D1 (en) 1988-07-07
FI78310B (fi) 1989-03-31
EP0116343A3 (en) 1985-10-30
FI840593A (fi) 1984-08-15
HK79489A (en) 1989-10-13
JPS59157639A (ja) 1984-09-07
EP0116343B1 (en) 1988-06-01
EP0116343A2 (en) 1984-08-22
US4438192A (en) 1984-03-20
NO165218C (no) 1991-01-09
FI78310C (fi) 1989-07-10
NO840515L (no) 1984-08-15
NO165218B (no) 1990-10-01

Similar Documents

Publication Publication Date Title
KR840008031A (ko) 알콜-가솔린 혼합물의 조성을 측정하는 방법 및 장치
MX164962B (es) Mejoras en metodo de deshidrociclizar alcanos
IT1174575B (it) Composizione e metodo di pulitura
IT1169754B (it) Composizione di rivestimento anti-incrostazione e metodo anti-incrostazione
BR8300468A (pt) Composicao raticida isenta de acucar e aperfeicoamento no metodo para a preparacao de composicoes raticidas
BR8304723A (pt) Composicao de solidos e processo para sua preparacao; coposicao de revestimento
ES532970A0 (es) Perfeccionamientos en los recipientes y metodos y aparato para su fabricacion
IT1110115B (it) Metodo ed apparato per la sbavatura di pezzi
BR8400680A (pt) Composicoes para remocao de filmes fotoresistente e metodo de uso
ES535764A0 (es) Metodo y aparato para la combustion de una mezcla de carbon-aire
BR8001171A (pt) Metodo e mecanismo para recortar aparas de madeira
ES535534A0 (es) Procedimiento para la obtencion de -aril-1h-azol-1-etanoles
BR8107320A (pt) Compostos processo para sua preparacao composicao farmaceutica e uso
BR8200487A (pt) Metodo e dispositivo para o preparo anaerobio de residuos
ES537214A0 (es) Aparato para licuar materiales en tandas
AR231451A1 (es) Metodo para la preparacion de n-fosfonometilglicina
BR8303291A (pt) Metodo e aparelho de retardo ajustado automaticamente para tipamatica de tempo marcado
AR227249A1 (es) Metodo y aparato para bobinado de filamentos
MX13292A (es) Un derivado de pirrol ortocondensado y procedimiento para su preparacion
BR8404097A (pt) Metodo e aparelho para selecionar fechos corredicos
BR8402298A (pt) Composicao de dinitroanilina estabilizada e processo para sua preparacao
ES527673A0 (es) Procedimiento para la eliminacion de los mercaptanos contenidos en gases
MX174227B (es) Composicion de mezclas anhidras de paraclorometaxilenol y metodo para su preparacion
MX162790A (es) Metodo para colorear una composicion hidrofosica anhidra
FI830379A0 (fi) Kompositioner och metoder foer reducering av vaextskador

Legal Events

Date Code Title Description
MM Lapse due to non-payment of fees (art. 50)