BR112016006084B8 - Dispositivo e método para evacuação de uma câmara de filme - Google Patents
Dispositivo e método para evacuação de uma câmara de filmeInfo
- Publication number
- BR112016006084B8 BR112016006084B8 BR112016006084A BR112016006084A BR112016006084B8 BR 112016006084 B8 BR112016006084 B8 BR 112016006084B8 BR 112016006084 A BR112016006084 A BR 112016006084A BR 112016006084 A BR112016006084 A BR 112016006084A BR 112016006084 B8 BR112016006084 B8 BR 112016006084B8
- Authority
- BR
- Brazil
- Prior art keywords
- film chamber
- evacuating
- vacuum pump
- vacuum
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
- F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
- Examining Or Testing Airtightness (AREA)
- Jet Pumps And Other Pumps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013219464.1A DE102013219464A1 (de) | 2013-09-26 | 2013-09-26 | Evakuierung einer Folienkammer |
| DE102013219464.1 | 2013-09-26 | ||
| PCT/EP2014/069584 WO2015043993A2 (de) | 2013-09-26 | 2014-09-15 | Evakuierung einer folienkammer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| BR112016006084A2 BR112016006084A2 (pt) | 2017-08-01 |
| BR112016006084B1 BR112016006084B1 (pt) | 2022-03-29 |
| BR112016006084B8 true BR112016006084B8 (pt) | 2022-04-26 |
Family
ID=51542367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR112016006084A BR112016006084B8 (pt) | 2013-09-26 | 2014-09-15 | Dispositivo e método para evacuação de uma câmara de filme |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10844877B2 (https=) |
| EP (1) | EP3049787B1 (https=) |
| JP (1) | JP6511437B2 (https=) |
| CN (1) | CN105659062B (https=) |
| AU (1) | AU2014327511B2 (https=) |
| BR (1) | BR112016006084B8 (https=) |
| DE (1) | DE102013219464A1 (https=) |
| WO (1) | WO2015043993A2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014224799A1 (de) * | 2014-12-03 | 2016-06-09 | Inficon Gmbh | Dichtheitsprüfung mit Trägergas in Folienkammer |
| DE202015007985U1 (de) | 2015-11-19 | 2017-02-21 | Leybold Gmbh | Vorrichtung zum Speichern kinetischer Energie |
| DE102017201004A1 (de) * | 2017-01-23 | 2018-07-26 | Inficon Gmbh | Folienkammer mit Doppelfolie |
| EP3567356B1 (en) * | 2018-05-07 | 2021-02-24 | Inficon GmbH | Sniffing leak detector with switching valve and buffer chamber |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE96304C (https=) | ||||
| DE82183C (https=) | ||||
| DD96304A1 (https=) * | 1972-02-29 | 1973-03-12 | ||
| JPS6024057U (ja) | 1983-07-27 | 1985-02-19 | 日本電子株式会社 | 電子顕微鏡等の排気装置 |
| DE3639512A1 (de) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vakuumpumpsystem mit einer waelzkolbenpumpe |
| US4791806A (en) * | 1987-10-23 | 1988-12-20 | Wade James H | Leak detection system |
| DE3828588C1 (https=) * | 1988-08-23 | 1989-12-07 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De | |
| FR2653558B1 (fr) * | 1989-10-23 | 1994-06-10 | Cit Alcatel | Systeme de detection de fuites a gaz traceur. |
| DE58906917D1 (de) * | 1989-12-15 | 1994-03-17 | Alcatel Hochvakuumtechnik Gmbh | Vorrichtung und Verfahren zur Leckprüfung. |
| JPH07325279A (ja) | 1994-06-01 | 1995-12-12 | Dainippon Screen Mfg Co Ltd | 減圧処理装置及び方法 |
| DE19524609A1 (de) * | 1995-07-06 | 1997-01-09 | Leybold Ag | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
| JP3568667B2 (ja) | 1996-01-19 | 2004-09-22 | 株式会社アルバック | 漏洩検査装置 |
| DE19642099A1 (de) | 1996-10-12 | 1998-04-16 | Leybold Vakuum Gmbh | Prüfung der Dichtheit von Verpackungen |
| DE19929519A1 (de) * | 1999-06-28 | 2001-01-04 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
| DE19935293A1 (de) * | 1999-07-27 | 2001-02-01 | Leybold Vakuum Gmbh | Folienlecksuchkammer |
| DE50015394D1 (de) * | 1999-12-22 | 2008-11-20 | Inficon Gmbh | Verfahren zum betrieb eines folien-lecksuchers sowie für die durchführung dieses verfahrens geeigneter folien-lecksucher |
| JP4567270B2 (ja) * | 1999-12-22 | 2010-10-20 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | シート型漏洩探査器を運転する方法並びに該方法を実施するために適したシート型探査器 |
| US6589023B2 (en) * | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
| US7204127B2 (en) * | 2003-06-11 | 2007-04-17 | Varian, Inc. | Method and apparatus for large leak testing |
| EP1701899A1 (en) * | 2004-01-07 | 2006-09-20 | Walker-Dawson Interests, Inc. | Vacuum container system and related method |
| US7189066B2 (en) * | 2004-05-14 | 2007-03-13 | Varian, Inc. | Light gas vacuum pumping system |
| GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
| DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
| DE102005042451B4 (de) * | 2005-09-06 | 2007-07-26 | Vacuubrand Gmbh + Co Kg | Vakuumpumpvorrichtung |
| GB0607616D0 (en) * | 2006-04-18 | 2006-05-31 | Boc Group Plc | Vacuum pumping system |
| ES2818976T3 (es) * | 2009-12-24 | 2021-04-14 | Sumitomo Seika Chemicals | Dispositivo de supresión de vibraciones del gas de escape en un aparato con doble bomba de vacío |
| DE102011086486B4 (de) | 2011-11-16 | 2023-01-19 | Inficon Gmbh | Vorrichtung und Verfahren zur schnellen Lecksuche an formsteifen/schlaffen Verpackungen ohne Zusatz von Prüfgas |
| DE102012200063A1 (de) * | 2012-01-03 | 2013-07-04 | Inficon Gmbh | Verfahren zur Lecksuche an einem nicht formstarren Prüfling |
| JP6009193B2 (ja) * | 2012-03-30 | 2016-10-19 | 株式会社荏原製作所 | 真空排気装置 |
-
2013
- 2013-09-26 DE DE102013219464.1A patent/DE102013219464A1/de not_active Withdrawn
-
2014
- 2014-09-15 JP JP2016515472A patent/JP6511437B2/ja active Active
- 2014-09-15 US US15/023,087 patent/US10844877B2/en active Active
- 2014-09-15 BR BR112016006084A patent/BR112016006084B8/pt active IP Right Grant
- 2014-09-15 AU AU2014327511A patent/AU2014327511B2/en active Active
- 2014-09-15 WO PCT/EP2014/069584 patent/WO2015043993A2/de not_active Ceased
- 2014-09-15 CN CN201480051739.3A patent/CN105659062B/zh active Active
- 2014-09-15 EP EP14766464.3A patent/EP3049787B1/de active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10844877B2 (en) | 2020-11-24 |
| AU2014327511B2 (en) | 2018-10-04 |
| CN105659062B (zh) | 2019-08-09 |
| WO2015043993A3 (de) | 2015-05-21 |
| US20160258448A1 (en) | 2016-09-08 |
| JP2016537542A (ja) | 2016-12-01 |
| DE102013219464A1 (de) | 2015-03-26 |
| EP3049787B1 (de) | 2018-10-24 |
| JP6511437B2 (ja) | 2019-05-15 |
| BR112016006084B1 (pt) | 2022-03-29 |
| WO2015043993A2 (de) | 2015-04-02 |
| AU2014327511A1 (en) | 2016-04-07 |
| AU2014327511A2 (en) | 2016-06-16 |
| CN105659062A (zh) | 2016-06-08 |
| BR112016006084A2 (pt) | 2017-08-01 |
| EP3049787A2 (de) | 2016-08-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
| B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
| B09A | Decision: intention to grant [chapter 9.1 patent gazette] | ||
| B16A | Patent or certificate of addition of invention granted [chapter 16.1 patent gazette] |
Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 15/09/2014, OBSERVADAS AS CONDICOES LEGAIS. |
|
| B16C | Correction of notification of the grant [chapter 16.3 patent gazette] |
Free format text: REF. RPI 2673 DE 2673 29/03/2022 QUANTO AO INVENTOR. |