BR112015008211B1 - circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio - Google Patents

circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio Download PDF

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Publication number
BR112015008211B1
BR112015008211B1 BR112015008211-4A BR112015008211A BR112015008211B1 BR 112015008211 B1 BR112015008211 B1 BR 112015008211B1 BR 112015008211 A BR112015008211 A BR 112015008211A BR 112015008211 B1 BR112015008211 B1 BR 112015008211B1
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BR
Brazil
Prior art keywords
region
integrated circuit
medium
functionalized
transistor
Prior art date
Application number
BR112015008211-4A
Other languages
English (en)
Portuguese (pt)
Other versions
BR112015008211A2 (pt
Inventor
Johan Hendrik Klootwijk
Marleen Mescher
Pascal De Graaf
Bout Marcelis
Original Assignee
Koninklijke Philips N.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips N.V. filed Critical Koninklijke Philips N.V.
Publication of BR112015008211A2 publication Critical patent/BR112015008211A2/pt
Publication of BR112015008211B1 publication Critical patent/BR112015008211B1/pt

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148Integrated circuits therefor, e.g. fabricated by CMOS processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117Shapes of semiconductor bodies
    • H10D62/118Nanostructure semiconductor bodies
    • H10D62/119Nanowire, nanosheet or nanotube semiconductor bodies
    • H10D62/121Nanowire, nanosheet or nanotube semiconductor bodies oriented parallel to substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/235Channel regions of field-effect devices of FETs of IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
BR112015008211-4A 2012-10-16 2013-10-11 circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio BR112015008211B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261714400P 2012-10-16 2012-10-16
US61/714,400 2012-10-16
PCT/IB2013/059296 WO2014060916A1 (en) 2012-10-16 2013-10-11 Integrated circuit with sensing transistor array, sensing apparatus and measuring method

Publications (2)

Publication Number Publication Date
BR112015008211A2 BR112015008211A2 (pt) 2017-07-04
BR112015008211B1 true BR112015008211B1 (pt) 2020-05-19

Family

ID=49911749

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112015008211-4A BR112015008211B1 (pt) 2012-10-16 2013-10-11 circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio

Country Status (7)

Country Link
US (1) US10302590B2 (https=)
EP (1) EP2909616A1 (https=)
JP (1) JP6353454B2 (https=)
CN (1) CN104737008B (https=)
BR (1) BR112015008211B1 (https=)
RU (1) RU2650087C2 (https=)
WO (1) WO2014060916A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9797976B2 (en) * 2013-12-11 2017-10-24 Taiwan Semiconductor Manufacturing Company Biosensor calibration system and related method
US10067070B2 (en) * 2015-11-06 2018-09-04 Applied Materials, Inc. Particle monitoring device
WO2018056995A1 (en) * 2016-09-23 2018-03-29 Hewlett-Packard Development Company, L.P. Fluid ejection device and particle detector
US10447202B2 (en) * 2017-02-08 2019-10-15 Texas Instruments Incorporated Apparatus for communication across a capacitively coupled channel
JP6740949B2 (ja) * 2017-03-31 2020-08-19 日立金属株式会社 ガスセンサ
US11531027B2 (en) * 2017-12-01 2022-12-20 University Of Florida Research Foundation, Inc. Low cost disposable medical sensor fabricated on glass, paper or plastics
FR3077926B1 (fr) * 2018-02-15 2023-04-14 St Microelectronics Crolles 2 Sas Dispositif de detection, en particulier incorpore dans un ph-metre, et procede de realisation correspondant.
EP3853604B1 (en) * 2018-09-21 2025-05-07 Teralytic Holdings Inc. Extensible, multimodal sensor fusion platform for remote, proximal soil sensing
CN114674897B (zh) * 2022-03-28 2023-06-06 深圳大学 一种用于检测单细胞外pH值的探针型有机电化学晶体管传感器及其制备方法、检测方法
EP4332562A1 (en) * 2022-09-02 2024-03-06 IQ Biozoom Sp. z o.o. A mesfet biosensor and a biosensing kit
CN118191066B (zh) * 2024-05-16 2024-10-22 中国科学院上海微系统与信息技术研究所 一种双栅硅纳米线晶体管传感器及制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040136866A1 (en) 2002-06-27 2004-07-15 Nanosys, Inc. Planar nanowire based sensor elements, devices, systems and methods for using and making same
US20060263255A1 (en) * 2002-09-04 2006-11-23 Tzong-Ru Han Nanoelectronic sensor system and hydrogen-sensitive functionalization
RU2257567C1 (ru) * 2004-05-19 2005-07-27 Воронежский государственный технический университет Твердотельный интегральный датчик газов
US20060188934A1 (en) * 2005-02-22 2006-08-24 Ying-Lan Chang System and method for implementing a high-sensitivity sensor with improved stability
TWI287041B (en) * 2005-04-27 2007-09-21 Jung-Tang Huang An ultra-rapid DNA sequencing method with nano-transistors array based devices
FR2886459B1 (fr) * 2005-05-31 2007-08-24 Thales Sa Reseau de transistors fet a nanotube ou nanofil semi-conducteur et dispositif electronique correspondant, pour la detection d'analytes
US8349604B2 (en) 2006-06-15 2013-01-08 University Of South Florida Nano-based device for detection of disease biomarkers and other target molecules
KR100799577B1 (ko) 2006-08-31 2008-01-30 한국전자통신연구원 가스 및 생화학물질 감지용 센서 제조 방법과 그 센서를포함하는 집적회로 및 그 제조 방법
WO2008063901A1 (en) * 2006-11-17 2008-05-29 Trustees Of Boston University Nanochannel-based sensor system for use in detecting chemical or biological species
IL189576A0 (en) * 2008-02-18 2008-12-29 Technion Res & Dev Foundation Chemically sensitive field effect transistors for explosive detection
WO2009124111A2 (en) * 2008-04-01 2009-10-08 Trustees Of Boston University Glucose sensor employing semiconductor nanoelectronic device
CN102132153B (zh) * 2008-08-25 2014-08-20 Nxp股份有限公司 减小电子设备中的电容性充电
TWI383144B (zh) 2008-09-23 2013-01-21 Univ Nat Chiao Tung 感測元件、製造方法及其生物檢測系統
US20100219085A1 (en) 2009-02-27 2010-09-02 Edwards Lifesciences Corporation Analyte Sensor Offset Normalization
WO2010120297A1 (en) 2009-04-15 2010-10-21 Hewlett-Packard Development Company, L.P Nanowire sensor having a nanowire and electrically conductive film
KR101217576B1 (ko) 2009-09-22 2013-01-03 한국전자통신연구원 바이오 센서 및 그의 구동 방법
US8368123B2 (en) * 2009-12-23 2013-02-05 Nokia Corporation Apparatus for sensing an event

Also Published As

Publication number Publication date
EP2909616A1 (en) 2015-08-26
WO2014060916A1 (en) 2014-04-24
US20150276667A1 (en) 2015-10-01
RU2015118418A (ru) 2016-12-10
RU2650087C2 (ru) 2018-04-06
CN104737008B (zh) 2017-06-09
JP6353454B2 (ja) 2018-07-04
CN104737008A (zh) 2015-06-24
BR112015008211A2 (pt) 2017-07-04
JP2016502644A (ja) 2016-01-28
US10302590B2 (en) 2019-05-28

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 11/10/2013, OBSERVADAS AS CONDICOES LEGAIS.