BR0113141A - Método para o tratamento de um substrato metálico por plasma e dispositivo para o tratamento de um substrato metálico por plasma - Google Patents

Método para o tratamento de um substrato metálico por plasma e dispositivo para o tratamento de um substrato metálico por plasma

Info

Publication number
BR0113141A
BR0113141A BR0113141-9A BR0113141A BR0113141A BR 0113141 A BR0113141 A BR 0113141A BR 0113141 A BR0113141 A BR 0113141A BR 0113141 A BR0113141 A BR 0113141A
Authority
BR
Brazil
Prior art keywords
substrate
treatment
metal substrate
plasma
plasma metal
Prior art date
Application number
BR0113141-9A
Other languages
English (en)
Inventor
Pierre Vanden Brande
Alain Weymeersch
Original Assignee
Cold Plasma Applic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8171886&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=BR0113141(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cold Plasma Applic filed Critical Cold Plasma Applic
Publication of BR0113141A publication Critical patent/BR0113141A/pt

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32623Mechanical discharge control means
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34Methods of heating
    • C21D1/38Heating by cathodic discharges
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54Furnaces for treating strips or wire
    • C21D9/56Continuous furnaces for strip or wire
    • C21D9/561Continuous furnaces for strip or wire with a controlled atmosphere or vacuum
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/3266Magnetic control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

"MéTODO PARA O TRATAMENTO DE UM SUBSTRATO METáLICO POR PLASMA E DISPOSITIVO PARA O TRATAMENTO DE UM SUBSTRATO METáLICO POR PLASMA". A invenção refere-se a um método para tratamento, em particular para limpeza e/ou aquecimento, de um substrato metálico (1) movimentando-se de forma substancialmente contínua numa câmara de vácuo (3) possuindo uma zona de tratamento na qual uma descarga elétrica (10), que é plasma, e um campo magnético são produzidos num gás mantido a uma pressão mais baixa que a pressão atmosférica entre pelo menos o substrato (1) formando um eletrodo, e pelo menos um contra-eletrodo (9) de modo que o substrato (1) seja bombardeado com íons produzidos na descarga elétrica (10). Dito método é caracterizado pelo fato de que um campo de indução de confinamento magnético é gerado em toda a volta do substrato (1) na zona de tratamento de modo que a descarga elétrica (10) é da mesma forma confinada totalmente em volta do substrato (1) em dita zona de tratamento pelo confinamento dos elétrons liberados pela descarga elétrica (10).
BR0113141-9A 2000-08-04 2001-08-06 Método para o tratamento de um substrato metálico por plasma e dispositivo para o tratamento de um substrato metálico por plasma BR0113141A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00202764A EP1178134A1 (fr) 2000-08-04 2000-08-04 Procédé et dispositif pour traiter des substrats métalliques au défilé par plasma
PCT/BE2001/000130 WO2002012591A1 (fr) 2000-08-04 2001-08-06 Procede et dispositif pour traiter des substrats metalliques au defile par plasma

Publications (1)

Publication Number Publication Date
BR0113141A true BR0113141A (pt) 2003-07-08

Family

ID=8171886

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0113141-9A BR0113141A (pt) 2000-08-04 2001-08-06 Método para o tratamento de um substrato metálico por plasma e dispositivo para o tratamento de um substrato metálico por plasma

Country Status (8)

Country Link
US (1) US6933460B2 (pt)
EP (2) EP1178134A1 (pt)
JP (1) JP2004506096A (pt)
AU (1) AU2001283717A1 (pt)
BR (1) BR0113141A (pt)
CA (1) CA2423138A1 (pt)
WO (1) WO2002012591A1 (pt)
ZA (1) ZA200301533B (pt)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT414215B (de) * 2003-02-12 2006-10-15 Peter Ziger Anlage zur plasmaprozessierung
CN1716557A (zh) * 2004-02-25 2006-01-04 库力索法投资公司 用于引线焊接机的激光清洁系统
US7737382B2 (en) * 2004-04-01 2010-06-15 Lincoln Global, Inc. Device for processing welding wire
TW200635085A (en) * 2005-01-20 2006-10-01 Barnes Group Inc LED assembly having overmolded lens on treated leadframe and method therefor
US20060219754A1 (en) * 2005-03-31 2006-10-05 Horst Clauberg Bonding wire cleaning unit and method of wire bonding using same
FR2887737B1 (fr) * 2005-06-24 2007-09-07 Celes Sa Four a induction pour traiter des bandes, toles, plaques, en materiau conducteur de l'electricite, et inducteur pour un tel four
FR2887738B1 (fr) * 2005-06-24 2007-08-24 Celes Sa Four a induction pour traitement de bandes, toles, plaques, en materiau conducteur de l'electricite, et inducteur pour un tel four
JP5870325B2 (ja) * 2006-02-14 2016-02-24 大学共同利用機関法人自然科学研究機構 水素貯蔵金属又は合金の初期活性化方法及び水素化方法
AT504466B1 (de) * 2006-10-25 2009-05-15 Eiselt Primoz Verfahren und vorrichtung zur entfettung von gegenständen oder materialien mittels oxidativer radikale
EP2053631A1 (fr) * 2007-10-22 2009-04-29 Industrial Plasma Services & Technologies - IPST GmbH Procédé et dispositif pour le traitement par plasma de substrats au défilé
BE1017852A3 (fr) 2007-11-19 2009-09-01 Ind Plasma Services & Technologies Ipst Gmbh Procede et installation de galvanisation par evaporation plasma.
WO2009126850A1 (en) * 2008-04-11 2009-10-15 The Timken Company Inductive heating using permanent magnets for hardening of gear teeth and components alike
US8138677B2 (en) * 2008-05-01 2012-03-20 Mark Edward Morehouse Radial hall effect ion injector with a split solenoid field
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
DK2251453T3 (da) 2009-05-13 2014-07-07 Sio2 Medical Products Inc Beholderholder
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
MY162497A (en) * 2009-10-16 2017-06-15 Linde Ag Cleaning of copper wire using plasma or activated gas
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US8993942B2 (en) 2010-10-11 2015-03-31 The Timken Company Apparatus for induction hardening
WO2012057967A2 (en) * 2010-10-27 2012-05-03 Applied Materials, Inc. Methods and apparatus for controlling photoresist line width roughness
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
WO2012090421A1 (ja) * 2010-12-28 2012-07-05 キヤノンアネルバ株式会社 プラズマcvd装置
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
JP6382830B2 (ja) 2012-11-30 2018-08-29 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 医療シリンジ、カートリッジ等上でのpecvd堆積の均一性制御
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CN110074968B (zh) 2013-03-11 2021-12-21 Sio2医药产品公司 涂布包装材料
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
EP3122917B1 (en) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
JP2018523538A (ja) 2015-08-18 2018-08-23 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 低酸素透過速度を有する薬剤包装及び他の包装
US10545534B2 (en) * 2016-12-31 2020-01-28 Lenovo (Singapore) Pte. Ltd. Multiple display device
EP4084040A1 (en) 2021-04-29 2022-11-02 voestalpine Stahl GmbH Method and devices for plasma treatment
CN116364541B (zh) * 2023-05-30 2023-08-08 艾瑞森表面技术(苏州)股份有限公司 等离子蚀刻方法及等离子蚀刻系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3654108A (en) * 1969-09-23 1972-04-04 Air Reduction Method for glow cleaning
FR2555362B1 (fr) * 1983-11-17 1990-04-20 France Etat Procede et dispositif de traitement d'un materiau semi-conducteur, par plasma
NL8602760A (nl) * 1986-10-31 1988-05-16 Bekaert Sa Nv Werkwijze en inrichting voor het reinigen van een langwerpig substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde voorwerpen.
US5003225A (en) * 1989-01-04 1991-03-26 Applied Microwave Plasma Concepts, Inc. Method and apparatus for producing intense microwave pulses
EP0396919A3 (en) * 1989-05-08 1991-07-10 Applied Materials, Inc. Plasma reactor and method for semiconductor processing
US5242561A (en) * 1989-12-15 1993-09-07 Canon Kabushiki Kaisha Plasma processing method and plasma processing apparatus
DE4211167A1 (de) * 1992-03-31 1993-10-07 Thaelmann Schwermaschbau Veb Verfahren und Vorrichtung zur kontinuierlichen thermischen Oberflächenbehandlung stab- bzw. strangförmiger Materialien mit metallischer Oberfläche
US5670415A (en) * 1994-05-24 1997-09-23 Depositech, Inc. Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment
US5811022A (en) * 1994-11-15 1998-09-22 Mattson Technology, Inc. Inductive plasma reactor
US5577090A (en) * 1995-01-12 1996-11-19 Moses; Kenneth G. Method and apparatus for product x-radiation
BE1010913A3 (fr) * 1997-02-11 1999-03-02 Cockerill Rech & Dev Procede de recuit d'un substrat metallique au defile.

Also Published As

Publication number Publication date
JP2004506096A (ja) 2004-02-26
US6933460B2 (en) 2005-08-23
AU2001283717A1 (en) 2002-02-18
WO2002012591A1 (fr) 2002-02-14
ZA200301533B (en) 2004-02-25
US20040026412A1 (en) 2004-02-12
EP1307607A1 (fr) 2003-05-07
EP1178134A1 (fr) 2002-02-06
CA2423138A1 (fr) 2002-02-14

Similar Documents

Publication Publication Date Title
BR0113141A (pt) Método para o tratamento de um substrato metálico por plasma e dispositivo para o tratamento de um substrato metálico por plasma
US9339783B2 (en) Tubular floating electrode dielectric barrier discharge for applications in sterilization and tissue bonding
Choi et al. Analysis of sterilization effect by pulsed dielectric barrier discharge
SE0102134D0 (sv) Method and apparatus for plasma generation
CA2284242C (en) Glow plasma discharge device
Janca et al. Investigation of the chemical action of the gliding and “point” arcs between the metallic electrode and aqueous solution
TW200644118A (en) Plasma processor
BR0314537A (pt) Dispositivo para realizar um processo otimizado a plasma
WO2006077582A3 (en) System and method for treating biological tissue with a plasma gas discharge
ATE139268T1 (de) Einrichtung zum plasmagestützten elektronenstrahl-hochratebedampfen
PL1619265T3 (pl) Sposób i układ do powlekania wewnętrznych powierzchni prefabrykowanych przewodów rurowych w terenie
WO1998042002A9 (en) Glow plasma discharge device
ES2138755T3 (es) Aparato para producir una descarga en arco lineal, para un tratamiento por plasma.
SE0302045D0 (sv) Work piece processing by pulsed electric discharges in solid-gas plasmas
AU6248499A (en) Ac glow plasma discharge device having an electrode covered with apertured dielectric
DE60231256D1 (de) Suszeptorsystem
KR910002310A (ko) 플라즈마 처리장치
BR0307769A (pt) Processo de limpeza por plasma da superfìcie de um material recoberto com uma substância orgânica, e instalação para a sua realização
EP0247397A3 (en) Apparatus for the surface treatment of work pieces
WO2006103287A3 (fr) Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux
Gavrilov et al. High-current pulse sources of broad beams of gas and metal ions for surface treatment
Korbut et al. Emission properties of an atmospheric-pressure helium plasma jet generated by a barrier discharge
US8835797B2 (en) Method and device for the plasma treatment of running metal substrates
JP5241169B2 (ja) 誘電面をイオンビーム処理する方法、および当該方法を実施するための装置
ATE479196T1 (de) Hochfrequenz-elektronenquelle, insbesondere neutralisator

Legal Events

Date Code Title Description
B11A Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing
B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]