BR0001637A - Revestimento para reduzir as temperaturas de operação dos componentes da câmara de um aparelho de revestimento - Google Patents

Revestimento para reduzir as temperaturas de operação dos componentes da câmara de um aparelho de revestimento

Info

Publication number
BR0001637A
BR0001637A BR0001637-3A BR0001637A BR0001637A BR 0001637 A BR0001637 A BR 0001637A BR 0001637 A BR0001637 A BR 0001637A BR 0001637 A BR0001637 A BR 0001637A
Authority
BR
Brazil
Prior art keywords
coating
reduce
layer
operating temperatures
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
BR0001637-3A
Other languages
English (en)
Inventor
William Randolph Stowell
John Frederick Ackerman
Jeffrey Allen Conner
John Douglas Evans
Antonio Frank Maricocchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of BR0001637A publication Critical patent/BR0001637A/pt
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)

Abstract

Patente de Invenção: <B>"REVESTIMENTO PARA REDUZIR AS TEMPERATURAS DE OPERAçãO DOS COMPONENTES DA CâMARA DE UM APARELHO DE REVESTIMENTO"<D>. Um componente (10) para utilização em um ambiente de alta temperatura tal como uma câmara de revestimento de um aparelho de PVD. Uma camada refletiva (14) sobre o componente (10) serve como uma barreira para uma transferência de calor radiante para o componente (10) pela reflexão da radiação térmica. O revestimento (14) compreende pelo menos um par de camadas refletivas (16, 18, 20, 22), cada camada (16, 18, 20, 22) sendo formada de um material que é essencialmente transparente aos comprimentos de ondas eletromagnéticas de entre 500 e 3000 nanómetros (nm). Em adição, o material da camada mais externa (18, 22) do par (16, 18, 20, 22) tem um índice de refração mais alto que o material da outra camada (16, 20) do par (16, 18, 20, 22).
BR0001637-3A 1999-04-19 2000-04-18 Revestimento para reduzir as temperaturas de operação dos componentes da câmara de um aparelho de revestimento Pending BR0001637A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/293,965 US6181727B1 (en) 1999-04-19 1999-04-19 Coating for reducing operating temperatures of chamber components of a coating apparatus

Publications (1)

Publication Number Publication Date
BR0001637A true BR0001637A (pt) 2000-10-31

Family

ID=23131315

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0001637-3A Pending BR0001637A (pt) 1999-04-19 2000-04-18 Revestimento para reduzir as temperaturas de operação dos componentes da câmara de um aparelho de revestimento

Country Status (6)

Country Link
US (1) US6181727B1 (pt)
EP (1) EP1091017B1 (pt)
JP (1) JP4896287B2 (pt)
BR (1) BR0001637A (pt)
DE (1) DE60041527D1 (pt)
SG (1) SG84588A1 (pt)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002103092A1 (fr) * 2001-06-14 2002-12-27 Shin-Etsu Handotai Co., Ltd. Dispositif permettant la production d'un monocristal semi-conducteur et procede permettant de produire un monocristal semi-conducteur au moyen de ce dispositif
US6889568B2 (en) * 2002-01-24 2005-05-10 Sensarray Corporation Process condition sensing wafer and data analysis system
US20050100757A1 (en) * 2003-11-12 2005-05-12 General Electric Company Thermal barrier coating having a heat radiation absorbing topcoat
US8604361B2 (en) * 2005-12-13 2013-12-10 Kla-Tencor Corporation Component package for maintaining safe operating temperature of components
TWI405281B (zh) * 2005-12-13 2013-08-11 Sensarray Corp 製程條件感應晶圓及資料分析系統
PL1979677T3 (pl) * 2006-01-27 2013-02-28 Fosbel Intellectual Ltd Ulepszenia trwałości i działania końcówek pochodni
US9677180B2 (en) * 2010-12-30 2017-06-13 Rolls-Royce Corporation Engine hot section component and method for making the same
EP3105509B1 (en) 2014-02-07 2020-08-05 United Technologies Corporation Combustor comprising multi-layer coated panel and method of fabricating an article having multi-layered coating
KR102496476B1 (ko) * 2015-11-19 2023-02-06 삼성전자주식회사 전자기파 반사체 및 이를 포함하는 광학소자
US20180016919A1 (en) * 2016-07-12 2018-01-18 Delavan Inc Thermal barrier coatings with enhanced reflectivity

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186875A (ja) * 1987-01-29 1988-08-02 Tadahiro Omi 表面反応成膜装置
GB9400323D0 (en) * 1994-01-10 1994-03-09 Pilkington Glass Ltd Coatings on glass
JP3362552B2 (ja) * 1995-03-10 2003-01-07 東京エレクトロン株式会社 成膜処理装置
JP3341619B2 (ja) * 1997-03-04 2002-11-05 東京エレクトロン株式会社 成膜装置
US6021152A (en) * 1997-07-11 2000-02-01 Asm America, Inc. Reflective surface for CVD reactor walls
KR100286325B1 (ko) * 1997-11-27 2001-05-02 김영환 화학기상증착 장비의 가열장치

Also Published As

Publication number Publication date
EP1091017B1 (en) 2009-02-11
JP4896287B2 (ja) 2012-03-14
EP1091017A2 (en) 2001-04-11
JP2000355756A (ja) 2000-12-26
DE60041527D1 (de) 2009-03-26
US6181727B1 (en) 2001-01-30
SG84588A1 (en) 2001-11-20
EP1091017A3 (en) 2003-07-02

Similar Documents

Publication Publication Date Title
BR0001637A (pt) Revestimento para reduzir as temperaturas de operação dos componentes da câmara de um aparelho de revestimento
Ly et al. A dual‐mode infrared asymmetric photonic structure for all‐season passive radiative cooling and heating
DE60130496D1 (de) Laser-plasma aus metal und nanopartikel
Flamant et al. Opportunities for minimizing radiative heat transfer in future thermal and environmental barrier coatings
BR112014016349A2 (pt) filmes retardadores de meios efetivos com redução da birrefringência espacialmente seletiva
BR0010572A (pt) Portador projetado para um ou diversos componentes eletrônicos, e, processo para fabricar um portador substancialmente condutor de calor para um componente eletrônico
Kamanina et al. Absorption spectra and optical limiting of the fullerene–polyimide system
Pan et al. 3D Anisotropic Polyethylene as Light‐Responsive Grippers and Surfing Divers
Dai et al. Direct‐printing hydrogel‐based platform for humidity‐driven dynamic full‐color printing and holography
Guan et al. Ultra‐High Transmission Broadband Tunable VO2 Optical Limiter
Lee et al. Compositional effects on the optical and thermal properties of sodium borophosphate glasses
Yulin et al. Interface-engineered EUV multilayer mirrors
BR9907444A (pt) Aparelho de aquecimento para uma operação de soldagem e método para o mesmo
Wang et al. Multithermally invisible cloaks and sensors with complex shapes
Shakhgil’dyan et al. Effect of sitallization conditions on the hardness of transparent sitalls in the system ZnO–MgO–Al 2 O 3–SiO 2
Pickles et al. Optical performance of chemically vapour-deposited diamond at infrared wavelengths
TW201346440A (zh) 在極紫外光光罩檢查工具中之溫度控制
Suzuki et al. Application of CO2 laser heating zone drawing and zone annealing to nylon 6 fibers
US20180372424A1 (en) Vapor chamber that emits a non-uniform radiative heat flux
BRPI0518184A (pt) dispositivo de emanação de vapor
Honda et al. Effect of temperature and irradiation on fused silica optical fiber for temperature measurement
Ling et al. Defect induced thermal-plasma coupling damage in optical films under nanosecond pulse laser irradiation
Zuo et al. Enhanced laser-induced plasma channels in air
Ren et al. Thermal effects of the narrow band filter irradiated by laser at oblique incidence
TWI476439B (zh) 減少熱畸變之Ｗｙｎｎ－Ｄｙｓｏｎ成像系統

Legal Events

Date Code Title Description
B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]

Free format text: INDEFIRO O PRESENTE PEDIDO DE PATENTE COMO INVENCAO - DE ACORDO COM O ART. 8O DA LPI.

B09B Patent application refused [chapter 9.2 patent gazette]

Free format text: MANTIDO O INDEFERIMENTO UMA VEZ QUE NAO FOI APRESENTADO RECURSO DENTRO DO PRAZO LEGAL.