BE893883Q - Procede de decapage de surfaces en cuivre ou en alliages de cuivre - Google Patents
Procede de decapage de surfaces en cuivre ou en alliages de cuivreInfo
- Publication number
- BE893883Q BE893883Q BE0/208628A BE208628A BE893883Q BE 893883 Q BE893883 Q BE 893883Q BE 0/208628 A BE0/208628 A BE 0/208628A BE 208628 A BE208628 A BE 208628A BE 893883 Q BE893883 Q BE 893883Q
- Authority
- BE
- Belgium
- Prior art keywords
- copper
- etching solution
- oxidizing agent
- stripping
- etching
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Crushing And Grinding (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2850542A DE2850542C2 (de) | 1978-11-22 | 1978-11-22 | Verfahren zum Ätzen von Oberflächen aus Kupfer oder Kupferlegierungen |
Publications (1)
Publication Number | Publication Date |
---|---|
BE893883Q true BE893883Q (fr) | 1982-11-16 |
Family
ID=6055278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE0/208628A BE893883Q (fr) | 1978-11-22 | 1982-07-20 | Procede de decapage de surfaces en cuivre ou en alliages de cuivre |
Country Status (8)
Country | Link |
---|---|
US (1) | US4265722A (fr) |
EP (1) | EP0011800B1 (fr) |
JP (1) | JPS5573872A (fr) |
AT (1) | ATE652T1 (fr) |
AU (1) | AU527609B2 (fr) |
BE (1) | BE893883Q (fr) |
CA (1) | CA1152939A (fr) |
DE (1) | DE2850542C2 (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4416725A (en) * | 1982-12-30 | 1983-11-22 | International Business Machines Corporation | Copper texturing process |
DE3539886A1 (de) * | 1985-11-11 | 1987-05-14 | Hoellmueller Maschbau H | Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts |
US4879045A (en) * | 1986-01-13 | 1989-11-07 | Eggerichs Terry L | Method and apparatus for electromagnetically treating a fluid |
US5531874A (en) * | 1994-06-17 | 1996-07-02 | International Business Machines Corporation | Electroetching tool using localized application of channelized flow of electrolyte |
GB2293390A (en) * | 1994-09-20 | 1996-03-27 | British Tech Group | Simultaneous etchant regeneration and metal deposition by electrodialysis |
DE19850530A1 (de) * | 1998-11-03 | 2000-05-25 | Eilenburger Elektrolyse & Umwelttechnik Gmbh | Kreislaufverfahren zum Beizen von Kupfer und Kupferlegierungen |
US6656370B1 (en) * | 2000-10-13 | 2003-12-02 | Lenora Toscano | Method for the manufacture of printed circuit boards |
DE10059743A1 (de) * | 2000-12-01 | 2002-06-20 | Rolf Hempelmann | Verfahren zur Katalysatorabscheidung |
SE519898C2 (sv) * | 2001-09-10 | 2003-04-22 | Obducat Ab | Sätt att etsa koppar på kort samt anordning och elektrolyt för utförande av sättet |
DE10326767B4 (de) * | 2003-06-13 | 2006-02-02 | Atotech Deutschland Gmbh | Verfahren zur Regenerierung von eisenhaltigen Ätzlösungen zur Verwendung beim Ätzen oder Beizen von Kupfer oder Kupferlegierungen sowie eine Vorrichtung zur Durchführung desselben |
US20050067378A1 (en) * | 2003-09-30 | 2005-03-31 | Harry Fuerhaupter | Method for micro-roughening treatment of copper and mixed-metal circuitry |
CN103924243A (zh) * | 2013-01-11 | 2014-07-16 | 上海飞凯光电材料股份有限公司 | 一种蚀刻液组合物 |
EP2754732B1 (fr) * | 2013-01-15 | 2015-03-11 | ATOTECH Deutschland GmbH | Composition aqueuse pour gravure du cuivre et des alliages de cuivre |
CN111971406B (zh) | 2018-06-28 | 2021-10-26 | 古河电气工业株式会社 | 铜合金板材和铜合金板材的制造方法以及使用铜合金板材的连接器 |
CN108866572A (zh) * | 2018-08-27 | 2018-11-23 | 苏碧云 | 一种铁置换铜电解槽 |
CN111809184B (zh) * | 2020-07-15 | 2022-03-04 | 深圳市祺鑫环保科技有限公司 | 再生子液回用方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3033793A (en) * | 1958-08-13 | 1962-05-08 | Photo Engravers Res Inc | Powderless etching of copper photoengraving plates |
US3622478A (en) * | 1960-11-14 | 1971-11-23 | Gen Electric | Continuous regeneration of ferric sulfate pickling bath |
SU438729A1 (ru) * | 1970-07-17 | 1975-01-23 | Предприятие П/Я А-7125 | Способ регенерации сернокислых и хлористых травильных растворов железа |
US3974050A (en) * | 1971-10-12 | 1976-08-10 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Method of and apparatus for processing the surface of bodies |
US3788915A (en) * | 1972-02-09 | 1974-01-29 | Shipley Co | Regeneration of spent etchant |
US4153531A (en) * | 1976-08-21 | 1979-05-08 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Apparatus for electrochemically processing metallic surfaces |
DE2641905C2 (de) * | 1976-09-17 | 1986-03-20 | Geb. Bakulina Galina Aleksandrovna Batova | Verfahren zur Regenerierung verbrauchter Ätzlösungen |
DE2655137C2 (de) * | 1976-12-04 | 1978-06-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Verfahren zur elektrochemischen Bearbeitung metallischer Oberflächen |
-
1978
- 1978-11-22 DE DE2850542A patent/DE2850542C2/de not_active Expired
-
1979
- 1979-11-19 EP EP79104575A patent/EP0011800B1/fr not_active Expired
- 1979-11-19 AT AT79104575T patent/ATE652T1/de not_active IP Right Cessation
- 1979-11-20 US US06/096,137 patent/US4265722A/en not_active Expired - Lifetime
- 1979-11-22 JP JP15077979A patent/JPS5573872A/ja active Granted
- 1979-11-22 CA CA000340377A patent/CA1152939A/fr not_active Expired
- 1979-11-22 AU AU53093/79A patent/AU527609B2/en not_active Ceased
-
1982
- 1982-07-20 BE BE0/208628A patent/BE893883Q/fr not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE2850542A1 (de) | 1980-06-04 |
AU5309379A (en) | 1980-05-29 |
JPS636632B2 (fr) | 1988-02-10 |
CA1152939A (fr) | 1983-08-30 |
ATE652T1 (de) | 1982-02-15 |
US4265722A (en) | 1981-05-05 |
AU527609B2 (en) | 1983-03-10 |
EP0011800A1 (fr) | 1980-06-11 |
DE2850542C2 (de) | 1982-07-01 |
JPS5573872A (en) | 1980-06-03 |
EP0011800B1 (fr) | 1982-02-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: FURST LEANDER Effective date: 19900731 Owner name: KASTENING BERTEL Effective date: 19900731 Owner name: FAUL WOLFGANG Effective date: 19900731 |