BE855162A - Procede pour former des connexions au travers d'une couche isolante dans la fabrication de circuits integres - Google Patents
Procede pour former des connexions au travers d'une couche isolante dans la fabrication de circuits integresInfo
- Publication number
- BE855162A BE855162A BE178015A BE178015A BE855162A BE 855162 A BE855162 A BE 855162A BE 178015 A BE178015 A BE 178015A BE 178015 A BE178015 A BE 178015A BE 855162 A BE855162 A BE 855162A
- Authority
- BE
- Belgium
- Prior art keywords
- manufacture
- insulating layer
- integrated circuits
- forming connections
- connections
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/7688—Filling of holes, grooves or trenches, e.g. vias, with conductive material by deposition over sacrificial masking layer, e.g. lift-off
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01058—Cerium [Ce]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01072—Hafnium [Hf]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/143—Masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4076—Through-connections; Vertical interconnect access [VIA] connections by thin-film techniques
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/106—Masks, special
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/15—Silicon on sapphire SOS
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/701,451 US4076575A (en) | 1976-06-30 | 1976-06-30 | Integrated fabrication method of forming connectors through insulative layers |
Publications (1)
Publication Number | Publication Date |
---|---|
BE855162A true BE855162A (fr) | 1977-09-16 |
Family
ID=24817435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE178015A BE855162A (fr) | 1976-06-30 | 1977-05-27 | Procede pour former des connexions au travers d'une couche isolante dans la fabrication de circuits integres |
Country Status (10)
Country | Link |
---|---|
US (1) | US4076575A (xx) |
JP (1) | JPS533172A (xx) |
BE (1) | BE855162A (xx) |
BR (1) | BR7704314A (xx) |
CA (1) | CA1082370A (xx) |
CH (1) | CH614562A5 (xx) |
DE (1) | DE2729030C2 (xx) |
FR (1) | FR2357071A1 (xx) |
IT (1) | IT1115667B (xx) |
NL (1) | NL7706108A (xx) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4059069A (en) * | 1976-08-30 | 1977-11-22 | The Arnold Engineering Company | Coating apparatus |
US4172004A (en) * | 1977-10-20 | 1979-10-23 | International Business Machines Corporation | Method for forming dense dry etched multi-level metallurgy with non-overlapped vias |
US4289834A (en) * | 1977-10-20 | 1981-09-15 | Ibm Corporation | Dense dry etched multi-level metallurgy with non-overlapped vias |
US4176029A (en) * | 1978-03-02 | 1979-11-27 | Sperry Rand Corporation | Subminiature bore and conductor formation |
US4263603A (en) * | 1978-03-02 | 1981-04-21 | Sperry Corporation | Subminiature bore and conductor formation |
US4184909A (en) * | 1978-08-21 | 1980-01-22 | International Business Machines Corporation | Method of forming thin film interconnection systems |
JPS6019608B2 (ja) * | 1978-10-03 | 1985-05-17 | シャープ株式会社 | 電極パタ−ン形成方法 |
US4285780A (en) * | 1978-11-02 | 1981-08-25 | Schachter Herbert I | Method of making a multi-level circuit board |
US4181755A (en) * | 1978-11-21 | 1980-01-01 | Rca Corporation | Thin film pattern generation by an inverse self-lifting technique |
US4275286A (en) * | 1978-12-04 | 1981-06-23 | Hughes Aircraft Company | Process and mask for ion beam etching of fine patterns |
US4202914A (en) * | 1978-12-29 | 1980-05-13 | International Business Machines Corporation | Method of depositing thin films of small dimensions utilizing silicon nitride lift-off mask |
JPS5595340A (en) * | 1979-01-10 | 1980-07-19 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Preparation of semiconductor device |
US4272561A (en) * | 1979-05-29 | 1981-06-09 | International Business Machines Corporation | Hybrid process for SBD metallurgies |
JPS55163860A (en) * | 1979-06-06 | 1980-12-20 | Toshiba Corp | Manufacture of semiconductor device |
US4371423A (en) * | 1979-09-04 | 1983-02-01 | Vlsi Technology Research Association | Method of manufacturing semiconductor device utilizing a lift-off technique |
JPS5710926A (en) * | 1980-06-25 | 1982-01-20 | Toshiba Corp | Manufacture of semiconductor device |
US4307179A (en) * | 1980-07-03 | 1981-12-22 | International Business Machines Corporation | Planar metal interconnection system and process |
US4407859A (en) * | 1980-10-17 | 1983-10-04 | Rockwell International Corporation | Planar bubble memory circuit fabrication |
US4339305A (en) * | 1981-02-05 | 1982-07-13 | Rockwell International Corporation | Planar circuit fabrication by plating and liftoff |
EP0057738B1 (de) * | 1981-02-07 | 1986-10-15 | Ibm Deutschland Gmbh | Verfahren zum Herstellen und Füllen von Löchern in einer auf einem Substrat aufliegenden Schicht |
US4517616A (en) * | 1982-04-12 | 1985-05-14 | Memorex Corporation | Thin film magnetic recording transducer having embedded pole piece design |
US4391849A (en) * | 1982-04-12 | 1983-07-05 | Memorex Corporation | Metal oxide patterns with planar surface |
JPS58187260A (ja) * | 1982-04-26 | 1983-11-01 | Mitsubishi Electric Corp | アルミニウム金属への半田被着法 |
US4446194A (en) * | 1982-06-21 | 1984-05-01 | Motorola, Inc. | Dual layer passivation |
US4461672A (en) * | 1982-11-18 | 1984-07-24 | Texas Instruments, Inc. | Process for etching tapered vias in silicon dioxide |
US4415606A (en) * | 1983-01-10 | 1983-11-15 | Ncr Corporation | Method of reworking upper metal in multilayer metal integrated circuits |
GB8316477D0 (en) * | 1983-06-16 | 1983-07-20 | Plessey Co Plc | Producing layered structure |
GB2141582B (en) * | 1983-06-16 | 1986-10-29 | Plessey Co Plc | A method of producing a layered structure |
US4451326A (en) * | 1983-09-07 | 1984-05-29 | Advanced Micro Devices, Inc. | Method for interconnecting metallic layers |
US4597177A (en) * | 1984-01-03 | 1986-07-01 | International Business Machines Corporation | Fabricating contacts for flexible module carriers |
WO1985004518A1 (en) * | 1984-03-22 | 1985-10-10 | Mostek Corporation | Integrated circuits with contact pads in a standard array |
US4627151A (en) * | 1984-03-22 | 1986-12-09 | Thomson Components-Mostek Corporation | Automatic assembly of integrated circuits |
US4548903A (en) * | 1984-03-30 | 1985-10-22 | The United States Of America As Represented By The Secretary Of The Air Force | Method to reveal microstructures in single phase alloys |
US4640738A (en) * | 1984-06-22 | 1987-02-03 | International Business Machines Corporation | Semiconductor contact protection |
JPS6276600A (ja) * | 1985-09-29 | 1987-04-08 | 株式会社 アサヒ化学研究所 | 基板に導電回路を形成する方法 |
US4695853A (en) * | 1986-12-12 | 1987-09-22 | Hewlett-Packard Company | Thin film vertical resistor devices for a thermal ink jet printhead and methods of manufacture |
US5162191A (en) * | 1988-01-05 | 1992-11-10 | Max Levy Autograph, Inc. | High-density circuit and method of its manufacture |
US5488394A (en) * | 1988-01-05 | 1996-01-30 | Max Levy Autograph, Inc. | Print head and method of making same |
US4897676A (en) * | 1988-01-05 | 1990-01-30 | Max Levy Autograph, Inc. | High-density circuit and method of its manufacture |
US4961259A (en) * | 1989-06-16 | 1990-10-09 | Hughes Aircraft Company | Method of forming an interconnection by an excimer laser |
US4991285A (en) * | 1989-11-17 | 1991-02-12 | Rockwell International Corporation | Method of fabricating multi-layer board |
JP2881963B2 (ja) * | 1990-05-25 | 1999-04-12 | ソニー株式会社 | 配線基板及びその製造方法 |
US5726498A (en) * | 1995-05-26 | 1998-03-10 | International Business Machines Corporation | Wire shape conferring reduced crosstalk and formation methods |
US5891804A (en) * | 1996-04-18 | 1999-04-06 | Texas Instruments Incorporated | Process for conductors with selective deposition |
TW480636B (en) * | 1996-12-04 | 2002-03-21 | Seiko Epson Corp | Electronic component and semiconductor device, method for manufacturing and mounting thereof, and circuit board and electronic equipment |
US6005198A (en) * | 1997-10-07 | 1999-12-21 | Dimensional Circuits Corporation | Wiring board constructions and methods of making same |
US5994211A (en) | 1997-11-21 | 1999-11-30 | Lsi Logic Corporation | Method and composition for reducing gate oxide damage during RF sputter clean |
US6162365A (en) * | 1998-03-04 | 2000-12-19 | International Business Machines Corporation | Pd etch mask for copper circuitization |
US20060252163A1 (en) * | 2001-10-19 | 2006-11-09 | Nano-Proprietary, Inc. | Peelable photoresist for carbon nanotube cathode |
KR20030068733A (ko) * | 2002-02-16 | 2003-08-25 | 광전자 주식회사 | 평탄화 구조를 갖는 반도체 소자 및 그 제조방법 |
US6569763B1 (en) * | 2002-04-09 | 2003-05-27 | Northrop Grumman Corporation | Method to separate a metal film from an insulating film in a semiconductor device using adhesive tape |
CN100380596C (zh) * | 2003-04-25 | 2008-04-09 | 株式会社半导体能源研究所 | 液滴排出装置、图案的形成方法及半导体装置的制造方法 |
CN100533808C (zh) * | 2004-01-26 | 2009-08-26 | 株式会社半导体能源研究所 | 显示器件及其制造方法以及电视设备 |
US7462514B2 (en) | 2004-03-03 | 2008-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same, liquid crystal television, and EL television |
US7642038B2 (en) * | 2004-03-24 | 2010-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus |
US8158517B2 (en) * | 2004-06-28 | 2012-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing wiring substrate, thin film transistor, display device and television device |
EA029641B1 (ru) * | 2015-02-04 | 2018-04-30 | Открытое акционерное общество "ИНТЕГРАЛ"-управляющая компания холдинга "ИНТЕГРАЛ" | Металлизация интегральной схемы |
CN117542733B (zh) * | 2024-01-10 | 2024-04-26 | 合肥晶合集成电路股份有限公司 | 半导体结构的制作方法、电路及芯片 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3598710A (en) * | 1966-04-04 | 1971-08-10 | Ibm | Etching method |
US3451867A (en) * | 1966-05-31 | 1969-06-24 | Gen Electric | Processes of epitaxial deposition or diffusion employing a silicon carbide masking layer |
US3471396A (en) * | 1967-04-10 | 1969-10-07 | Ibm | R.f. cathodic sputtering apparatus having an electrically conductive housing |
FR1064185A (fr) * | 1967-05-23 | 1954-05-11 | Philips Nv | Procédé de fabrication d'un système d'électrodes |
US3697318A (en) * | 1967-05-23 | 1972-10-10 | Ibm | Monolithic integrated structure including fabrication thereof |
US3597834A (en) * | 1968-02-14 | 1971-08-10 | Texas Instruments Inc | Method in forming electrically continuous circuit through insulating layer |
US3633269A (en) * | 1969-06-24 | 1972-01-11 | Telefunken Patent | Method of making contact to semiconductor devices |
US3714521A (en) * | 1971-07-26 | 1973-01-30 | Rca Corp | Semiconductor device or monolithic integrated circuit with tungsten interconnections |
BE789498A (fr) * | 1971-09-29 | 1973-01-15 | Siemens Ag | Contact metal-semiconducteur de faible superficie |
US3837907A (en) * | 1972-03-22 | 1974-09-24 | Bell Telephone Labor Inc | Multiple-level metallization for integrated circuits |
JPS529513B2 (xx) * | 1972-06-23 | 1977-03-16 | ||
DE2235749C3 (de) * | 1972-07-21 | 1979-09-20 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Verfahren zum Herstellen eines Leitbahnenmusters |
US3877051A (en) * | 1972-10-18 | 1975-04-08 | Ibm | Multilayer insulation integrated circuit structure |
US3873361A (en) * | 1973-11-29 | 1975-03-25 | Ibm | Method of depositing thin film utilizing a lift-off mask |
-
1976
- 1976-06-30 US US05/701,451 patent/US4076575A/en not_active Expired - Lifetime
-
1977
- 1977-05-12 CH CH593877A patent/CH614562A5/xx not_active IP Right Cessation
- 1977-05-18 FR FR7716062A patent/FR2357071A1/fr active Granted
- 1977-05-20 CA CA278,887A patent/CA1082370A/en not_active Expired
- 1977-05-27 BE BE178015A patent/BE855162A/xx not_active IP Right Cessation
- 1977-05-31 JP JP6292177A patent/JPS533172A/ja active Pending
- 1977-06-03 NL NL7706108A patent/NL7706108A/xx not_active Application Discontinuation
- 1977-06-07 IT IT24413/77A patent/IT1115667B/it active
- 1977-06-28 DE DE2729030A patent/DE2729030C2/de not_active Expired
- 1977-06-30 BR BR7704314A patent/BR7704314A/pt unknown
Also Published As
Publication number | Publication date |
---|---|
DE2729030C2 (de) | 1982-07-01 |
CA1082370A (en) | 1980-07-22 |
NL7706108A (nl) | 1978-01-03 |
CH614562A5 (xx) | 1979-11-30 |
IT1115667B (it) | 1986-02-03 |
JPS533172A (en) | 1978-01-12 |
FR2357071B1 (xx) | 1980-12-19 |
DE2729030A1 (de) | 1978-01-05 |
BR7704314A (pt) | 1978-05-16 |
US4076575A (en) | 1978-02-28 |
FR2357071A1 (fr) | 1978-01-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RE | Patent lapsed |
Owner name: INTERNATIONAL BUSINESS MACHINES CORP. Effective date: 19840527 |