BE649234A - - Google Patents

Info

Publication number
BE649234A
BE649234A BE649234A BE649234A BE649234A BE 649234 A BE649234 A BE 649234A BE 649234 A BE649234 A BE 649234A BE 649234 A BE649234 A BE 649234A BE 649234 A BE649234 A BE 649234A
Authority
BE
Belgium
Application number
BE649234A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE649234A publication Critical patent/BE649234A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
BE649234A 1963-06-12 1964-06-12 BE649234A (cg-RX-API-DMAC7.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US287386A US3329524A (en) 1963-06-12 1963-06-12 Centrifugal-type vapor source

Publications (1)

Publication Number Publication Date
BE649234A true BE649234A (cg-RX-API-DMAC7.html) 1964-10-01

Family

ID=23102660

Family Applications (1)

Application Number Title Priority Date Filing Date
BE649234A BE649234A (cg-RX-API-DMAC7.html) 1963-06-12 1964-06-12

Country Status (12)

Country Link
US (1) US3329524A (cg-RX-API-DMAC7.html)
JP (1) JPS519687B1 (cg-RX-API-DMAC7.html)
AT (1) AT252683B (cg-RX-API-DMAC7.html)
BE (1) BE649234A (cg-RX-API-DMAC7.html)
CH (1) CH452312A (cg-RX-API-DMAC7.html)
DE (1) DE1521525B1 (cg-RX-API-DMAC7.html)
DK (1) DK128824B (cg-RX-API-DMAC7.html)
FR (1) FR1406666A (cg-RX-API-DMAC7.html)
GB (1) GB1031963A (cg-RX-API-DMAC7.html)
LU (1) LU46281A1 (cg-RX-API-DMAC7.html)
NL (1) NL6406691A (cg-RX-API-DMAC7.html)
SE (1) SE315461B (cg-RX-API-DMAC7.html)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3467058A (en) * 1965-12-03 1969-09-16 United States Steel Corp Apparatus for vaporizing metal
US3384049A (en) * 1966-10-27 1968-05-21 Emil R. Capita Vapor deposition apparatus including centrifugal force substrate-holding means
US3659552A (en) * 1966-12-15 1972-05-02 Western Electric Co Vapor deposition apparatus
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3552352A (en) * 1968-02-13 1971-01-05 Du Pont Electron beam vaporization coating apparatus
US3572672A (en) * 1968-11-22 1971-03-30 Rca Corp Vacuum evaporation apparatus
US3661117A (en) * 1969-12-03 1972-05-09 Stanford Research Inst Apparatus for depositing thin lines
US3613633A (en) * 1970-03-18 1971-10-19 Schjeldahl Co G T Method and apparatus for coating articles utilizing rotating crucible coating apparatus including a centrifugal-type crucible
US3776535A (en) * 1970-04-17 1973-12-04 Optical Coating Laboratory Inc Method for evaporating aluminum
US3684268A (en) * 1970-04-17 1972-08-15 Optical Coating Laboratory Inc Source for evaporating materials
GB1440921A (en) * 1972-07-14 1976-06-30 Secr Defence Evaporation of metals
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
JPS52137789U (cg-RX-API-DMAC7.html) * 1976-04-15 1977-10-19
US4030964A (en) * 1976-04-29 1977-06-21 The United States Of America As Represented By The United States Energy Research And Development Administration Temperature cycling vapor deposition HgI2 crystal growth
JPS6057894U (ja) * 1983-09-20 1985-04-22 大久保　敬四郎 自動火災報知器
DE3639683A1 (de) * 1986-11-20 1988-05-26 Leybold Ag Verdampferanordnung mit einem rechteckigen verdampfertiegel und mehreren elektronenkanonen
KR920003591B1 (ko) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
KR100615302B1 (ko) * 2005-01-21 2006-08-25 삼성에스디아이 주식회사 가열용기 지지대 및 이를 구비한 증착장치
EP1947210A1 (fr) * 2007-01-16 2008-07-23 ARCELOR France Procede de revetement d'un substrat, installation de mise en oeuvre du procede et dispositif d'alimentation en metal d'une telle installation
TWI737718B (zh) * 2016-04-25 2021-09-01 美商創新先進材料股份有限公司 含有瀉流源的沉積系統及相關方法
EP3600612A4 (en) * 2017-03-22 2020-04-15 University Of Delaware CENTRIFUGAL EVAPORATION SOURCES
CN112725714B (zh) * 2020-12-04 2022-02-18 中国工程物理研究院材料研究所 一种铀铌合金表层夹杂物的细化方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE882171C (de) * 1942-01-31 1953-07-06 Bosch Gmbh Robert Verfahren zur thermischen Verdampfung von Stoffen
DE970970C (de) * 1943-02-09 1958-11-20 Heraeus Gmbh W C Einrichtung zum Herstellen von Oberflaechenschichten durch Verdampfen oder Sublimieren des UEberzugsstoffes im Hochvakuum
DE862991C (de) * 1944-02-22 1953-01-15 Bosch Gmbh Robert Verfahren zur Herstellung von Legierungen durch Kondensation aus der Gasphase
DE848287C (de) * 1949-08-27 1952-09-01 Siemens Ag Verfahren zur Bedampfung, insbesondere zur Vakuum-Bedampfung von Isolierstoff-Folien
US2665223A (en) * 1949-12-31 1954-01-05 Nat Res Corp Process for depositing an aluminum film on a substrate by thermal vaporization
DE868091C (de) * 1950-03-07 1953-02-23 Bosch Gmbh Robert Vorrichtung zur Herstellung von Metallueberzuegen auf laufenden Baendern durch Bedampfen im Vakuum
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3029777A (en) * 1959-01-30 1962-04-17 Nat Res Corp Vapor deposition coating apparatus
US3020177A (en) * 1959-05-13 1962-02-06 Continental Can Co Art of vaporizing materials
US3019129A (en) * 1959-08-10 1962-01-30 Nat Res Corp Apparatus and process for coating
US3023727A (en) * 1959-09-10 1962-03-06 Ibm Substrate processing apparatus

Also Published As

Publication number Publication date
GB1031963A (en) 1966-06-02
CH452312A (de) 1968-05-31
AT252683B (de) 1967-03-10
FR1406666A (fr) 1965-07-23
DE1521525B1 (de) 1970-03-12
JPS519687B1 (cg-RX-API-DMAC7.html) 1976-03-29
SE315461B (cg-RX-API-DMAC7.html) 1969-09-29
LU46281A1 (cg-RX-API-DMAC7.html) 1964-12-09
NL6406691A (cg-RX-API-DMAC7.html) 1964-12-14
DK128824B (da) 1974-07-08
US3329524A (en) 1967-07-04

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