BE624470A - - Google Patents

Info

Publication number
BE624470A
BE624470A BE624470DA BE624470A BE 624470 A BE624470 A BE 624470A BE 624470D A BE624470D A BE 624470DA BE 624470 A BE624470 A BE 624470A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE624470A publication Critical patent/BE624470A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
BE624470D 1961-11-13 1962-11-06 BE624470A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US151661A US3117887A (en) 1961-11-13 1961-11-13 Apparatus and procedure for evaporating metal in vacuum metalizing

Publications (1)

Publication Number Publication Date
BE624470A true BE624470A (ja) 1963-05-06

Family

ID=22539724

Family Applications (1)

Application Number Title Priority Date Filing Date
BE624470D BE624470A (ja) 1961-11-13 1962-11-06

Country Status (7)

Country Link
US (1) US3117887A (ja)
BE (1) BE624470A (ja)
DE (1) DE1293516B (ja)
FR (1) FR1337659A (ja)
GB (1) GB964461A (ja)
LU (1) LU42655A1 (ja)
NL (2) NL125589C (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438754A (en) * 1965-02-18 1969-04-15 Republic Steel Corp Zinc-coated steel with vapor-deposited aluminum overlay and method of producing same
US3350219A (en) * 1966-07-07 1967-10-31 Stackpole Carbon Co Evaporating metal employing porous member
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
GB2056500B (en) * 1979-08-09 1983-05-25 Standard Telephones Cables Ltd Coating powder with valve-metal
DE4015385A1 (de) * 1990-05-14 1991-11-21 Leybold Ag Reihenverdampfer fuer vakuumbedampfungsanlagen
DE4016225C2 (de) * 1990-05-19 1997-08-14 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE4123342C2 (de) * 1991-07-15 1999-08-19 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE4128382C1 (ja) * 1991-08-27 1992-07-02 Leybold Ag, 6450 Hanau, De
US5410631A (en) * 1993-09-10 1995-04-25 Advanced Ceramics Corporation Clamp assembly for a vaporization boat
DE19545914C1 (de) * 1995-12-08 1996-11-07 Sintec Keramik Gmbh Verfahren und Verdampferschiffchen zum Verdampfen von Metall
US6120286A (en) * 1996-12-05 2000-09-19 Sintec Keramik Gmbh & Co. Kg Vaporizer boat for metal vaporizing
DE19735352A1 (de) * 1997-03-06 1998-09-10 Kempten Elektroschmelz Gmbh Keramischer Verdampfer mit einer Verjüngung der Verdampferenden
TWI264473B (en) * 2001-10-26 2006-10-21 Matsushita Electric Works Ltd Vacuum deposition device and vacuum deposition method
EP2020454B1 (en) * 2007-07-27 2012-09-05 Applied Materials, Inc. Evaporation apparatus with inclined crucible

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT155465B (de) * 1936-07-17 1939-01-25 Paul Alexander Verfahren und Vorrichtung zur Ablagerung eines Überzuges auf einer Unterlage.
US2378476A (en) * 1943-02-11 1945-06-19 American Optical Corp Coating apparatus
US2622041A (en) * 1948-08-03 1952-12-16 Nat Res Corp Deposition of metal on a nonmetallic support
DE953677C (de) * 1951-10-19 1956-12-06 Siemens Ag Verdampfer fuer fortlaufende Bedampfung von bandfoermigem Gut
DE1084100B (de) * 1957-02-25 1960-06-23 Edwards High Vacuum Ltd Verdampfungsvorrichtung zum Vakuumbedampfen, insbesondere mit Aluminium
US2909149A (en) * 1957-11-15 1959-10-20 Cons Electrodynamics Corp Apparatus for evaporating metal
US2969448A (en) * 1959-03-03 1961-01-24 Continental Can Co Heater vaporizer element support
US3020177A (en) * 1959-05-13 1962-02-06 Continental Can Co Art of vaporizing materials

Also Published As

Publication number Publication date
NL285351A (ja) 1968-07-15
FR1337659A (fr) 1963-09-13
DE1293516B (de) 1969-04-24
NL125589C (ja) 1968-07-15
LU42655A1 (ja) 1963-01-08
US3117887A (en) 1964-01-14
GB964461A (en) 1964-07-22

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