AU9110191A - Device and process for the vaporisation of material - Google Patents

Device and process for the vaporisation of material

Info

Publication number
AU9110191A
AU9110191A AU91101/91A AU9110191A AU9110191A AU 9110191 A AU9110191 A AU 9110191A AU 91101/91 A AU91101/91 A AU 91101/91A AU 9110191 A AU9110191 A AU 9110191A AU 9110191 A AU9110191 A AU 9110191A
Authority
AU
Australia
Prior art keywords
vaporisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU91101/91A
Other languages
English (en)
Inventor
Horst Ehrich
Brunhilde Hasse
Hans-Peter Hinz
Michael Mausbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasco Dr Ehrich Plasma Coating GmbH
Original Assignee
Plasco Dr Ehrich Plasma Coating GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasco Dr Ehrich Plasma Coating GmbH filed Critical Plasco Dr Ehrich Plasma Coating GmbH
Publication of AU9110191A publication Critical patent/AU9110191A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AU91101/91A 1991-01-10 1991-12-31 Device and process for the vaporisation of material Abandoned AU9110191A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4100541 1991-01-10
DE4100541A DE4100541C1 (enrdf_load_stackoverflow) 1991-01-10 1991-01-10

Publications (1)

Publication Number Publication Date
AU9110191A true AU9110191A (en) 1992-08-17

Family

ID=6422784

Family Applications (1)

Application Number Title Priority Date Filing Date
AU91101/91A Abandoned AU9110191A (en) 1991-01-10 1991-12-31 Device and process for the vaporisation of material

Country Status (6)

Country Link
EP (1) EP0566606B1 (enrdf_load_stackoverflow)
JP (1) JP2546591B2 (enrdf_load_stackoverflow)
AU (1) AU9110191A (enrdf_load_stackoverflow)
CA (1) CA2099132C (enrdf_load_stackoverflow)
DE (2) DE4100541C1 (enrdf_load_stackoverflow)
WO (1) WO1992012275A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2816469C1 (ru) * 2023-10-31 2024-03-29 Общество с ограниченной ответственностью Научно-производственное предприятие "Уралавиаспецтехнология" Протяженный электродуговой испаритель токопроводящих материалов

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4307740C2 (de) * 1993-03-11 1994-12-22 Ttk Kunststoff Tech Gmbh Verfahren zur Herstellung von Gehäusen mit wenigstens einer metallischen Abschirmschicht
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6740378B1 (en) 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
US6720052B1 (en) 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
US20030194563A1 (en) 2002-04-15 2003-10-16 Yu Shi Coating composition containing an epoxide additive and structures coated therewith
DE102005020946B4 (de) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Verfahren und Verdampferschiffchen zum Beschichten von Substraten mit Kupfer oder Silber
DE102005020945B4 (de) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH452313A (de) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Vorrichtung zur Verdampfung von Stoffen im Vakuum
US3562141A (en) * 1968-02-23 1971-02-09 John R Morley Vacuum vapor deposition utilizing low voltage electron beam
US4197157A (en) * 1975-03-19 1980-04-08 Arthur D. Little, Inc. Method for forming refractory tubing
DE3413891C2 (de) * 1984-04-12 1987-01-08 Horst Dipl.-Phys. Dr. 4270 Dorsten Ehrich Verfahren und Vorrichtung zur Materialverdampfung in einem Vakuumbehälter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2816469C1 (ru) * 2023-10-31 2024-03-29 Общество с ограниченной ответственностью Научно-производственное предприятие "Уралавиаспецтехнология" Протяженный электродуговой испаритель токопроводящих материалов

Also Published As

Publication number Publication date
CA2099132C (en) 2001-04-10
CA2099132A1 (en) 1992-07-11
EP0566606A1 (de) 1993-10-27
JPH06501060A (ja) 1994-01-27
DE4100541C1 (enrdf_load_stackoverflow) 1992-01-16
JP2546591B2 (ja) 1996-10-23
DE59105635D1 (de) 1995-07-06
EP0566606B1 (de) 1995-05-31
WO1992012275A1 (de) 1992-07-23

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