CA2099132A1 - Device and process for the vaporisation of material - Google Patents

Device and process for the vaporisation of material

Info

Publication number
CA2099132A1
CA2099132A1 CA002099132A CA2099132A CA2099132A1 CA 2099132 A1 CA2099132 A1 CA 2099132A1 CA 002099132 A CA002099132 A CA 002099132A CA 2099132 A CA2099132 A CA 2099132A CA 2099132 A1 CA2099132 A1 CA 2099132A1
Authority
CA
Canada
Prior art keywords
crucible
anode
cathode
electrically conductive
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002099132A
Other languages
French (fr)
Other versions
CA2099132C (en
Inventor
Horst Ehrich
Brunhilde Hasse
Hans-Peter Hinz
Michael Mausbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasco Dr Ehrich Plasma Coating GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2099132A1 publication Critical patent/CA2099132A1/en
Application granted granted Critical
Publication of CA2099132C publication Critical patent/CA2099132C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a device for vaporizing material by means of a vacuum arc discharge using a cold cathode and a hot self-consuming anode, wherein the crucible (7) consists of an electrically conductive and heat-conductive material, and the connecting member (7a), due to its material properties or geometrical properties, permits electrically conductive and heat-insulating attachment of crucible (7) to the anode base plate (6), and the crucible (7) is arranged laterally above the working surface of the cathode (2a) that close to said working surface that the solid angle formed by the metal vapor plasma (9) flowing off from the anode crucible (7) is just not decreased by the diaphragm (13) in such fashion that homogenous vapor coating of substrates above the crucible (7) is no longer possible. Cathode (2) and anode are arranged opposite to each other.
Furthermore, the invention relates to a process for vaporizing material, wherein the plasma jets (5a,5b) emerging from the cathode surfaces are unimpeded in their action on the outer wall (7a) of the crucible and on the material vapor (9) above the crucible so that a high degree of vaporization is obtained, and the crucible (7) consists of an electrically conductive and heat conductive material.
CA002099132A 1991-01-10 1991-12-31 Device and process for the vaporisation of material Expired - Fee Related CA2099132C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4100541A DE4100541C1 (en) 1991-01-10 1991-01-10
DEP4100541.4 1991-01-10
PCT/EP1991/002525 WO1992012275A1 (en) 1991-01-10 1991-12-31 Device and process for the vaporisation of material

Publications (2)

Publication Number Publication Date
CA2099132A1 true CA2099132A1 (en) 1992-07-11
CA2099132C CA2099132C (en) 2001-04-10

Family

ID=6422784

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002099132A Expired - Fee Related CA2099132C (en) 1991-01-10 1991-12-31 Device and process for the vaporisation of material

Country Status (6)

Country Link
EP (1) EP0566606B1 (en)
JP (1) JP2546591B2 (en)
AU (1) AU9110191A (en)
CA (1) CA2099132C (en)
DE (2) DE4100541C1 (en)
WO (1) WO1992012275A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4307740C2 (en) * 1993-03-11 1994-12-22 Ttk Kunststoff Tech Gmbh Method for producing housings with at least one metallic shielding layer
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6740378B1 (en) 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
US6720052B1 (en) 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
DE102005020945B4 (en) * 2005-05-04 2007-07-12 Esk Ceramics Gmbh & Co. Kg Ceramic evaporator boats, process for their preparation and their use
DE102005020946B4 (en) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Method and evaporator boat for coating substrates with copper or silver

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH452313A (en) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Device for the evaporation of substances in a vacuum
US3562141A (en) * 1968-02-23 1971-02-09 John R Morley Vacuum vapor deposition utilizing low voltage electron beam
US4197157A (en) * 1975-03-19 1980-04-08 Arthur D. Little, Inc. Method for forming refractory tubing
DE3413891C2 (en) * 1984-04-12 1987-01-08 Horst Dipl.-Phys. Dr. 4270 Dorsten Ehrich Method and device for material evaporation in a vacuum container

Also Published As

Publication number Publication date
DE59105635D1 (en) 1995-07-06
CA2099132C (en) 2001-04-10
DE4100541C1 (en) 1992-01-16
JP2546591B2 (en) 1996-10-23
JPH06501060A (en) 1994-01-27
EP0566606B1 (en) 1995-05-31
EP0566606A1 (en) 1993-10-27
WO1992012275A1 (en) 1992-07-23
AU9110191A (en) 1992-08-17

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Legal Events

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EEER Examination request
MKLA Lapsed