AU687030B2 - Force sensor - Google Patents

Force sensor

Info

Publication number
AU687030B2
AU687030B2 AU58820/94A AU5882094A AU687030B2 AU 687030 B2 AU687030 B2 AU 687030B2 AU 58820/94 A AU58820/94 A AU 58820/94A AU 5882094 A AU5882094 A AU 5882094A AU 687030 B2 AU687030 B2 AU 687030B2
Authority
AU
Australia
Prior art keywords
sensing element
lower contact
support substrate
sensor according
contact element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
AU58820/94A
Other languages
English (en)
Other versions
AU5882094A (en
Inventor
Nick Alford
Rudiger Eick
Ralf Leiter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZF International UK Ltd
Original Assignee
Lucas Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Industries Ltd filed Critical Lucas Industries Ltd
Publication of AU5882094A publication Critical patent/AU5882094A/en
Application granted granted Critical
Publication of AU687030B2 publication Critical patent/AU687030B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
  • Air Bags (AREA)
  • Push-Button Switches (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
AU58820/94A 1993-01-15 1994-01-11 Force sensor Expired - Fee Related AU687030B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4300995A DE4300995C2 (de) 1993-01-15 1993-01-15 Kraftsensor und Verfahren zu seiner Herstellung
DE4300995 1993-01-15
PCT/EP1994/000060 WO1994016300A1 (en) 1993-01-15 1994-01-11 Force sensor

Publications (2)

Publication Number Publication Date
AU5882094A AU5882094A (en) 1994-08-15
AU687030B2 true AU687030B2 (en) 1998-02-19

Family

ID=6478294

Family Applications (1)

Application Number Title Priority Date Filing Date
AU58820/94A Expired - Fee Related AU687030B2 (en) 1993-01-15 1994-01-11 Force sensor

Country Status (11)

Country Link
EP (1) EP0679248A1 (xx)
JP (1) JPH08505471A (xx)
KR (1) KR960700443A (xx)
CN (1) CN1092165A (xx)
AU (1) AU687030B2 (xx)
BR (1) BR9405809A (xx)
CZ (1) CZ180295A3 (xx)
DE (1) DE4300995C2 (xx)
TW (1) TW286358B (xx)
WO (1) WO1994016300A1 (xx)
ZA (1) ZA94133B (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4309850C2 (de) * 1993-03-26 1996-12-12 Lucas Ind Plc Bremskraftverstärkersystem zum Regeln eines Bremsdruckes mit einem Bremskraftverstärker
DE4436819C2 (de) * 1994-10-14 1998-09-24 Lucas Ind Plc Elektronisch gesteuerte Fahrzeugbremsanlage und Verfahren zu deren Betrieb
EP0975940B1 (de) 1997-04-21 2004-06-02 Michael Van Bergen Linearer Kraftsensor mit zwei Schichten und zwei Stempeln
TWI397850B (zh) 2008-05-14 2013-06-01 Ind Tech Res Inst 感測裝置及其掃描驅動方法
JP5693047B2 (ja) 2009-06-01 2015-04-01 株式会社デンソー 力学量センサ素子、およびその製造方法
CN108369146B (zh) 2015-10-28 2020-09-18 伊利诺斯工具制品有限公司 测力装置
US10429254B2 (en) * 2017-04-27 2019-10-01 Universal Cement Corporation Piezo force sensor with solid-state bonding spacer
CN110333013B (zh) * 2019-07-15 2021-01-08 承德石油高等专科学校 一种嵌入式应力传感器
KR102264759B1 (ko) * 2019-12-27 2021-06-15 하이비스 주식회사 버튼형 압력감지재

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554927A (en) * 1983-08-30 1985-11-26 Thermometrics Inc. Pressure and temperature sensor
JPH0389590A (ja) * 1989-08-31 1991-04-15 Murata Mfg Co Ltd 厚膜抵抗体付回路基板の製造方法
US5054323A (en) * 1989-04-04 1991-10-08 The Charles Stark Draper Laboratory, Inc. Pressure distribution characterization system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5482699A (en) * 1977-12-15 1979-07-02 Shinetsu Polymer Co Pressure sensitive resistance element
FR2611043B1 (fr) * 1987-02-16 1989-08-04 Crouzet Sa Capteur de pression a jauges piezoresistives
DE3818191A1 (de) * 1988-05-28 1989-11-30 Bosch Gmbh Robert Sensor
DE3818189A1 (de) * 1988-05-28 1989-11-30 Bosch Gmbh Robert Sensor
DE3912280A1 (de) * 1989-04-14 1990-10-18 Bosch Gmbh Robert Verfahren zum herstellen eines sensors zum bestimmen von druckkraeften
DE4111148A1 (de) * 1991-04-06 1992-10-08 Bosch Gmbh Robert Sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554927A (en) * 1983-08-30 1985-11-26 Thermometrics Inc. Pressure and temperature sensor
US5054323A (en) * 1989-04-04 1991-10-08 The Charles Stark Draper Laboratory, Inc. Pressure distribution characterization system
JPH0389590A (ja) * 1989-08-31 1991-04-15 Murata Mfg Co Ltd 厚膜抵抗体付回路基板の製造方法

Also Published As

Publication number Publication date
WO1994016300A1 (en) 1994-07-21
CZ180295A3 (en) 1997-07-16
BR9405809A (pt) 1995-12-19
CN1092165A (zh) 1994-09-14
AU5882094A (en) 1994-08-15
DE4300995A1 (de) 1994-08-04
ZA94133B (en) 1994-08-19
KR960700443A (ko) 1996-01-20
JPH08505471A (ja) 1996-06-11
EP0679248A1 (en) 1995-11-02
DE4300995C2 (de) 1994-10-27
TW286358B (xx) 1996-09-21

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