AU6495300A - Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure - Google Patents

Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure

Info

Publication number
AU6495300A
AU6495300A AU64953/00A AU6495300A AU6495300A AU 6495300 A AU6495300 A AU 6495300A AU 64953/00 A AU64953/00 A AU 64953/00A AU 6495300 A AU6495300 A AU 6495300A AU 6495300 A AU6495300 A AU 6495300A
Authority
AU
Australia
Prior art keywords
equilibrium
thermal
high pressure
glow discharge
discharge plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64953/00A
Inventor
John Reece Roth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tennessee Research Foundation
Original Assignee
University of Tennessee Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tennessee Research Foundation filed Critical University of Tennessee Research Foundation
Publication of AU6495300A publication Critical patent/AU6495300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Epidemiology (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
AU64953/00A 1999-08-16 2000-07-27 Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure Abandoned AU6495300A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37469099A 1999-08-16 1999-08-16
US09374690 1999-08-16
PCT/US2000/020377 WO2001012350A1 (en) 1999-08-16 2000-07-27 Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure

Publications (1)

Publication Number Publication Date
AU6495300A true AU6495300A (en) 2001-03-13

Family

ID=23477827

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64953/00A Abandoned AU6495300A (en) 1999-08-16 2000-07-27 Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure

Country Status (2)

Country Link
AU (1) AU6495300A (en)
WO (1) WO2001012350A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IES20050301A2 (en) * 2005-05-11 2006-11-15 Univ Dublin City Plasma source
DE602006013328D1 (en) * 2006-11-10 2010-05-12 Univ Dublin City Plasma source with a large number of phase-shifted electrodes
EP2075353A1 (en) * 2007-12-17 2009-07-01 Technische Universiteit Delft Method for treatment of a surface area of steel
US20100151236A1 (en) * 2008-12-11 2010-06-17 Ford Global Technologies, Llc Surface treatment for polymeric part adhesion
WO2011110343A1 (en) * 2010-03-10 2011-09-15 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V Appliance, particularly kitchen appliance or laboratory table and deodorant device
EP2387907A1 (en) * 2010-05-19 2011-11-23 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Appliance, particularly kitchen appliance or laboratory table
WO2011144344A2 (en) * 2010-05-19 2011-11-24 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Appliance for at least partially sterilizing a contaminated surface
US8871145B2 (en) 2011-12-12 2014-10-28 Applied Quantum Energy Llc Plasma powder sterilization apparatus and methods
CN106001004A (en) * 2016-07-08 2016-10-12 北京睿昱达科技有限公司 Glow discharge plasma photovoltaic panel cleaning device and photovoltaic panel cleaning method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4465547A (en) * 1983-09-29 1984-08-14 General Electric Company Method of bonding a poly (vinylidene fluoride) solid to a solid substrate
US4555303A (en) * 1984-10-02 1985-11-26 Motorola, Inc. Oxidation of material in high pressure oxygen plasma
US4804431A (en) * 1987-11-03 1989-02-14 Aaron Ribner Microwave plasma etching machine and method of etching
KR910002310A (en) * 1988-06-29 1991-01-31 미다 가쓰시게 Plasma processing equipment
JPH02298024A (en) * 1989-05-12 1990-12-10 Tadahiro Omi Reactive ion etching apparatus
US5414324A (en) * 1993-05-28 1995-05-09 The University Of Tennessee Research Corporation One atmosphere, uniform glow discharge plasma
US5403453A (en) * 1993-05-28 1995-04-04 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure

Also Published As

Publication number Publication date
WO2001012350A1 (en) 2001-02-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase