AU6424098A - Production facility for integrated circuits - Google Patents

Production facility for integrated circuits

Info

Publication number
AU6424098A
AU6424098A AU64240/98A AU6424098A AU6424098A AU 6424098 A AU6424098 A AU 6424098A AU 64240/98 A AU64240/98 A AU 64240/98A AU 6424098 A AU6424098 A AU 6424098A AU 6424098 A AU6424098 A AU 6424098A
Authority
AU
Australia
Prior art keywords
integrated circuits
production facility
facility
production
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64240/98A
Inventor
Robert Theodorus Louis Jansen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTER-ENGINEERING CRYSTAL GROUP NV
Original Assignee
INTER ENGINEERING CRYSTAL GROU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTER ENGINEERING CRYSTAL GROU filed Critical INTER ENGINEERING CRYSTAL GROU
Publication of AU6424098A publication Critical patent/AU6424098A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU64240/98A 1998-03-11 1998-03-11 Production facility for integrated circuits Abandoned AU6424098A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/NL1998/000143 WO1999046803A1 (en) 1998-03-11 1998-03-11 Production facility for integrated circuits

Publications (1)

Publication Number Publication Date
AU6424098A true AU6424098A (en) 1999-09-27

Family

ID=19866436

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64240/98A Abandoned AU6424098A (en) 1998-03-11 1998-03-11 Production facility for integrated circuits

Country Status (5)

Country Link
EP (1) EP1062681A1 (en)
CN (1) CN1286802A (en)
AU (1) AU6424098A (en)
TW (1) TW440890B (en)
WO (1) WO1999046803A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532715B2 (en) 2000-07-10 2003-03-18 Applied Materials, Inc. Semiconductor substrate processing tool and fabrications facilities integration plate
JP2002043387A (en) * 2000-07-19 2002-02-08 Mitsubishi Electric Corp Clean room and method for transporting semiconductor device in it

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03291436A (en) * 1990-04-05 1991-12-20 N M B Semiconductor:Kk Clean room of semiconductor manufacturing factory
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
JPH0917703A (en) * 1995-06-28 1997-01-17 Hitachi Ltd Production instruction system

Also Published As

Publication number Publication date
WO1999046803A1 (en) 1999-09-16
CN1286802A (en) 2001-03-07
EP1062681A1 (en) 2000-12-27
TW440890B (en) 2001-06-16

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