AU5767780A - Passivating equipment for electroless depositing copper - Google Patents

Passivating equipment for electroless depositing copper

Info

Publication number
AU5767780A
AU5767780A AU57677/80A AU5767780A AU5767780A AU 5767780 A AU5767780 A AU 5767780A AU 57677/80 A AU57677/80 A AU 57677/80A AU 5767780 A AU5767780 A AU 5767780A AU 5767780 A AU5767780 A AU 5767780A
Authority
AU
Australia
Prior art keywords
depositing copper
electroless depositing
passivating
equipment
passivating equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU57677/80A
Other languages
English (en)
Inventor
Rudolph J. Zeblisky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kollmorgen Technologies Corp
Original Assignee
Kollmorgen Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kollmorgen Technologies Corp filed Critical Kollmorgen Technologies Corp
Publication of AU5767780A publication Critical patent/AU5767780A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1619—Apparatus for electroless plating
    • C23C18/1621—Protection of inner surfaces of the apparatus
    • C23C18/1623—Protection of inner surfaces of the apparatus through electrochemical processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F13/00—Inhibiting corrosion of metals by anodic or cathodic protection
    • C23F13/005—Anodic protection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Chemically Coating (AREA)
  • Prevention Of Electric Corrosion (AREA)
  • Manufacturing Of Printed Wiring (AREA)
AU57677/80A 1979-04-30 1980-04-22 Passivating equipment for electroless depositing copper Abandoned AU5767780A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US3481279A 1979-04-30 1979-04-30
US13045180A 1980-03-28 1980-03-28
US34812 1998-03-04
US130451 1999-04-22

Publications (1)

Publication Number Publication Date
AU5767780A true AU5767780A (en) 1980-11-06

Family

ID=26711403

Family Applications (1)

Application Number Title Priority Date Filing Date
AU57677/80A Abandoned AU5767780A (en) 1979-04-30 1980-04-22 Passivating equipment for electroless depositing copper

Country Status (11)

Country Link
AT (1) AT369037B (de)
AU (1) AU5767780A (de)
CA (1) CA1183101A (de)
CH (1) CH646732A5 (de)
DE (1) DE3016994C2 (de)
DK (1) DK151233C (de)
FR (1) FR2455641B1 (de)
GB (1) GB2052560B (de)
IT (1) IT1128151B (de)
NL (1) NL189769B (de)
SE (1) SE453925B (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1277642B (de) * 1964-01-14 1968-09-12 Bayer Ag Verfahren zum Schutz von metallischen Oberflaechen gegen Metallabscheidung in chemischen Metallisierungsbaedern
DE1521246B2 (de) * 1965-12-30 1976-06-16 Bayer Ag, 5090 Leverkusen Verfahren und schaltung zum schutz von metallischen oberflaechen gegen chemische metallisierung
GB1224047A (en) * 1968-12-10 1971-03-03 Tsniitmash Method of inhibiting the formation of a coating on chemical equipment
CH613475A5 (en) * 1976-07-28 1979-09-28 Bbc Brown Boveri & Cie Appliance for the electroless metal coating of objects
US4125642A (en) * 1977-08-25 1978-11-14 The United States Of America As Represented By The United States Department Of Energy Method for conducting electroless metal-plating processes

Also Published As

Publication number Publication date
DK151233C (da) 1988-12-12
CA1183101A (en) 1985-02-26
NL189769B (nl) 1993-02-16
CH646732A5 (de) 1984-12-14
DE3016994C2 (de) 1983-09-08
DK151233B (da) 1987-11-16
DE3016994A1 (de) 1980-11-06
GB2052560A (en) 1981-01-28
DK185080A (da) 1980-10-31
IT1128151B (it) 1986-05-28
SE453925B (sv) 1988-03-14
AT369037B (de) 1982-11-25
NL8002515A (nl) 1980-11-03
IT8048537A0 (it) 1980-04-29
FR2455641B1 (fr) 1985-07-26
ATA230980A (de) 1982-04-15
FR2455641A1 (fr) 1980-11-28
GB2052560B (en) 1982-11-10
SE8003204L (sv) 1980-10-31

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