AU485868B2 - A method of etching silicon oxide to produce a tapered edge thereon - Google Patents

A method of etching silicon oxide to produce a tapered edge thereon

Info

Publication number
AU485868B2
AU485868B2 AU72293/74A AU7229374A AU485868B2 AU 485868 B2 AU485868 B2 AU 485868B2 AU 72293/74 A AU72293/74 A AU 72293/74A AU 7229374 A AU7229374 A AU 7229374A AU 485868 B2 AU485868 B2 AU 485868B2
Authority
AU
Australia
Prior art keywords
produce
silicon oxide
tapered edge
etching silicon
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU72293/74A
Other versions
AU7229374A (en
Inventor
John Ham Ralph Robert Soden Edward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00389718A external-priority patent/US3839111A/en
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of AU485868B2 publication Critical patent/AU485868B2/en
Publication of AU7229374A publication Critical patent/AU7229374A/en
Expired legal-status Critical Current

Links

AU72293/74A 1973-08-20 1974-08-14 A method of etching silicon oxide to produce a tapered edge thereon Expired AU485868B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USUS389718 1973-08-20
US00389718A US3839111A (en) 1973-08-20 1973-08-20 Method of etching silicon oxide to produce a tapered edge thereon

Publications (2)

Publication Number Publication Date
AU485868B2 true AU485868B2 (en) 1976-02-19
AU7229374A AU7229374A (en) 1976-02-19

Family

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