CA980918A - Method of forming a nickel electrode on a silicon substrate - Google Patents
Method of forming a nickel electrode on a silicon substrateInfo
- Publication number
- CA980918A CA980918A CA170,129A CA170129A CA980918A CA 980918 A CA980918 A CA 980918A CA 170129 A CA170129 A CA 170129A CA 980918 A CA980918 A CA 980918A
- Authority
- CA
- Canada
- Prior art keywords
- forming
- silicon substrate
- nickel electrode
- nickel
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052759 nickel Inorganic materials 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/221—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities of killers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4414172A JPS5745061B2 (en) | 1972-05-02 | 1972-05-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA980918A true CA980918A (en) | 1975-12-30 |
Family
ID=12683347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA170,129A Expired CA980918A (en) | 1972-05-02 | 1973-05-01 | Method of forming a nickel electrode on a silicon substrate |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5745061B2 (en) |
CA (1) | CA980918A (en) |
DE (1) | DE2321390C3 (en) |
FR (1) | FR2183111B1 (en) |
GB (1) | GB1379011A (en) |
IT (1) | IT988158B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3318001A1 (en) * | 1982-05-20 | 1983-11-24 | General Electric Co., Schenectady, N.Y. | Process for electrolessly depositing platinum on silicon |
JPS60182010A (en) * | 1984-02-29 | 1985-09-17 | Canon Electronics Inc | Head device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL241982A (en) * | 1958-08-13 | 1900-01-01 | ||
NL134170C (en) * | 1963-12-17 | 1900-01-01 | ||
DE1213921B (en) * | 1964-08-25 | 1966-04-07 | Bosch Gmbh Robert | Method for manufacturing a semiconductor device |
DE1283970B (en) * | 1966-03-19 | 1968-11-28 | Siemens Ag | Metallic contact on a semiconductor component |
US3599054A (en) * | 1968-11-22 | 1971-08-10 | Bell Telephone Labor Inc | Barrier layer devices and methods for their manufacture |
US3640783A (en) * | 1969-08-11 | 1972-02-08 | Trw Semiconductors Inc | Semiconductor devices with diffused platinum |
-
1972
- 1972-05-02 JP JP4414172A patent/JPS5745061B2/ja not_active Expired
-
1973
- 1973-04-27 FR FR7315568A patent/FR2183111B1/fr not_active Expired
- 1973-04-27 GB GB2009073A patent/GB1379011A/en not_active Expired
- 1973-04-27 DE DE19732321390 patent/DE2321390C3/en not_active Expired
- 1973-05-01 CA CA170,129A patent/CA980918A/en not_active Expired
- 1973-05-02 IT IT4975573A patent/IT988158B/en active
Also Published As
Publication number | Publication date |
---|---|
JPS495575A (en) | 1974-01-18 |
DE2321390B2 (en) | 1976-10-28 |
DE2321390A1 (en) | 1973-11-15 |
DE2321390C3 (en) | 1982-07-08 |
GB1379011A (en) | 1975-01-02 |
JPS5745061B2 (en) | 1982-09-25 |
IT988158B (en) | 1975-04-10 |
FR2183111A1 (en) | 1973-12-14 |
FR2183111B1 (en) | 1976-11-12 |
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