CA906681A - Method of oxidizing a silicon wafer - Google Patents

Method of oxidizing a silicon wafer

Info

Publication number
CA906681A
CA906681A CA906681A CA906681DA CA906681A CA 906681 A CA906681 A CA 906681A CA 906681 A CA906681 A CA 906681A CA 906681D A CA906681D A CA 906681DA CA 906681 A CA906681 A CA 906681A
Authority
CA
Canada
Prior art keywords
oxidizing
silicon wafer
wafer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA906681A
Inventor
T. Naber Charles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Cash Register Co
Original Assignee
National Cash Register Co
Publication date
Application granted granted Critical
Publication of CA906681A publication Critical patent/CA906681A/en
Expired legal-status Critical Current

Links

CA906681A Method of oxidizing a silicon wafer Expired CA906681A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA906681T

Publications (1)

Publication Number Publication Date
CA906681A true CA906681A (en) 1972-08-01

Family

ID=36414438

Family Applications (1)

Application Number Title Priority Date Filing Date
CA906681A Expired CA906681A (en) Method of oxidizing a silicon wafer

Country Status (1)

Country Link
CA (1) CA906681A (en)

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