AU2012200547B2 - System and method for use in determining the thickness of a layer of interest in a multi-layer structure - Google Patents

System and method for use in determining the thickness of a layer of interest in a multi-layer structure Download PDF

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Publication number
AU2012200547B2
AU2012200547B2 AU2012200547A AU2012200547A AU2012200547B2 AU 2012200547 B2 AU2012200547 B2 AU 2012200547B2 AU 2012200547 A AU2012200547 A AU 2012200547A AU 2012200547 A AU2012200547 A AU 2012200547A AU 2012200547 B2 AU2012200547 B2 AU 2012200547B2
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Australia
Prior art keywords
electrode
layer structure
layer
temperature
sample
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AU2012200547A
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AU2012200547A1 (en
Inventor
Krishnamurthy Anand
Filippo Cappuccini
Karthick Vilapakkam Gourishankar
Atanu Saha
Hari Nadathur Seshadri
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General Electric Co
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General Electric Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
AU2012200547A 2011-02-04 2012-01-31 System and method for use in determining the thickness of a layer of interest in a multi-layer structure Active AU2012200547B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/021,328 US8692564B2 (en) 2011-02-04 2011-02-04 System and method for use in determining the thickness of a layer of interest in a multi-layer structure
US13/021,328 2011-02-04

Publications (2)

Publication Number Publication Date
AU2012200547A1 AU2012200547A1 (en) 2012-08-23
AU2012200547B2 true AU2012200547B2 (en) 2015-05-07

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ID=45655366

Family Applications (1)

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AU2012200547A Active AU2012200547B2 (en) 2011-02-04 2012-01-31 System and method for use in determining the thickness of a layer of interest in a multi-layer structure

Country Status (9)

Country Link
US (1) US8692564B2 (cg-RX-API-DMAC7.html)
EP (1) EP2485042B1 (cg-RX-API-DMAC7.html)
JP (1) JP6188117B2 (cg-RX-API-DMAC7.html)
KR (1) KR101899154B1 (cg-RX-API-DMAC7.html)
CN (1) CN102628668B (cg-RX-API-DMAC7.html)
AU (1) AU2012200547B2 (cg-RX-API-DMAC7.html)
CA (1) CA2765640C (cg-RX-API-DMAC7.html)
IN (1) IN2012DE00181A (cg-RX-API-DMAC7.html)
RU (1) RU2589526C2 (cg-RX-API-DMAC7.html)

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JP6176220B2 (ja) * 2014-10-14 2017-08-09 トヨタ自動車株式会社 検査装置
TWI636233B (zh) * 2014-12-12 2018-09-21 美商通用電機股份有限公司 用於測量物件厚度的方法及裝置
WO2016163229A1 (ja) * 2015-04-09 2016-10-13 株式会社村田製作所 電子部品の電気的特性測定方法および電気的特性測定装置
DE102016117881A1 (de) 2016-09-22 2018-03-22 Thyssenkrupp Ag Verfahren und Vorrichtung zur zerstörungsfreien Bestimmung der Dicke einer Kernschicht eines Sandwichblechs
KR102799571B1 (ko) * 2018-07-06 2025-04-28 주식회사 엘지에너지솔루션 전도성 물질의 비표면적 측정 방법
US20250046640A1 (en) * 2023-08-01 2025-02-06 Applied Materials, Inc. Dielectric spectroscopy temperature monitoring using electrostatic chuck

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Also Published As

Publication number Publication date
CA2765640C (en) 2020-01-14
JP2012163557A (ja) 2012-08-30
CN102628668A (zh) 2012-08-08
US20120200304A1 (en) 2012-08-09
EP2485042A1 (en) 2012-08-08
KR20120090816A (ko) 2012-08-17
EP2485042B1 (en) 2016-11-23
CA2765640A1 (en) 2012-08-04
AU2012200547A1 (en) 2012-08-23
US8692564B2 (en) 2014-04-08
RU2589526C2 (ru) 2016-07-10
KR101899154B1 (ko) 2018-09-14
JP6188117B2 (ja) 2017-08-30
RU2012103469A (ru) 2013-08-10
CN102628668B (zh) 2017-03-01
IN2012DE00181A (cg-RX-API-DMAC7.html) 2015-08-21

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