AU2003226319A1 - Electropolishing and/or electroplating apparatus and methods - Google Patents
Electropolishing and/or electroplating apparatus and methodsInfo
- Publication number
- AU2003226319A1 AU2003226319A1 AU2003226319A AU2003226319A AU2003226319A1 AU 2003226319 A1 AU2003226319 A1 AU 2003226319A1 AU 2003226319 A AU2003226319 A AU 2003226319A AU 2003226319 A AU2003226319 A AU 2003226319A AU 2003226319 A1 AU2003226319 A1 AU 2003226319A1
- Authority
- AU
- Australia
- Prior art keywords
- electropolishing
- methods
- electroplating apparatus
- electroplating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
- C25F3/30—Polishing of semiconducting materials
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Applications Claiming Priority (17)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37095502P | 2002-04-08 | 2002-04-08 | |
US37091902P | 2002-04-08 | 2002-04-08 | |
US37092902P | 2002-04-08 | 2002-04-08 | |
US37095602P | 2002-04-08 | 2002-04-08 | |
US60/370,956 | 2002-04-08 | ||
US60/370,955 | 2002-04-08 | ||
US60/370,929 | 2002-04-08 | ||
US60/370,919 | 2002-04-08 | ||
US37256602P | 2002-04-14 | 2002-04-14 | |
US37254202P | 2002-04-14 | 2002-04-14 | |
US37256702P | 2002-04-14 | 2002-04-14 | |
US60/372,566 | 2002-04-14 | ||
US60/372,542 | 2002-04-14 | ||
US60/372,567 | 2002-04-14 | ||
US39046002P | 2002-06-21 | 2002-06-21 | |
US60/390,460 | 2002-06-21 | ||
PCT/US2003/010725 WO2003087436A1 (en) | 2002-04-08 | 2003-04-08 | Electropolishing and/or electroplating apparatus and methods |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003226319A1 true AU2003226319A1 (en) | 2003-10-27 |
Family
ID=29255769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003226319A Abandoned AU2003226319A1 (en) | 2002-04-08 | 2003-04-08 | Electropolishing and/or electroplating apparatus and methods |
Country Status (10)
Country | Link |
---|---|
US (1) | US20050218003A1 (en) |
EP (1) | EP1492907A4 (en) |
JP (5) | JP2005522585A (en) |
KR (1) | KR20040099407A (en) |
CN (2) | CN100430526C (en) |
AU (1) | AU2003226319A1 (en) |
CA (1) | CA2479794A1 (en) |
SG (1) | SG159384A1 (en) |
TW (1) | TWI274393B (en) |
WO (1) | WO2003087436A1 (en) |
Families Citing this family (63)
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US7997288B2 (en) | 2002-09-30 | 2011-08-16 | Lam Research Corporation | Single phase proximity head having a controlled meniscus for treating a substrate |
US7675000B2 (en) | 2003-06-24 | 2010-03-09 | Lam Research Corporation | System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology |
US8062471B2 (en) | 2004-03-31 | 2011-11-22 | Lam Research Corporation | Proximity head heating method and apparatus |
CN100419121C (en) * | 2004-05-12 | 2008-09-17 | 鸿富锦精密工业(深圳)有限公司 | Wet etching equipment |
JP5155517B2 (en) * | 2005-04-21 | 2013-03-06 | 株式会社荏原製作所 | Wafer delivery apparatus and polishing apparatus |
US7928366B2 (en) | 2006-10-06 | 2011-04-19 | Lam Research Corporation | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
WO2008019076A2 (en) * | 2006-08-04 | 2008-02-14 | E. I. Du Pont De Nemours And Company | Substrate carrier enclosure |
US8474468B2 (en) * | 2006-09-30 | 2013-07-02 | Tokyo Electron Limited | Apparatus and method for thermally processing a substrate with a heated liquid |
WO2008057567A2 (en) * | 2006-11-07 | 2008-05-15 | Integrated Dynamics Engineering, Inc. | Vacuum end effector for handling highly shaped substrates |
EP2097342B1 (en) * | 2006-11-27 | 2023-03-22 | Brooks CCS RS AG | Transfer device for an overhead conveying system |
US8146902B2 (en) | 2006-12-21 | 2012-04-03 | Lam Research Corporation | Hybrid composite wafer carrier for wet clean equipment |
US7479463B2 (en) * | 2007-03-09 | 2009-01-20 | Tokyo Electron Limited | Method for heating a chemically amplified resist layer carried on a rotating substrate |
US8464736B1 (en) | 2007-03-30 | 2013-06-18 | Lam Research Corporation | Reclaim chemistry |
US9383138B2 (en) * | 2007-03-30 | 2016-07-05 | Tokyo Electron Limited | Methods and heat treatment apparatus for uniformly heating a substrate during a bake process |
US20080241400A1 (en) * | 2007-03-31 | 2008-10-02 | Tokyo Electron Limited | Vacuum assist method and system for reducing intermixing of lithography layers |
US8141566B2 (en) | 2007-06-19 | 2012-03-27 | Lam Research Corporation | System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
US8172989B2 (en) * | 2007-11-26 | 2012-05-08 | Sunpower Corporation | Prevention of substrate edge plating in a fountain plating process |
SG187402A1 (en) | 2007-12-27 | 2013-02-28 | Lam Res Corp | Systems and methods for calibrating end effector alignment in a plasma processing system |
CN101911276B (en) | 2007-12-27 | 2012-04-25 | 朗姆研究公司 | Systems and methods for calibrating end effector alignment using at least a light source |
US8229496B2 (en) * | 2007-12-27 | 2012-07-24 | Nec Corporation | Mobile phone terminal |
JP5409649B2 (en) | 2007-12-27 | 2014-02-05 | ラム リサーチ コーポレーション | System and method for determining position and offset |
US9269529B2 (en) | 2007-12-27 | 2016-02-23 | Lam Research Corporation | Systems and methods for dynamic alignment beam calibration |
US7901475B2 (en) * | 2008-01-18 | 2011-03-08 | Gm Global Technology Operations, Inc. | Diesel particulate filter with zoned resistive heater |
CN101580945B (en) * | 2008-05-12 | 2012-12-05 | 盛美半导体设备(上海)有限公司 | Electrodeposition system |
KR101668675B1 (en) * | 2008-09-04 | 2016-10-24 | 어플라이드 머티어리얼스, 인코포레이티드 | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing |
CN102349145B (en) * | 2009-01-11 | 2015-05-27 | 应用材料公司 | Electrostatic end effector apparatus, systems and methods for transporting susbtrates |
CN101851776B (en) * | 2009-03-30 | 2011-10-05 | 昆山中辰矽晶有限公司 | Treatment method of silicon chip edge |
CN103352246B (en) * | 2010-05-19 | 2015-08-19 | 易生科技(北京)有限公司 | Support burnishing device and method |
TWI410532B (en) * | 2010-09-01 | 2013-10-01 | Grand Plastic Technology Co Ltd | Vertical wafer hole filling electrode plating apparatus |
CN102140669B (en) * | 2011-03-17 | 2016-06-01 | 上海集成电路研发中心有限公司 | Cleaning method after silicon chip electroplating copper |
CN102427047B (en) * | 2011-09-28 | 2014-03-12 | 上海华力微电子有限公司 | Wafer back cleaning device and wafer back cleaning method |
SG194239A1 (en) * | 2012-04-09 | 2013-11-29 | Semiconductor Tech & Instr Inc | End handler |
CN102864486A (en) * | 2012-10-24 | 2013-01-09 | 哈尔滨电机厂有限责任公司 | Electrolytic polishing device |
WO2014089731A1 (en) * | 2012-12-10 | 2014-06-19 | Acm Research (Shanghai) Inc. | Semiconductor wafer polishing method |
JP6114060B2 (en) * | 2013-02-27 | 2017-04-12 | 東京エレクトロン株式会社 | Substrate transport apparatus, substrate delivery position confirmation method, and substrate processing system |
CN103510149B (en) * | 2013-10-14 | 2015-11-18 | 陈功 | A kind of wet type automatic polishing method with electrolytic polishing liquid and equipment thereof |
CN105316754B (en) * | 2014-07-29 | 2019-08-16 | 盛美半导体设备(上海)有限公司 | Electrochemical machining process and electrochemical machining apparatus |
US9831110B2 (en) | 2015-07-30 | 2017-11-28 | Lam Research Corporation | Vision-based wafer notch position measurement |
KR102381604B1 (en) * | 2015-12-04 | 2022-04-01 | 에이씨엠 리서치 (상하이) 인코포레이티드 | substrate holding device |
CN105780101B (en) * | 2016-01-27 | 2018-06-26 | 杨继芳 | A kind of Novel electrolytic polissoir |
FR3049940B1 (en) * | 2016-04-06 | 2018-04-13 | Saint- Gobain Glass France | SUPPORT DEVICE FOR GLASS SHEET IN PARTICULAR IN A WASHING PLANT |
US10460960B2 (en) * | 2016-05-09 | 2019-10-29 | Applied Materials, Inc. | Gas panel apparatus and method for reducing exhaust requirements |
JP6756540B2 (en) | 2016-08-08 | 2020-09-16 | 株式会社荏原製作所 | A storage medium containing a plating device, a control method for the plating device, and a program for causing a computer to execute the control method for the plating device. |
CN106191983B (en) * | 2016-08-12 | 2018-06-29 | 厦门大学 | A kind of micro fluidic device and its application process for electrochemical etching processing |
CN106737805A (en) * | 2016-12-13 | 2017-05-31 | 天津彼洋机器人系统工程有限公司 | A kind of multi-function robot clamping jaw |
GB201701166D0 (en) * | 2017-01-24 | 2017-03-08 | Picofluidics Ltd | An apparatus for electrochemically processing semiconductor substrates |
WO2019041154A1 (en) * | 2017-08-30 | 2019-03-07 | Acm Research (Shanghai) Inc. | Plating apparatus |
US11469134B2 (en) * | 2017-09-07 | 2022-10-11 | Acm Research (Shanghai) Inc. | Plating chuck |
CN109560029B (en) * | 2017-09-26 | 2024-02-09 | Tcl环鑫半导体(天津)有限公司 | Automatic round silicon wafer rewinding mechanism |
CN108406568B (en) * | 2018-05-21 | 2023-08-22 | 浙江工业大学 | Device and method for polishing blade edge by using liquid metal polishing solution |
CN108453651A (en) * | 2018-05-24 | 2018-08-28 | 明峰医疗系统股份有限公司 | A kind of pet detector axis positioning tool |
CN109652850B (en) * | 2018-11-23 | 2021-01-26 | 铜陵蓝盾丰山微电子有限公司 | Multi-channel sheet type electroplating device |
CN109609996B (en) * | 2018-12-12 | 2020-12-18 | 东华大学 | Combined hanger for batch hard chromium plating of groove needles of warp knitting machine |
CN109712923B (en) * | 2018-12-26 | 2020-12-11 | 上海福赛特机器人有限公司 | Wafer circulating device and wafer circulating method |
CN109676274B (en) * | 2018-12-27 | 2021-01-15 | 深圳市大族数控科技有限公司 | Pressure release mechanism and vacuum adsorption and dust collection device with same |
CN109759957A (en) * | 2019-02-21 | 2019-05-17 | 中国工程物理研究院激光聚变研究中心 | The circulating feeding liquid device and feed liquid method of polishing fluid in ring throwing |
CN112017932B (en) * | 2019-05-31 | 2022-11-29 | 中微半导体设备(上海)股份有限公司 | Corrosion-resistant structure of gas delivery system in plasma processing device |
EP3851916A1 (en) * | 2020-01-17 | 2021-07-21 | ASML Netherlands B.V. | Suction clamp, object handler, stage apparatus and lithographic apparatus |
US11890718B2 (en) * | 2020-01-17 | 2024-02-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Removable tray assembly for CMP systems |
JP7422586B2 (en) * | 2020-03-30 | 2024-01-26 | 東京エレクトロン株式会社 | Substrate processing equipment and substrate processing method |
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CN114473818B (en) * | 2022-02-28 | 2023-05-02 | 南京尚吉增材制造研究院有限公司 | Combined adjusting polishing clamp for false tooth |
CN114990549B (en) * | 2022-05-30 | 2024-01-12 | 东莞海雅特汽车科技有限公司 | Surface roughening treatment device and method for automobile stamping die casting |
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-
2003
- 2003-04-07 TW TW092107906A patent/TWI274393B/en not_active IP Right Cessation
- 2003-04-08 KR KR10-2004-7015977A patent/KR20040099407A/en not_active Application Discontinuation
- 2003-04-08 US US10/510,522 patent/US20050218003A1/en not_active Abandoned
- 2003-04-08 CN CNB038102064A patent/CN100430526C/en not_active Expired - Fee Related
- 2003-04-08 WO PCT/US2003/010725 patent/WO2003087436A1/en active Application Filing
- 2003-04-08 EP EP03746651A patent/EP1492907A4/en not_active Withdrawn
- 2003-04-08 AU AU2003226319A patent/AU2003226319A1/en not_active Abandoned
- 2003-04-08 CA CA002479794A patent/CA2479794A1/en not_active Abandoned
- 2003-04-08 CN CN2008102128377A patent/CN101353810B/en not_active Expired - Fee Related
- 2003-04-08 SG SG200606992-6A patent/SG159384A1/en unknown
- 2003-04-08 JP JP2003584368A patent/JP2005522585A/en active Pending
-
2006
- 2006-06-08 JP JP2006159680A patent/JP2006319348A/en active Pending
- 2006-07-10 JP JP2006189857A patent/JP2006328543A/en active Pending
- 2006-08-24 JP JP2006227700A patent/JP2007077501A/en active Pending
- 2006-10-17 JP JP2006282453A patent/JP2007051377A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US20050218003A1 (en) | 2005-10-06 |
JP2007051377A (en) | 2007-03-01 |
EP1492907A1 (en) | 2005-01-05 |
TW200402821A (en) | 2004-02-16 |
CN100430526C (en) | 2008-11-05 |
WO2003087436A1 (en) | 2003-10-23 |
JP2006319348A (en) | 2006-11-24 |
JP2005522585A (en) | 2005-07-28 |
CN101353810B (en) | 2012-02-15 |
CN101353810A (en) | 2009-01-28 |
CN1653211A (en) | 2005-08-10 |
KR20040099407A (en) | 2004-11-26 |
SG159384A1 (en) | 2010-03-30 |
CA2479794A1 (en) | 2003-10-23 |
JP2007077501A (en) | 2007-03-29 |
JP2006328543A (en) | 2006-12-07 |
EP1492907A4 (en) | 2008-01-09 |
TWI274393B (en) | 2007-02-21 |
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