AU2002327461A1 - Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes - Google Patents

Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes

Info

Publication number
AU2002327461A1
AU2002327461A1 AU2002327461A AU2002327461A AU2002327461A1 AU 2002327461 A1 AU2002327461 A1 AU 2002327461A1 AU 2002327461 A AU2002327461 A AU 2002327461A AU 2002327461 A AU2002327461 A AU 2002327461A AU 2002327461 A1 AU2002327461 A1 AU 2002327461A1
Authority
AU
Australia
Prior art keywords
reconfigurable
far
probe microscope
field optical
multiple plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002327461A
Other languages
English (en)
Inventor
Anatoly Komissar
Aaron Lewis
Alexander Ratner
Hisham Taha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanonics Imaging Ltd
Original Assignee
Nanonics Imaging Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanonics Imaging Ltd filed Critical Nanonics Imaging Ltd
Publication of AU2002327461A1 publication Critical patent/AU2002327461A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AU2002327461A 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes Abandoned AU2002327461A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL14513601A IL145136A0 (en) 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
IL145136 2001-08-27
PCT/US2002/025947 WO2003019238A2 (en) 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes

Publications (1)

Publication Number Publication Date
AU2002327461A1 true AU2002327461A1 (en) 2003-03-10

Family

ID=11075740

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002327461A Abandoned AU2002327461A1 (en) 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes

Country Status (6)

Country Link
US (1) US7047796B2 (https=)
EP (1) EP1427983A4 (https=)
JP (2) JP2005530125A (https=)
AU (1) AU2002327461A1 (https=)
IL (1) IL145136A0 (https=)
WO (1) WO2003019238A2 (https=)

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JP2006504136A (ja) 2002-10-21 2006-02-02 ナノインク インコーポレーティッド ナノメートル・スケール設計構造、その製造方法および装置、マスク修復、強化、および製造への適用
US8506909B2 (en) * 2004-08-05 2013-08-13 Jpk Instruments Ag Device for receiving a test sample
JP4323412B2 (ja) 2004-11-02 2009-09-02 株式会社ミツトヨ 表面性状測定用探針およびこれを用いた顕微鏡
US7472576B1 (en) 2004-11-17 2009-01-06 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use
GB2443674B (en) * 2006-10-04 2008-11-26 Oxford Instr Superconductivity Flow-cooled magnet system
US7692138B1 (en) 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
US7842920B2 (en) 2006-12-14 2010-11-30 Dcg Systems, Inc. Methods and systems of performing device failure analysis, electrical characterization and physical characterization
US8720256B2 (en) * 2007-02-20 2014-05-13 Wayne Allen Bonin Off-axis imaging for indentation instruments
WO2008131416A1 (en) * 2007-04-24 2008-10-30 The University Of Akron Method and apparatus for performing apertureless near-field scanning optical microscopy
IL197329A0 (en) * 2009-03-01 2009-12-24 David Lewis A scanned probe microscope without interference or geometric constraint for single or multiple probe operation in air or liquid
FR2955938B1 (fr) 2010-01-29 2012-08-03 Commissariat Energie Atomique Dispositif electronique de pilotage et d'amplification pour une sonde locale piezoelectrique de mesure de force sous un faisceau de particules
CN103616532B (zh) * 2013-11-06 2015-10-28 中国科学技术大学 低回差高重复扫描探针显微镜独立扫描器
KR101675489B1 (ko) * 2014-12-24 2016-11-14 한국표준과학연구원 헤드 일체형 원자간력 현미경 및 이를 포함한 융합 현미경
CN111413519B (zh) 2015-02-26 2023-11-07 沙朗特有限责任公司 多集成尖端扫描探针显微镜
EP3262425B1 (en) 2015-02-26 2025-04-02 Xallent Inc. Nano-electro-mechanical-system probes
CN104749160B (zh) * 2015-03-06 2017-09-12 华南师范大学 一种并列双针尖增强的拉曼光谱扫描成像方法
WO2017156245A1 (en) 2016-03-09 2017-09-14 Xallent, LLC Functional prober chip
WO2018089022A1 (en) * 2016-11-11 2018-05-17 Aaron Lewis Enhancing optical signals with probe tips optimized for chemical potential and optical characteristics
WO2018187525A1 (en) 2017-04-06 2018-10-11 Kwame Amponsah Nanoelectromechanical devices with metal-to-metal contacts
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
CN120142699B (zh) * 2025-05-16 2025-08-22 南京大学 用于约瑟夫森探针显微镜的原子力显微成像装置及方法

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JP3021872B2 (ja) * 1991-11-21 2000-03-15 オリンパス光学工業株式会社 カンチレバー、原子間力顕微鏡
US5289004A (en) 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
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JP3081979B2 (ja) 1992-05-08 2000-08-28 セイコーインスツルメンツ株式会社 顕微鏡
JPH0612907U (ja) * 1992-07-15 1994-02-18 オリンパス光学工業株式会社 走査型トンネル顕微鏡およびその試料台
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
JPH0835972A (ja) * 1994-07-21 1996-02-06 Olympus Optical Co Ltd 簡易型ｓｐｍ装置
US5675154A (en) 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
US5949070A (en) * 1995-08-18 1999-09-07 Gamble; Ronald C. Scanning force microscope with integral laser-scanner-cantilever and independent stationary detector
JPH09218211A (ja) * 1996-02-13 1997-08-19 Horiba Ltd カンチレバー走査プローブ顕微鏡
JPH10283972A (ja) * 1997-04-10 1998-10-23 Seiko Instr Inc 走査型プローブ顕微鏡を用いた加工、記録、再生装置
US6246054B1 (en) * 1997-06-10 2001-06-12 Olympus Optical Co., Ltd. Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls
JPH1114636A (ja) * 1997-06-26 1999-01-22 Olympus Optical Co Ltd 透過照明装置
JP3511361B2 (ja) * 1997-08-04 2004-03-29 セイコーインスツルメンツ株式会社 走査プローブ顕微鏡
JP3905254B2 (ja) * 1998-06-22 2007-04-18 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡
JP2000009624A (ja) * 1998-06-22 2000-01-14 Seiko Instruments Inc 走査型プローブ顕微鏡
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Also Published As

Publication number Publication date
EP1427983A2 (en) 2004-06-16
US7047796B2 (en) 2006-05-23
WO2003019238A2 (en) 2003-03-06
JP2005530125A (ja) 2005-10-06
WO2003019238A3 (en) 2003-10-09
US20040216518A1 (en) 2004-11-04
IL145136A0 (en) 2002-06-30
JP2011107157A (ja) 2011-06-02
EP1427983A4 (en) 2008-01-23

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase