AU2002315205A1 - Self-aligning optical micro-mechanical device package - Google Patents

Self-aligning optical micro-mechanical device package

Info

Publication number
AU2002315205A1
AU2002315205A1 AU2002315205A AU2002315205A AU2002315205A1 AU 2002315205 A1 AU2002315205 A1 AU 2002315205A1 AU 2002315205 A AU2002315205 A AU 2002315205A AU 2002315205 A AU2002315205 A AU 2002315205A AU 2002315205 A1 AU2002315205 A1 AU 2002315205A1
Authority
AU
Australia
Prior art keywords
self
device package
mechanical device
optical micro
aligning optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002315205A
Other languages
English (en)
Inventor
Barry S. Carpenter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2002315205A1 publication Critical patent/AU2002315205A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/007—Interconnections between the MEMS and external electrical signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Led Device Packages (AREA)
AU2002315205A 2001-07-24 2002-06-11 Self-aligning optical micro-mechanical device package Abandoned AU2002315205A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/911,951 US6771859B2 (en) 2001-07-24 2001-07-24 Self-aligning optical micro-mechanical device package
US09/911,951 2001-07-24
PCT/US2002/019170 WO2003010087A2 (en) 2001-07-24 2002-06-11 Self-aligning optical micro-mechanical device package

Publications (1)

Publication Number Publication Date
AU2002315205A1 true AU2002315205A1 (en) 2003-02-17

Family

ID=25431153

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002315205A Abandoned AU2002315205A1 (en) 2001-07-24 2002-06-11 Self-aligning optical micro-mechanical device package

Country Status (6)

Country Link
US (1) US6771859B2 (https=)
EP (1) EP1409399A2 (https=)
JP (1) JP2004536349A (https=)
AU (1) AU2002315205A1 (https=)
TW (1) TWI222955B (https=)
WO (1) WO2003010087A2 (https=)

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US6660564B2 (en) * 2002-01-25 2003-12-09 Sony Corporation Wafer-level through-wafer packaging process for MEMS and MEMS package produced thereby
US20050208132A1 (en) * 2002-07-29 2005-09-22 Gayatri Sathyan Methods and dosage forms for reducing side effects of benzisozazole derivatives
US7212698B2 (en) * 2004-02-10 2007-05-01 International Business Machines Corporation Circuit board integrated optical coupling elements
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US7755610B2 (en) * 2005-02-01 2010-07-13 Industrial Technology Research Institute Writing device for bistable material with improved flexible material alignment features
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GB2583450B (en) 2019-04-01 2023-04-12 Huber Suhner Polatis Ltd Method and apparatus for suction alignment

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Also Published As

Publication number Publication date
WO2003010087A2 (en) 2003-02-06
US20030021541A1 (en) 2003-01-30
WO2003010087A3 (en) 2003-10-09
US6771859B2 (en) 2004-08-03
TWI222955B (en) 2004-11-01
JP2004536349A (ja) 2004-12-02
EP1409399A2 (en) 2004-04-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase