AU2002241825A1 - Transportable container including an internal environment monitor - Google Patents

Transportable container including an internal environment monitor

Info

Publication number
AU2002241825A1
AU2002241825A1 AU2002241825A AU2002241825A AU2002241825A1 AU 2002241825 A1 AU2002241825 A1 AU 2002241825A1 AU 2002241825 A AU2002241825 A AU 2002241825A AU 2002241825 A AU2002241825 A AU 2002241825A AU 2002241825 A1 AU2002241825 A1 AU 2002241825A1
Authority
AU
Australia
Prior art keywords
container including
internal environment
transportable container
environment monitor
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241825A
Inventor
Edward Dante
Mihir Parikh
Jerry A. Speasl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Cayman Ltd
Original Assignee
Entegris Cayman Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Cayman Ltd filed Critical Entegris Cayman Ltd
Publication of AU2002241825A1 publication Critical patent/AU2002241825A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
AU2002241825A 2001-01-10 2002-01-09 Transportable container including an internal environment monitor Abandoned AU2002241825A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US26103501P 2001-01-10 2001-01-10
US60/261,035 2001-01-10
US10/042,849 US6901971B2 (en) 2001-01-10 2002-01-08 Transportable container including an internal environment monitor
US10/042,349 2002-01-08
PCT/US2002/000467 WO2002056344A2 (en) 2001-01-10 2002-01-09 Transportable container including an internal environment monitor

Publications (1)

Publication Number Publication Date
AU2002241825A1 true AU2002241825A1 (en) 2002-07-24

Family

ID=28044046

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002241825A Abandoned AU2002241825A1 (en) 2001-01-10 2002-01-09 Transportable container including an internal environment monitor

Country Status (7)

Country Link
US (3) US6901971B2 (en)
EP (1) EP1349781A2 (en)
JP (1) JP4677517B2 (en)
KR (1) KR100885010B1 (en)
CN (1) CN1251925C (en)
AU (1) AU2002241825A1 (en)
WO (1) WO2002056344A2 (en)

Families Citing this family (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6901971B2 (en) * 2001-01-10 2005-06-07 Entegris, Inc. Transportable container including an internal environment monitor
US6879876B2 (en) 2001-06-13 2005-04-12 Advanced Technology Materials, Inc. Liquid handling system with electronic information storage
US20030115978A1 (en) * 2001-12-20 2003-06-26 Moehnke Stephanie J. Apparatus and method for monitoring environment within a container
US10118576B2 (en) 2002-06-11 2018-11-06 Intelligent Technologies International, Inc. Shipping container information recordation techniques
US7204669B2 (en) * 2002-07-17 2007-04-17 Applied Materials, Inc. Semiconductor substrate damage protection system
DE10240771B3 (en) * 2002-08-30 2004-03-11 Infineon Technologies Ag Container for semiconductor discs or flat image screen elements used for transporting discs between successive treatment stations during manufacturing process
US7637794B2 (en) * 2002-09-11 2009-12-29 Mattel, Inc. Breath-sensitive toy
FR2845973B1 (en) * 2002-10-22 2005-03-04 Eric Cognard DEVICE FOR TRANSPORTING A CONTAINER IN A VERTICAL POSITION COMPRISING A PACKAGING WITHIN WHICH A GYROSCOPIC SYSTEM IS ATTENDED
WO2004080615A2 (en) * 2003-03-10 2004-09-23 Sensor Wireless Incorporated Apparatus for detecting and reporting environmental conditions in bulk processing and handling of goods
JP4027837B2 (en) * 2003-04-28 2007-12-26 Ｔｄｋ株式会社 Purge apparatus and purge method
US20040238623A1 (en) * 2003-05-09 2004-12-02 Wayne Asp Component handling device having a film insert molded RFID tag
JP2005031826A (en) * 2003-07-09 2005-02-03 Hitachi Ltd Sensor device and its control method
US7413586B2 (en) * 2004-02-27 2008-08-19 Intel Corporation In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
US8258950B2 (en) * 2004-07-15 2012-09-04 Savi Technology, Inc. Method and apparatus for control or monitoring of a container
CN101044074B (en) 2004-08-19 2014-04-02 布鲁克斯自动化公司 Reduced capacity carrier and method of use
US7839289B2 (en) * 2004-08-26 2010-11-23 Avante International Technology, Inc. Object monitoring, locating, and tracking system and method employing RFID devices
US7368312B1 (en) * 2004-10-15 2008-05-06 Morgan Research Corporation MEMS sensor suite on a chip
JP4012190B2 (en) * 2004-10-26 2007-11-21 Ｔｄｋ株式会社 Closed container lid opening and closing system and opening and closing method
US7378962B2 (en) * 2004-12-30 2008-05-27 Sap Aktiengesellschaft Sensor node management and method for monitoring a seal condition of an enclosure
US7383691B2 (en) * 2005-01-26 2008-06-10 Hewlett-Packard Development Company, L.P. Modular networked sensor assembly
US7760104B2 (en) * 2005-04-08 2010-07-20 Entegris, Inc. Identification tag for fluid containment drum
US20060243625A1 (en) * 2005-04-28 2006-11-02 Biddick Glenn R Prismatic source-indicating medical device packaging
CN103072933B (en) * 2005-10-21 2015-10-07 Ch&I技术公司 Composite material transmits and distribution system
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
US7845742B2 (en) * 2006-02-28 2010-12-07 Spacesaver Corporation Mobile storage unit with environmental monitoring system
EP1857935B1 (en) * 2006-05-16 2013-10-23 Saab Ab Fault tolerant data bus node in a distributed system
JP5160541B2 (en) * 2006-06-19 2013-03-13 インテグリス・インコーポレーテッド System for purging reticle storage
CN101512604B (en) 2006-07-10 2014-02-19 高级技术材料公司 Systems and methods for managing material storage vessels having information storage elements
WO2008147379A1 (en) * 2006-09-14 2008-12-04 Brooks Automation Inc. Carrier gas system and coupling substrate carrier to a loadport
JP5318765B2 (en) * 2006-09-14 2013-10-16 ブルックス オートメーション インコーポレイテッド Connection with carrier gas system and substrate carrier load port
US8620775B2 (en) * 2006-09-25 2013-12-31 Siemens Industry, Inc. Retail behavioral tracking using microsystems
US7511959B2 (en) * 2007-04-25 2009-03-31 Hewlett-Packard Development Company, L.P. Scalable computing apparatus
EP2003468B1 (en) * 2007-06-13 2015-09-16 Airbus DS GmbH Dissemination of critical atmospheric conditions within global and regional navigation satellite systems
US8928459B2 (en) * 2007-06-15 2015-01-06 Worcester Polytechnic Institute Precision location methods and systems
US20090056116A1 (en) * 2007-08-07 2009-03-05 Micro Foundry Inc. Integrated miniature device factory
JP4730384B2 (en) * 2008-02-21 2011-07-20 Ｔｄｋ株式会社 Closed container and its management system
US8468887B2 (en) * 2008-04-14 2013-06-25 Freescale Semiconductor, Inc. Resonant accelerometer with low sensitivity to package stress
KR101659719B1 (en) * 2008-07-08 2016-09-26 코닌클리케 필립스 엔.브이. Methods and apparatus for determining relative positions of led lighting units
US20100051502A1 (en) * 2008-09-04 2010-03-04 3M Innovative Properties Company Carrier having integral detection and measurement of environmental parameters
EP2172757B1 (en) * 2008-10-02 2011-08-17 RENA GmbH Method and device for recording physical parameters
DE102008052985A1 (en) * 2008-10-23 2010-04-29 Li-Tec Battery Gmbh Packaging device and packaging system for substantially flat objects, for example lithium-ion cells
US8135560B2 (en) * 2009-01-30 2012-03-13 Applied Materials, Inc. Sensor system for semiconductor manufacturing apparatus
JP4743454B2 (en) * 2009-04-24 2011-08-10 村田機械株式会社 Transport system
WO2011001178A1 (en) * 2009-06-30 2011-01-06 Roylan Developments Limited Apparatus for purging containers for storing sensitive materials
WO2011008649A2 (en) 2009-07-13 2011-01-20 Carrier Corporation Transport refrigeration system, transport refrigeration unit, and methods for same
US9958198B2 (en) 2009-07-13 2018-05-01 Carrier Corporation Embedded cargo sensors for a refrigeration system
US8299920B2 (en) 2009-09-25 2012-10-30 Fedex Corporate Services, Inc. Sensor based logistics system
US8239169B2 (en) 2009-09-25 2012-08-07 Gregory Timothy L Portable computing device and method for asset management in a logistics system
US9633327B2 (en) 2009-09-25 2017-04-25 Fedex Corporate Services, Inc. Sensor zone management
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
US8727744B2 (en) 2010-02-26 2014-05-20 Entegris, Inc. Method and system for optimizing operation of a pump
KR101780789B1 (en) * 2010-03-15 2017-09-22 삼성전자주식회사 Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same
US8591809B2 (en) * 2010-03-15 2013-11-26 Samsung Electronics Co., Ltd. Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same
CN101958041B (en) * 2010-09-28 2012-07-18 北京经纬恒润科技有限公司 System and method for monitoring transportation environment
JP2012094822A (en) * 2010-09-30 2012-05-17 Shibaura Mechatronics Corp Hermetic type container and semiconductor manufacturing device
TWI563351B (en) 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
CN103620758B (en) 2011-06-28 2017-02-15 动力微系统公司 Semiconductor stocker systems and methods
US20130218518A1 (en) * 2012-02-21 2013-08-22 International Business Machines Corporation Automated, three dimensional mappable environmental sampling system and methods of use
US9144026B2 (en) 2012-03-21 2015-09-22 Thermo King Corporation Interfaces for setup of a transport refrigeration system and providing transport refrigeration system diagnostic information to a user
US8963552B2 (en) 2012-04-26 2015-02-24 3M Innovative Properties Company Electrostatic discharge event detector
CN103887207B (en) * 2012-12-20 2016-12-07 上海华虹宏力半导体制造有限公司 Prevent the rinse bath outloading mechanism of wafer overlap and go out pallet piling up method
US9239997B2 (en) * 2013-03-15 2016-01-19 The United States Of America As Represented By The Secretary Of The Navy Remote environmental and condition monitoring system
JP5884779B2 (en) * 2013-06-26 2016-03-15 株式会社ダイフク Goods storage facility
KR101719041B1 (en) * 2014-11-19 2017-03-22 주식회사 알티자동화 Apparatus for ahead warning system of automatic transfer equipment
TWM500354U (en) * 2015-01-30 2015-05-01 Shu-zhen LIU Sealing device having ambient sensing and data transmission
CN107428462B (en) 2015-02-18 2020-06-23 开利公司 Apparatus and method for monitoring cargo condition
JP6543958B2 (en) * 2015-02-26 2019-07-17 セイコーエプソン株式会社 Electronic component conveying apparatus and electronic component inspection apparatus
JP6451453B2 (en) * 2015-03-31 2019-01-16 Tdk株式会社 GAS PURGE DEVICE, LOAD PORT DEVICE, PURGE CONTAINER CONTAINER STAND, AND GAS PURGE METHOD
US10453348B2 (en) * 2015-06-15 2019-10-22 ImageKeeper LLC Unmanned aerial vehicle management
US11569138B2 (en) 2015-06-16 2023-01-31 Kla Corporation System and method for monitoring parameters of a semiconductor factory automation system
US10192762B2 (en) * 2016-01-26 2019-01-29 Applied Materials, Inc. Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
US10543988B2 (en) 2016-04-29 2020-01-28 TricornTech Taiwan Real-time mobile carrier system for facility monitoring and control
CN106148182A (en) * 2016-06-24 2016-11-23 浙江省疾病预防控制中心 A kind of high-level bio-safety conveying arrangement
JP6855774B2 (en) * 2016-12-13 2021-04-07 Tdk株式会社 Wafer transfer container atmosphere measuring device, wafer transfer container, wafer transfer container internal cleaning device, and wafer transfer container internal cleaning method
CN108428642B (en) * 2017-02-15 2021-06-18 台湾积体电路制造股份有限公司 Machine diagnosis tool, wafer processing machine loading port diagnosis tool and method thereof
KR102413791B1 (en) * 2017-10-30 2022-06-28 삼성전자주식회사 Substrate carrier
US10790177B2 (en) 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
JP7157368B2 (en) * 2018-03-05 2022-10-20 Tdk株式会社 A wafer transport container, a wafer transport container position detection method, a wafer transport container position and impact detection method, a wafer transport container moving speed and acceleration control method, and a wafer transport container interior cleaning method.
US10539404B1 (en) 2018-03-23 2020-01-21 The United States Of America As Represented By The Secretary Of The Navy Blast containment system for trash cans
JP7110663B2 (en) * 2018-03-28 2022-08-02 Tdk株式会社 WAFER CONTAINER AND WAFER CONTAINER CLEANING METHOD
JP7256358B2 (en) * 2018-05-24 2023-04-12 シンフォニアテクノロジー株式会社 Substrate storage container management system, substrate storage container management method
DE102018113786A1 (en) * 2018-06-08 2019-12-12 Vat Holding Ag Wafer transfer unit and wafer transfer system
US10533852B1 (en) * 2018-09-27 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Leveling sensor, load port including the same, and method of leveling a load port
US11239099B2 (en) * 2018-09-27 2022-02-01 Taiwan Semiconductor Manufacturing Co., Ltd. Tool monitoring device and method of monitoring tool
DE102018132307B4 (en) * 2018-12-14 2020-10-22 CURO GmbH System and method for monitoring a manufacturing process for wafers and containers with RFID sensors
TWI737996B (en) * 2019-05-16 2021-09-01 華景電通股份有限公司 Load port monitoring system and monitoring method thereof
CN111952226B (en) * 2019-05-16 2024-03-26 华景电通股份有限公司 Wafer carrier monitoring system and monitoring method thereof
KR102276821B1 (en) * 2019-08-01 2021-07-13 주식회사 유타렉스 Foup management system
US10854055B1 (en) * 2019-10-17 2020-12-01 The Travelers Indemnity Company Systems and methods for artificial intelligence (AI) theft prevention and recovery
CN111060154A (en) * 2019-12-26 2020-04-24 西安奕斯伟硅片技术有限公司 Semiconductor device storage box
CN113078084A (en) * 2020-01-06 2021-07-06 长鑫存储技术有限公司 Semiconductor manufacturing method and system
KR102256132B1 (en) * 2020-02-18 2021-05-25 (주)캔탑스 Automated Material Handling System for Managing Carrier Internal Pollution
US11720033B2 (en) * 2021-03-05 2023-08-08 Taiwan Semiconductor Manufacturing Co., Ltd. Material management method and system
TWI814359B (en) * 2022-04-27 2023-09-01 迅得機械股份有限公司 Air-tight cabinets and storage systems

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534389A (en) 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4532970A (en) 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US5097421A (en) 1984-12-24 1992-03-17 Asyst Technologies, Inc. Intelligent waxer carrier
US5166884A (en) 1984-12-24 1992-11-24 Asyst Technologies, Inc. Intelligent system for processing and storing articles
JPH071784B2 (en) * 1985-12-23 1995-01-11 アシスト テクノロジーズ インコーポレーテッド Information processing device in standard mechanical interface system
US4724874A (en) * 1986-05-01 1988-02-16 Asyst Technologies Sealable transportable container having a particle filtering system
US4974166A (en) 1987-05-18 1990-11-27 Asyst Technologies, Inc. Processing systems with intelligent article tracking
US4827110A (en) 1987-06-11 1989-05-02 Fluoroware, Inc. Method and apparatus for monitoring the location of wafer disks
JPH0691507B2 (en) 1988-08-05 1994-11-14 三菱電機株式会社 Multiplexer
US5431599A (en) 1990-08-29 1995-07-11 Intelligent Enclosures Corporation Environmental control system
US5401212A (en) 1990-08-29 1995-03-28 Intelligent Enclosures Corporation Environmental control system
JP2573205Y2 (en) * 1990-10-30 1998-05-28 ソニー株式会社 Semiconductor wafer storage container
US5339074A (en) 1991-09-13 1994-08-16 Fluoroware, Inc. Very low frequency tracking system
US5351415A (en) * 1992-05-18 1994-10-04 Convey, Inc. Method and apparatus for maintaining clean articles
KR100303075B1 (en) 1992-11-06 2001-11-30 조셉 제이. 스위니 Integrated circuit wafer transfer method and apparatus
JP3336652B2 (en) * 1993-01-27 2002-10-21 神鋼電機株式会社 Portable closed container
JPH06345222A (en) * 1993-06-08 1994-12-20 Kawasaki Steel Corp Management of wafer cassette and device therefor
JP3371561B2 (en) * 1994-08-02 2003-01-27 神鋼電機株式会社 Container management device
FR2747112B1 (en) * 1996-04-03 1998-05-07 Commissariat Energie Atomique DEVICE FOR TRANSPORTING FLAT OBJECTS AND METHOD FOR TRANSFERRING THESE OBJECTS BETWEEN SAID DEVICE AND A PROCESSING MACHINE
US5879458A (en) * 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system
US5969639A (en) 1997-07-28 1999-10-19 Lockheed Martin Energy Research Corporation Temperature measuring device
US6244121B1 (en) 1998-03-06 2001-06-12 Applied Materials, Inc. Sensor device for non-intrusive diagnosis of a semiconductor processing system
US6025777A (en) * 1998-03-11 2000-02-15 Fuller Brothers, Inc. Off-the-road tire temperature and pressure monitoring system
JP3507330B2 (en) * 1998-05-18 2004-03-15 大日本スクリーン製造株式会社 Substrate processing equipment
JP3370279B2 (en) * 1998-07-07 2003-01-27 信越ポリマー株式会社 Precision substrate storage container
US6034596A (en) * 1998-09-15 2000-03-07 Smith; Julian Motor vehicle tire pressure and temperature sensing system
JP4305988B2 (en) * 1999-01-27 2009-07-29 シンフォニアテクノロジー株式会社 Wafer career
US6427096B1 (en) * 1999-02-12 2002-07-30 Honeywell International Inc. Processing tool interface apparatus for use in manufacturing environment
EP1139390A1 (en) * 2000-03-28 2001-10-04 Infineon Technologies AG Semiconductor wafer pod
US6577960B1 (en) * 2000-07-13 2003-06-10 Simmonds Precision Products, Inc. Liquid gauging apparatus using a time delay neural network
DE50113779D1 (en) * 2000-11-08 2008-05-08 Greenfield Ag Method for filling a vehicle tank with gas
JP3939101B2 (en) * 2000-12-04 2007-07-04 株式会社荏原製作所 Substrate transport method and substrate transport container
JP2002176097A (en) * 2000-12-05 2002-06-21 Ebara Corp Substrate conveyance container and its usage
US6901971B2 (en) 2001-01-10 2005-06-07 Entegris, Inc. Transportable container including an internal environment monitor
ITTO20010887A1 (en) * 2001-09-18 2003-03-18 Fiat Ricerche SYSTEM AND PROCEDURE FOR SUPPLYING LPG TO AN INTERNAL COMBUSTION ENGINE.
US7135852B2 (en) * 2002-12-03 2006-11-14 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
JP4342923B2 (en) 2003-12-09 2009-10-14 大日本スクリーン製造株式会社 Substrate processing apparatus and substrate processing method

Also Published As

Publication number Publication date
US20050284535A1 (en) 2005-12-29
KR20030085516A (en) 2003-11-05
JP4677517B2 (en) 2011-04-27
EP1349781A2 (en) 2003-10-08
US6901971B2 (en) 2005-06-07
US7156129B2 (en) 2007-01-02
CN1251925C (en) 2006-04-19
WO2002056344A3 (en) 2002-12-12
WO2002056344A2 (en) 2002-07-18
KR100885010B1 (en) 2009-02-20
CN1503749A (en) 2004-06-09
US20070185687A1 (en) 2007-08-09
JP2004527899A (en) 2004-09-09
US20020187025A1 (en) 2002-12-12
US7490637B2 (en) 2009-02-17

Similar Documents

Publication Publication Date Title
AU2002241825A1 (en) Transportable container including an internal environment monitor
AU2003261377A1 (en) Dropper bottle and accessories therefor
AU2002364897A1 (en) Imiquimod therapies
AU2002311955A1 (en) Transportable storage container assembly
AUPR452901A0 (en) An apparatus for storing bottles
AU2002332010A1 (en) Management platform and environment
AU2002245585A1 (en) Transportable part rack
AU2002349060A1 (en) Container
AU2002357308A1 (en) Monitor device
AU2002349112A1 (en) Container
AU2002366978A1 (en) Rigid-folding container
AU2002343095A1 (en) Container
AUPR562001A0 (en) Transportable container
AU2002251295A1 (en) Container
AU2002345202A1 (en) Portable livestock container
AUPR847501A0 (en) Explosion containment device
AUPR542901A0 (en) Food handling device
AU2002324251A1 (en) Container arrangement
AU2002320746A1 (en) Observation device
AUPR338401A0 (en) Crackerjack crack monitor
AU2002363549A1 (en) Contents providing system for portable terminal
AU2002244601A1 (en) Gastight container
AU2002310682A1 (en) Device for storing objects
AU2002233816A1 (en) Container with internal mixing means
AU2002337282A1 (en) Endoscope transportation container

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase