AU2001285797A1 - Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it - Google Patents

Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Info

Publication number
AU2001285797A1
AU2001285797A1 AU2001285797A AU8579701A AU2001285797A1 AU 2001285797 A1 AU2001285797 A1 AU 2001285797A1 AU 2001285797 A AU2001285797 A AU 2001285797A AU 8579701 A AU8579701 A AU 8579701A AU 2001285797 A1 AU2001285797 A1 AU 2001285797A1
Authority
AU
Australia
Prior art keywords
implementing
gas
discharge plasma
wave radiation
producing short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001285797A
Inventor
Vladimir Mikhailovich Borisov
Oleg Borisovich Khristoforov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lambda Physik AG
Original Assignee
Lambda Physik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2000117336/09A external-priority patent/RU2206186C2/en
Application filed by Lambda Physik AG filed Critical Lambda Physik AG
Publication of AU2001285797A1 publication Critical patent/AU2001285797A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H05G2/005—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state containing a metal as principal radiation generating component

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
AU2001285797A 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it Abandoned AU2001285797A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
RU2000117336/09A RU2206186C2 (en) 2000-07-04 2000-07-04 Method and device for producing short-wave radiation from gas-discharge plasma
RU2000117336 2000-07-04
US09693490 2000-10-20
US09/693,490 US6414438B1 (en) 2000-07-04 2000-10-20 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
PCT/EP2001/007658 WO2002007484A2 (en) 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Publications (1)

Publication Number Publication Date
AU2001285797A1 true AU2001285797A1 (en) 2002-01-30

Family

ID=26654057

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001285797A Abandoned AU2001285797A1 (en) 2000-07-04 2001-07-04 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it

Country Status (4)

Country Link
EP (1) EP1300056A2 (en)
AU (1) AU2001285797A1 (en)
TW (1) TW503669B (en)
WO (1) WO2002007484A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10139677A1 (en) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Method and device for generating extremely ultraviolet radiation and soft X-rays
FR2841684B1 (en) * 2002-06-28 2004-09-24 Centre Nat Rech Scient RADIATION SOURCE, ESPECIALLY ULTRAVIOLET WITH DISCHARGES
DE10238096B3 (en) 2002-08-21 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gas discharge lamp for extreme UV lithography or X-ray microscopy has tapered electrode opening for transport of charge carriers from external region to discharge space
DE10310623B8 (en) 2003-03-10 2005-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and apparatus for generating a plasma by electrical discharge in a discharge space

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01296596A (en) * 1988-05-25 1989-11-29 Hitachi Ltd Plasma x-ray generating device

Also Published As

Publication number Publication date
WO2002007484A3 (en) 2002-04-25
TW503669B (en) 2002-09-21
EP1300056A2 (en) 2003-04-09
WO2002007484A2 (en) 2002-01-24

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