AU2001270710A1 - Nano-electromechanical filter - Google Patents

Nano-electromechanical filter

Info

Publication number
AU2001270710A1
AU2001270710A1 AU2001270710A AU7071001A AU2001270710A1 AU 2001270710 A1 AU2001270710 A1 AU 2001270710A1 AU 2001270710 A AU2001270710 A AU 2001270710A AU 7071001 A AU7071001 A AU 7071001A AU 2001270710 A1 AU2001270710 A1 AU 2001270710A1
Authority
AU
Australia
Prior art keywords
microtip
nano
filter
nanostructure
electromechanical filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001270710A
Other languages
English (en)
Inventor
Lionel Buchaillot
Dominique Jules Collard Vi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of AU2001270710A1 publication Critical patent/AU2001270710A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filtering Materials (AREA)
  • Glass Compositions (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Micromachines (AREA)
AU2001270710A 2000-06-30 2001-06-29 Nano-electromechanical filter Abandoned AU2001270710A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0008490 2000-06-30
FR0008490A FR2811163B1 (fr) 2000-06-30 2000-06-30 Filtre nono-electromecanique
PCT/FR2001/002087 WO2002001717A1 (fr) 2000-06-30 2001-06-29 Filtre nano-electromecanique

Publications (1)

Publication Number Publication Date
AU2001270710A1 true AU2001270710A1 (en) 2002-01-08

Family

ID=8851939

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001270710A Abandoned AU2001270710A1 (en) 2000-06-30 2001-06-29 Nano-electromechanical filter

Country Status (10)

Country Link
US (1) US6947719B2 (fr)
EP (1) EP1295389B1 (fr)
JP (1) JP4794805B2 (fr)
KR (1) KR100749030B1 (fr)
AT (1) ATE377291T1 (fr)
AU (1) AU2001270710A1 (fr)
CA (1) CA2414354C (fr)
DE (1) DE60131166T2 (fr)
FR (1) FR2811163B1 (fr)
WO (1) WO2002001717A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004027833A2 (fr) 2002-09-23 2004-04-01 Georgia Tech Research Corporation Systemes de filtration mecaniques microelectriques couples electriquement, et procedes associes
JP4593239B2 (ja) * 2003-11-19 2010-12-08 パナソニック株式会社 電気機械フィルタ
US20050261559A1 (en) * 2004-05-18 2005-11-24 Mumford John R Wireless physiological monitoring system
US20110068834A1 (en) * 2005-01-07 2011-03-24 Trustees Of Boston University Electro-mechanical oscillating devices and associated methods
US8063535B2 (en) * 2005-01-07 2011-11-22 Trustees Of Boston University Nanomechanical oscillator
JP4994096B2 (ja) * 2006-04-20 2012-08-08 パナソニック株式会社 半導体装置の製造方法およびこれを用いた半導体装置
WO2008036830A2 (fr) * 2006-09-20 2008-03-27 Trustees Of Boston University Filtre de circuit integre nanoelectromecanique
WO2008036845A2 (fr) * 2006-09-20 2008-03-27 Trustees Of Boston University Banque et commutateur à circuit intégré nano-électromécanique
JP5046966B2 (ja) * 2007-01-23 2012-10-10 パナソニック株式会社 電気機械共振器及びその製造方法
FR2929464B1 (fr) * 2008-03-28 2011-09-09 Commissariat Energie Atomique Nano resonnateur magnetique
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8044736B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8111108B2 (en) * 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931600A (en) * 1973-06-11 1976-01-06 Kokusai Electric Co., Ltd. Mechanical filter
US5023503A (en) * 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator
DE4414969C1 (de) * 1994-04-28 1995-06-08 Siemens Ag Mikromechanisches Bauteil mit einer dielektrischen beweglichen Struktur, Mikrosystem und Herstellverfahren
JP3139339B2 (ja) * 1995-09-13 2001-02-26 株式会社村田製作所 真空封止デバイスおよびその製造方法
JPH10148643A (ja) * 1996-11-19 1998-06-02 Tdk Corp 加速度センサ及びその製造方法
GB9815820D0 (en) * 1998-07-22 1998-09-16 Secr Defence Improvements relating to micro-machining
JP2001016068A (ja) * 1999-06-30 2001-01-19 Kyocera Corp 圧電共振子
US6601276B2 (en) * 2001-05-11 2003-08-05 Agere Systems Inc. Method for self alignment of patterned layers in thin film acoustic devices
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置

Also Published As

Publication number Publication date
JP2004502374A (ja) 2004-01-22
JP4794805B2 (ja) 2011-10-19
CA2414354A1 (fr) 2002-01-03
US20030186672A1 (en) 2003-10-02
WO2002001717A1 (fr) 2002-01-03
EP1295389B1 (fr) 2007-10-31
FR2811163B1 (fr) 2002-10-04
CA2414354C (fr) 2009-09-29
DE60131166T2 (de) 2008-09-25
FR2811163A1 (fr) 2002-01-04
KR100749030B1 (ko) 2007-08-13
DE60131166D1 (de) 2007-12-13
US6947719B2 (en) 2005-09-20
EP1295389A1 (fr) 2003-03-26
ATE377291T1 (de) 2007-11-15
KR20030024712A (ko) 2003-03-26

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