AU2001268344A1 - Vcsel and vcsel array having integrated microlenses for use in a semiconductor laser pumped solid state laser system - Google Patents

Vcsel and vcsel array having integrated microlenses for use in a semiconductor laser pumped solid state laser system

Info

Publication number
AU2001268344A1
AU2001268344A1 AU2001268344A AU6834401A AU2001268344A1 AU 2001268344 A1 AU2001268344 A1 AU 2001268344A1 AU 2001268344 A AU2001268344 A AU 2001268344A AU 6834401 A AU6834401 A AU 6834401A AU 2001268344 A1 AU2001268344 A1 AU 2001268344A1
Authority
AU
Australia
Prior art keywords
vcsel
solid state
pumped solid
semiconductor laser
laser system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001268344A
Inventor
Chuni L. Ghosh
Jiamin Zhang
Kaiyan Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton Optronics Inc
Original Assignee
Princeton Optronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Princeton Optronics Inc filed Critical Princeton Optronics Inc
Publication of AU2001268344A1 publication Critical patent/AU2001268344A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42—Arrays of surface emitting lasers
    • H01S5/423—Arrays of surface emitting lasers having a vertical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0064—Anti-reflection devices, e.g. optical isolaters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0602—Crystal lasers or glass lasers
    • H01S3/0604—Crystal lasers or glass lasers in the form of a plate or disc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1062—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a controlled passive interferometer, e.g. a Fabry-Perot etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0207—Substrates having a special shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388—Lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
AU2001268344A 2000-07-12 2001-06-13 Vcsel and vcsel array having integrated microlenses for use in a semiconductor laser pumped solid state laser system Abandoned AU2001268344A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/615,065 US6888871B1 (en) 2000-07-12 2000-07-12 VCSEL and VCSEL array having integrated microlenses for use in a semiconductor laser pumped solid state laser system
US09/615,065 2000-07-12
PCT/US2001/018881 WO2002005397A2 (en) 2000-07-12 2001-06-13 Vcsel and vcsel array having integrated microlenses for use in a semiconductor laser pumped solid state laser system

Publications (1)

Publication Number Publication Date
AU2001268344A1 true AU2001268344A1 (en) 2002-01-21

Family

ID=24463852

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001268344A Abandoned AU2001268344A1 (en) 2000-07-12 2001-06-13 Vcsel and vcsel array having integrated microlenses for use in a semiconductor laser pumped solid state laser system

Country Status (6)

Country Link
US (2) US6888871B1 (en)
JP (1) JP2004503118A (en)
CN (1) CN1448000A (en)
AU (1) AU2001268344A1 (en)
CA (1) CA2415696A1 (en)
WO (1) WO2002005397A2 (en)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108079A1 (en) * 2000-05-30 2002-09-12 Osram Opto Semiconductors Gmbh Optically-pumped surface-emitting semiconductor laser device, has edge-emitting structure of pumping source and radiation-emitting quantum pot type structure applied to common substrate
JP2005150472A (en) * 2003-11-17 2005-06-09 Alps Electric Co Ltd Variable-wavelength light source and method for manufacturing the same
JP4789423B2 (en) * 2004-03-30 2011-10-12 キヤノン株式会社 Optical waveguide device
CN101023568A (en) 2004-09-22 2007-08-22 奥斯兰姆奥普托半导体有限责任公司 A surface-emitting semi-conductor laser device and method for making same
JP4839662B2 (en) 2005-04-08 2011-12-21 富士ゼロックス株式会社 Surface emitting semiconductor laser array and optical transmission system using the same
US7430231B2 (en) * 2005-04-29 2008-09-30 Ningyi Luo Vertical cavity surface emitting laser (VCSEL) arrays pumped solid-state lasers
US7526009B2 (en) * 2005-05-07 2009-04-28 Samsung Electronics Co., Ltd. End-pumped vertical external cavity surface emitting laser
US20070019699A1 (en) * 2005-07-22 2007-01-25 Robbins Virginia M Light emitting device and method of manufacture
KR20080112419A (en) * 2006-04-27 2008-12-24 코닌클리즈케 필립스 일렉트로닉스 엔.브이. Intracavity upconversion laser
AU2006348293B2 (en) * 2006-09-13 2013-05-02 Edith Cowan University An optical connection component
US8378287B2 (en) * 2007-06-27 2013-02-19 Koninklijke Philips Electronics N.V. Optical sensor module including a diode laser and a substrate transparent to radiation emitted by the diode laser and a method for manufacturing an optical sensor module
KR20100009056A (en) * 2008-07-17 2010-01-27 삼성전자주식회사 Print head and image forming apparatus employing the same
US8355417B2 (en) * 2008-10-14 2013-01-15 Koninklijke Philips Electronics N.V. Vertical cavity surface emitting laser with improved mode-selectivity
US8995485B2 (en) 2009-02-17 2015-03-31 Trilumina Corp. High brightness pulsed VCSEL sources
US10244181B2 (en) * 2009-02-17 2019-03-26 Trilumina Corp. Compact multi-zone infrared laser illuminator
US10038304B2 (en) * 2009-02-17 2018-07-31 Trilumina Corp. Laser arrays for variable optical properties
US20130223846A1 (en) 2009-02-17 2013-08-29 Trilumina Corporation High speed free-space optical communications
US8995493B2 (en) 2009-02-17 2015-03-31 Trilumina Corp. Microlenses for multibeam arrays of optoelectronic devices for high frequency operation
US8979338B2 (en) 2009-12-19 2015-03-17 Trilumina Corp. System for combining laser array outputs into a single beam carrying digital data
US9740019B2 (en) 2010-02-02 2017-08-22 Apple Inc. Integrated structured-light projector
US20110187878A1 (en) * 2010-02-02 2011-08-04 Primesense Ltd. Synchronization of projected illumination with rolling shutter of image sensor
JPWO2011114984A1 (en) * 2010-03-15 2013-06-27 ヤーマン株式会社 Laser treatment equipment
CN103181040B (en) * 2010-11-03 2016-04-27 皇家飞利浦电子股份有限公司 For the optical element of vertical external cavity surface emitting lasers
WO2012068563A1 (en) * 2010-11-19 2012-05-24 Trilumina Corporation Optical pumping of solid-state laser material using addressable laser array
US10054430B2 (en) 2011-08-09 2018-08-21 Apple Inc. Overlapping pattern projector
US8749796B2 (en) 2011-08-09 2014-06-10 Primesense Ltd. Projectors of structured light
US11095365B2 (en) 2011-08-26 2021-08-17 Lumentum Operations Llc Wide-angle illuminator module
DE102011085077B4 (en) * 2011-10-24 2020-12-31 Robert Bosch Gmbh Surface emitting semiconductor laser
DE102011085344B4 (en) * 2011-10-27 2022-12-01 Robert Bosch Gmbh laser light source
DE102011085340A1 (en) * 2011-10-27 2013-05-02 Robert Bosch Gmbh Laser light source and operating method therefor
US8576885B2 (en) 2012-02-09 2013-11-05 Princeton Optronics, Inc. Optical pump for high power laser
US9329080B2 (en) 2012-02-15 2016-05-03 Aplle Inc. Modular optics for scanning engine having beam combining optics with a prism intercepted by both beam axis and collection axis
AU2013219966B2 (en) 2012-02-15 2015-04-02 Apple Inc. Scanning depth engine
CN104730825B (en) * 2012-03-15 2019-04-02 苹果公司 Photoelectricity projection device
CN102723665A (en) * 2012-06-21 2012-10-10 中国科学院长春光学精密机械与物理研究所 Vertical-external-cavity surface-emitting semiconductor laser with integrated micro lens
US8824519B1 (en) 2013-03-01 2014-09-02 Princeton Optronics Inc. VCSEL pumped fiber optic gain systems
CA2910202C (en) * 2013-04-22 2019-09-17 Trilumina Corp. Microlenses for multibeam arrays of optoelectronic devices for high frequency operation
WO2014203110A1 (en) 2013-06-19 2014-12-24 Primesense Ltd. Integrated structured-light projector
CN103412406B (en) * 2013-07-30 2015-12-09 中国科学院半导体研究所 A kind of red light semiconductor area array light source device for laser display
WO2015055600A1 (en) * 2013-10-16 2015-04-23 Koninklijke Philips N.V. Compact laser device
US10447011B2 (en) 2014-09-22 2019-10-15 Hewlett Packard Enterprise Development Lp Single mode vertical-cavity surface-emitting laser
US10079474B2 (en) 2014-09-22 2018-09-18 Hewlett Packard Enterprise Development Lp Single mode vertical-cavity surface-emitting laser
TWI762866B (en) 2015-02-17 2022-05-01 新世紀光電股份有限公司 Light emitting diode
US20160329461A1 (en) * 2015-02-17 2016-11-10 Genesis Photonics Inc. Light emitting diode
DE102015110141A1 (en) 2015-06-24 2016-12-29 Valeo Schalter Und Sensoren Gmbh Transmitting unit for an optical sensor device
KR102597579B1 (en) 2015-10-21 2023-11-01 프린스톤 옵트로닉스, 인크. Coded Pattern Projector
JP6662013B2 (en) * 2015-12-11 2020-03-11 株式会社リコー Surface emitting laser, surface emitting laser array, laser device, ignition device, internal combustion engine, optical scanning device, image forming device, optical transmission module, and optical transmission system
JP2017183377A (en) 2016-03-29 2017-10-05 セイコーエプソン株式会社 Quantum interference device, atomic oscillator, electronic apparatus and mobile
US10761195B2 (en) 2016-04-22 2020-09-01 OPSYS Tech Ltd. Multi-wavelength LIDAR system
EP3465845B1 (en) * 2016-06-03 2023-01-11 Princeton Optronics, Inc. Vcsel illuminator package
CN106374336B (en) * 2016-11-28 2023-05-05 深圳市凯意科技有限公司 VCSEL laser tube core packaging method
DE102017100997A1 (en) * 2017-01-19 2018-07-19 Osram Opto Semiconductors Gmbh Semiconductor laser and method for producing such a semiconductor laser
CN110402398B (en) 2017-03-13 2023-12-01 欧普赛斯技术有限公司 Eye-safe scanning lidar system
WO2019022941A1 (en) 2017-07-28 2019-01-31 OPSYS Tech Ltd. Vcsel array lidar transmitter with small angular divergence
US10153614B1 (en) 2017-08-31 2018-12-11 Apple Inc. Creating arbitrary patterns on a 2-D uniform grid VCSEL array
KR102634870B1 (en) 2017-11-15 2024-02-13 옵시스 테크 엘티디 Noise adaptive solid-state lidar system
JP7500425B2 (en) 2017-12-14 2024-06-17 ヴァイアヴィ・ソリューションズ・インコーポレイテッド Optical system
US11283240B2 (en) * 2018-01-09 2022-03-22 Oepic Semiconductors, Inc. Pillar confined backside emitting VCSEL
US11233377B2 (en) * 2018-01-26 2022-01-25 Oepic Semiconductors Inc. Planarization of backside emitting VCSEL and method of manufacturing the same for array application
JP2019165198A (en) * 2018-03-19 2019-09-26 株式会社リコー Surface emitting laser array, detection device, and laser device
WO2019181757A1 (en) * 2018-03-19 2019-09-26 Ricoh Company, Ltd. Surface-emitting laser array, detection device, and laser device
EP3775979B1 (en) 2018-04-01 2024-01-17 Opsys Tech Ltd. Noise adaptive solid-state lidar system
US10290996B1 (en) * 2018-04-25 2019-05-14 Hewlett Packard Enterprise Development Lp Bottom emitting vertical-cavity surface-emitting lasers
US20190386464A1 (en) * 2018-06-19 2019-12-19 Oepic Semiconductors, Inc. Opto-electronic device having a backside illuminating vcsel array with integrated diffractive optical elements (doe), diffuser and/or lens
US20220131345A1 (en) * 2018-09-24 2022-04-28 Ams Sensors Asia Pte. Ltd. Improved illumination device
CN109103748A (en) * 2018-09-28 2018-12-28 中国科学院长春光学精密机械与物理研究所 A kind of vertical cavity surface emitting laser arrays and preparation method thereof
US11581698B2 (en) * 2019-03-18 2023-02-14 Ricoh Company, Ltd. Optical device, lighting apparatus, measuring apparatus, part-inspecting apparatus, robot, electronic device, and movable object
US11344971B1 (en) * 2019-04-05 2022-05-31 Facebook Technologies, Llc Microlens arrays for parallel micropatterning
JP2022526998A (en) 2019-04-09 2022-05-27 オプシス テック リミテッド Solid-state LIDAR transmitter with laser control
US11846728B2 (en) 2019-05-30 2023-12-19 OPSYS Tech Ltd. Eye-safe long-range LIDAR system using actuator
WO2020251891A1 (en) 2019-06-10 2020-12-17 OPSYS Tech Ltd. Eye-safe long-range solid-state lidar system
JP7330805B2 (en) * 2019-08-08 2023-08-22 スタンレー電気株式会社 Vertical cavity light emitting device
CN114450862B (en) * 2020-04-02 2024-06-25 深圳瑞识智能科技有限公司 Bottom emitting multi-junction VCSEL array
US20220109287A1 (en) * 2020-10-01 2022-04-07 Vixar, Inc. Metalens Array and Vertical Cavity Surface Emitting Laser Systems and Methods
GB2603802A (en) 2021-02-15 2022-08-17 Ams Sensors Asia Pte Ltd Meta-optics integrated on VCSELs
US20230102622A1 (en) * 2021-09-27 2023-03-30 Lumentum Operations Llc Vertically offset vertical cavity surface emitting lasers
US11870217B2 (en) 2021-09-27 2024-01-09 Lumentum Operations Llc Bi-directional vertical cavity surface emitting lasers
WO2024099542A1 (en) 2022-11-08 2024-05-16 Spiden Ag Integrated device for spatially offset raman spectroscopy
DE102022130568A1 (en) * 2022-11-18 2024-05-23 Ams-Osram International Gmbh LASER DEVICE AND ELECTRONIC DEVICE

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318188A (en) 1987-06-19 1988-12-27 Sharp Corp Semiconductor laser array device
US5073041A (en) 1990-11-13 1991-12-17 Bell Communications Research, Inc. Integrated assembly comprising vertical cavity surface-emitting laser array with Fresnel microlenses
CA2071598C (en) 1991-06-21 1999-01-19 Akira Eda Optical device and method of manufacturing the same
US5483511A (en) 1993-02-17 1996-01-09 Vixel Corporation Multiple beam optical memory system with solid-state lasers
US5359447A (en) 1993-06-25 1994-10-25 Hewlett-Packard Company Optical communication with vertical-cavity surface-emitting laser operating in multiple transverse modes
US5422901A (en) * 1993-11-15 1995-06-06 Motorola, Inc. Semiconductor device with high heat conductivity
FR2712742B1 (en) 1993-11-15 1995-12-15 Commissariat Energie Atomique Solid, monolithic, self-aligned microlaser, passive triggering by saturable absorbent and its manufacturing process.
US5761227A (en) * 1994-08-23 1998-06-02 Laser Power Corporation Efficient frequency-converted laser
US5488619A (en) 1994-10-06 1996-01-30 Trw Inc. Ultracompact Q-switched microlasers and related method
US5455836A (en) 1994-11-23 1995-10-03 Northern Telecom Limited Optical Q-switching to generate ultra short pulses in diode lasers
US5654228A (en) 1995-03-17 1997-08-05 Motorola VCSEL having a self-aligned heat sink and method of making
US5513204A (en) 1995-04-12 1996-04-30 Optical Concepts, Inc. Long wavelength, vertical cavity surface emitting laser with vertically integrated optical pump
JP3883601B2 (en) * 1996-03-27 2007-02-21 富士通株式会社 Optical equalizer
AU2666497A (en) * 1996-04-22 1997-11-12 W.L. Gore & Associates, Inc. Vertical cavity lasers with monolithically integrated refractive microlenses
FR2751796B1 (en) 1996-07-26 1998-08-28 Commissariat Energie Atomique SOILDE MICROLASER, OPTICALLY PUMPED BY VERTICAL CAVITY SEMICONDUCTOR LASER
US5796771A (en) 1996-08-19 1998-08-18 The Regents Of The University Of California Miniature self-pumped monolithically integrated solid state laser
US5784396A (en) 1996-09-17 1998-07-21 Xerox Corporation VCSEL integral feedback assembly two-etch structure
US5812571A (en) 1996-10-25 1998-09-22 W. L. Gore & Associates, Inc. High-power vertical cavity surface emitting laser cluster
US5831960A (en) 1997-07-17 1998-11-03 Motorola, Inc. Integrated vertical cavity surface emitting laser pair for high density data storage and method of fabrication
US6021146A (en) 1997-09-15 2000-02-01 Motorola, Inc. Vertical cavity surface emitting laser for high power single mode operation and method of fabrication
US6021147A (en) 1997-11-04 2000-02-01 Motorola, Inc. Vertical cavity surface emitting laser for high power single mode operation and method of fabrication
US6044100A (en) 1997-12-23 2000-03-28 Lucent Technologies Inc. Lateral injection VCSEL
WO1999052647A1 (en) 1998-04-16 1999-10-21 The University Of New Mexico Non-planar micro-optical structures
US6121983A (en) 1998-11-19 2000-09-19 Xerox Corporation Method and apparatus for a solid state laser scanning architecture
US6376269B1 (en) * 1999-02-02 2002-04-23 Agilent Technologies, Inc. Vertical cavity surface emitting laser (VCSEL) using buried Bragg reflectors and method for producing same

Also Published As

Publication number Publication date
US6888871B1 (en) 2005-05-03
JP2004503118A (en) 2004-01-29
CA2415696A1 (en) 2002-01-17
WO2002005397A3 (en) 2003-07-17
US20050025211A1 (en) 2005-02-03
CN1448000A (en) 2003-10-08
WO2002005397A2 (en) 2002-01-17

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